Bonding tool with polymer coating

Abstract

A bonding tool for bonding a wire to a substrate. The bonding tool has a body portion, a working tip coupled to one end of the body portion, an orifice extending along a longitudinal axis of the body and the working tip, and a polymer coating disposed over at least a portion of a surface of the orifice.

What is claimed:  
     
         1 . A bonding tool for bonding a wire to a substrate, the bonding tool having a body and a working tip coupled to one end of the body, and comprising: 
 an orifice extending along a longitudinal axis of the body and the working tip; and    a coating disposed over at least a portion of a surface of the orifice.    
     
     
         2 . A capillary bonding tool according to  claim 1 , wherein the coating extends along an entire length of the orifice.  
     
     
         3 . A capillary bonding tool according to  claim 2 , wherein the coating is applied to at least a portion of an exterior surface of the working tip.  
     
     
         4 . A capillary bonding tool according to  claim 1 , wherein the coating is disposed over at least a portion of an exterior surface of the working tip.  
     
     
         5 . A capillary bonding tool according to  claim 1 , wherein the coating is disposed over an exterior surface of the working tip and the body.  
     
     
         6 . A capillary bonding tool according to  claim 1 , wherein the coating is a polymer.  
     
     
         7 . A capillary bonding tool according to  claim 1 , wherein the coating is at least one of i) a polymer, ii) an Alumina, iii) Si 3 N 4  iv) silica v) a combination of 12% silica and 88% Alumina, and vi) Diamond like Silica (DLC).  
     
     
         8 . A capillary bonding tool according to  claim 1 , wherein the coating is a polymer disposed along an interior surface of the orifice and one of i) an Alumina, ii) Si 3 N 4 , iii) silica, iv) a combination of 12% silica and 88% Alumina, and v) Diamond like Silica (DLC) disposed along an exterior portion of the orifice.  
     
     
         9 . A capillary bonding tool according to  claim 1 , wherein the coating has a substantially uniform thickness.  
     
     
         10 . A capillary bonding tool according to  claim 1 , wherein the coating has a substantially uniform thickness of up to about 2.0 microns.  
     
     
         11 . A capillary bonding tool according to  claim 1 , wherein the coating has a substantially uniform thickness of about 0.1 microns.  
     
     
         12 . A capillary bonding tool according to  claim 1 , wherein the body of the bonding tool has a substantially cylindrical shape.  
     
     
         13 . A capillary bonding tool according to  claim 1 , wherein the coating is one of polyolefine and parylene.  
     
     
         14 . A capillary bonding tool according to  claim 1 , wherein the coating is formed by vapor phase deposition.  
     
     
         15 . A capillary bonding tool according to  claim 1 , wherein the coating is formed by one of chemical vapor deposition and physical vapor deposition.  
     
     
         16 . A capillary bonding tool according to  claim 1 , wherein the coating is formed by immersing the bonding tool in a coating material.  
     
     
         17 . A method of manufacturing a capillary bonding tool for bonding a fine wire to a substrate, the method comprising the steps of: 
 forming a cylindrical body;    forming a taper at a first end of the body;    forming an orifice extending along a longitudinal axis of the body; and    coating at least a portion of the orifice with a polymer.    
     
     
         18 . The method according to  claim 17 , wherein the coating step forms a substantially uniform continuous coating having a thickness of up to about 2.0 microns.  
     
     
         19 . The method according to  claim 17 , wherein the coating step forms a substantially uniform continuous coating having a thickness of at least about 0.1 micron.  
     
     
         20 . The method according to  claim 17 , wherein the coating step comprises the steps of: 
 forming a precursor monomer at a first temperature and a first pressure; and    forming the coating from the precursor monomer at a second temperature and pressure.    
     
     
         21 . The method according to  claim 20 , wherein 
 the first temperature is about 690° C.,    the first pressure is about 0.5 torr,    the second temperature is about 25° C., and    the second pressure is about 0.1 torr.    
     
     
         22 . The method according to  claim 20 , wherein the precursor monomer is formed from a di-Para-Xylyene dimer vaporized at about 150° C. and about 1.0 torr followed by a pyrolesis at about 690° C. and about 0.5 torr.  
     
     
         23 . The method according to  claim 17 , wherein the capillary is formed by i) one of direct ceramic dye pressing and ii) injection molding, and machined to a final shape by one of i) grinding and ii) Electro discharge machining.  
     
     
         24 . A bonding tool for bonding a wire to a substrate, comprising: 
 a body portion;    a working tip coupled to one end of the body;    an orifice extending along a longitudinal axis of the body and the working tip;    a first coating disposed over at least a portion of a surface of the orifice; and    a second coating disposed over at least a portion of an exterior surface of the body.    
     
     
         25 . A capillary bonding tool according to  claim 24 , wherein the first coating is a polymer and the second coating is other than a polymer.  
     
     
         26 . A capillary bonding tool according to  claim 25 , wherein the second coating is one of an alumina and Si 3 N 4 .  
     
     
         27 . A method of manufacturing a capillary bonding tool for bonding a fine wire to a substrate, the method comprising the steps of: 
 forming an orifice extending along a longitudinal axis of the bonding tool;    coating at least a portion of the orifice with a polymer; and    coating at least a portion of an exterior surface of the bonding tool with a non-polymer coating.