Data processing apparatus for semiconductor processing apparatus

Abstract

A data processing apparatus for a semiconductor manufacturing apparatus includes a semiconductor manufacturing apparatus for executing processing for a wafer, a data collecting semiconductor device for collecting processing data generated in association with the processing, and a data copying semiconductor device for extracting the processing data collected in the data collecting semiconductor device and for producing a copy of the processing data. The apparatus may include a data analyzer for analyzing the data copy produced by the data copying semiconductor device and for diagnosing a processing state of the processing apparatus.

1 . A data processing apparatus for a semiconductor manufacturing apparatus, comprising: 
 a semiconductor manufacturing apparatus for executing processing for a wafer;    a data collecting semiconductor device for collecting processing data generated in association with the processing; and    a data copying semiconductor device for extracting the processing data collected in said data collecting semiconductor device and for producing a copy of the processing data.    
     
     
         2 . A data processing apparatus for a semiconductor manufacturing apparatus according to  claim 1 , wherein: 
 said data collecting semiconductor device includes a diagnosing section for diagnosing said semiconductor manufacturing apparatus; and    data analyzing means produces a diagnosis criterion of said diagnosing section or a model formula for diagnosis and transfers the diagnosis criterion or the model formula for diagnosis to said diagnosing section.    
     
     
         3 . A data processing apparatus for a semiconductor manufacturing apparatus according to  claim 1 , wherein said data copying semiconductor device is attached onto a data collector, said data copying semiconductor device being removable and being independently transported.  
     
     
         4 . A data processing apparatus for a semiconductor manufacturing apparatus, comprising: 
 a semiconductor manufacturing apparatus for executing processing for a wafer;    a data collecting semiconductor device for collecting processing data generated in association with the processing;    a data copying semiconductor device for extracting the processing data collected in said data collecting semiconductor device and for producing a copy of the processing data; and    data analyzing means for analyzing the data copy produced by said data copying semiconductor device and for diagnosing a processing state of said processing apparatus.    
     
     
         5 . A data processing apparatus for a semiconductor manufacturing apparatus according to  claim 4 , wherein: 
 said data collecting semiconductor device includes a diagnosing section for diagnosing said semiconductor manufacturing apparatus; and    said data analyzing means produces a diagnosis criterion of said diagnosing section or a model formula for diagnosis and transfers the diagnosis criterion or the model formula for diagnosis to said diagnosing section.    
     
     
         6 . A data processing apparatus for a semiconductor manufacturing apparatus according to  claim 4 , wherein said data copying semiconductor device is attached onto a data collector, said data copying semiconductor device being removable and being independently transported.  
     
     
         7 . A data processing apparatus for a semiconductor manufacturing apparatus, comprising: 
 a semiconductor manufacturing apparatus for executing processing for a wafer;    a data collecting semiconductor device for collecting processing data generated in association with the processing;    a data copying semiconductor device for extracting, according to an extraction condition inputted from an external semiconductor device, the processing data collected in said data collecting semiconductor device and for producing a copy of the processing data; and    data analyzing means for analyzing the data copy produced by said data copying semiconductor device and for diagnosing a processing state of said processing apparatus.    
     
     
         8 . A data processing apparatus for a semiconductor manufacturing apparatus according to  claim 7 , wherein: 
 said data collecting semiconductor device includes a diagnosing section for diagnosing said semiconductor manufacturing apparatus; and    said data analyzing means produces a diagnosis criterion of said diagnosing section or a model formula for diagnosis and transfers the diagnosis criterion or the model formula for diagnosis to said diagnosing section.    
     
     
         9 . A data processing apparatus for a semiconductor manufacturing apparatus according to  claim 7 , wherein said data copying semiconductor device is attached onto a data collector, said data copying semiconductor device being removable and being independently transported.  
     
     
         10 . A data processing apparatus for a semiconductor manufacturing apparatus according to  claim 7 , wherein input means for inputting the extraction condition is protected by authenticating means.