Reticle storage system

Abstract

A reticle storage system includes a reticle rack having a series of lateral slots, each for storing a reticle. Access to the reticles is provided on a lateral side of the rack. The enclosure has a series of doors for providing access to the reticles in the slots. An air circulation system flows filtered air past the reticles in the rack to prevent contaminants from accumulating on the reticles. The air circulation system is capable of providing positive air pressure within the enclosure with one door open, thereby preventing contaminants from entering the enclosure through the open door.

What is claimed is:  
     
         1 . A control system for controlling a robot comprising: 
 a controller for controlling the robot, the controller calculating a profile of a commanded motion before said motion is performed, said motion being performed only when the controller determines that said motion is capable of being performed.    
     
     
         2 . The system of  claim 1  in which the controller recalculates said profile until the controller determines that said motion is capable of being performed.  
     
     
         3 . The system of  claim 2  in which motion parameters are adjusted until said motion is possible.  
     
     
         4 . The system of  claim 1  in which a trajectory of said motion is calculated taking into account parameters including acceleration, jerk and velocity along multiple axes.  
     
     
         5 . The system of  claim 1  in which the controller calculates said profile in sections.  
     
     
         6 . The system of  claim 1  further comprising a drive system for driving the robot.  
     
     
         7 . The system of  claim 6  in which the robot further includes a gripper arm for gripping articles, the drive system including a gripper arm drive for driving the gripper arm.  
     
     
         8 . The system of  claim 7  in which the robot has a vertical column to which the gripper arm is movably mounted, the drive system including a vertical drive for providing vertical movement of the gripper arm relative to the vertical column.  
     
     
         9 . The system of  claim 8  in which the robot has a carriage to which the vertical column is rotatably mounted, the drive system including a rotary drive for providing rotary motion of the vertical column.  
     
     
         10 . The system of  claim 9  in which the drive system includes a bottom drive for driving the carriage of the robot.  
     
     
         11 . The system of  claim 10  further comprising a vision system for verifying position of the robot.  
     
     
         12 . A control system for controlling a robot comprising: 
 a drive system for driving the robot; and    a controller for controlling the drive system of the robot, the controller calculating a profile of a commanded motion before said motion is performed, said motion being performed only when the controller determines that said motion is capable of being performed, wherein motion parameters for said motion are adjusted until said motion is possible.    
     
     
         13 . A method of controlling a robot comprising: 
 calculating a profile of a commanded motion of the robot with a controller before said motion is performed; and    performing said motion only when the controller determines that said motion is capable of being performed.    
     
     
         14 . The method of  claim 13  further comprising recalculating said profile until the controller determines that said motion is capable of being performed.  
     
     
         15 . The method of  claim 14  further comprising adjusting motion parameters until said motion is possible.  
     
     
         16 . The method of  claim 13  further comprising calculating a trajectory of said motion taking into account parameters including acceleration, jerk and velocity along multiple axes.  
     
     
         17 . The method of  claim 13  further comprising calculating said profile in sections.  
     
     
         18 . The method of  claim 13  further comprising driving the robot with a drive system.  
     
     
         19 . The method of  claim 18  in which the robot includes a gripper arm for gripping articles and the drive system includes a gripper arm drive, the method further comprising driving the gripper arm with the gripper arm drive.  
     
     
         20 . The method of  claim 19  in which the robot includes a vertical column to which the gripper arm is movably mounted and the drive system includes a vertical drive, the method further comprising providing vertical movement of the gripper arm relative to the vertical column with the vertical drive.  
     
     
         21 . The method of  claim 20  in which the robot has a carriage to which the vertical column is rotatably mounted and the drive system includes a rotary drive, the method further comprising providing rotary motion of the vertical column with the rotary drive.  
     
     
         22 . The method of  claim 21  in which the drive system includes a bottom drive, the method further comprising driving the carriage with the bottom drive.  
     
     
         23 . The method of  claim 22  further comprising verifying position of the robot with a vision system.