Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same

Abstract

An apparatus for punching CMP machine backing film. The apparatus comprises a base, a first plate, and a second plate. The base holds the backing-film. The first plate is disposed on the base in a manner such that it moves between a first position and a second position. The first plate abuts the backing-film when it is located at the second position. The second plate, having a plurality of punches, is disposed on the base in a manner such that it moves between a third position and a fourth position. The first plate is located at the first position when the second plate is located at the third position. The first plate is located at the second position when the second plate is located at the fourth position so that the punches pass through the first plate to punch the backing-film.

What is claimed is:  
     
         1 . An apparatus for punching CMP machine backing film, comprising: 
 a base for holding the backing-film;    a first plate disposed on the base in a manner such that it moves between a first position and a second position, wherein the first plate abuts the backing-film when it is located at the second position; and    a second plate, having a plurality of punches, disposed on the base in a manner such that it moves between a third position and a fourth position, wherein the first plate is located at the first position when the second plate is located at the third position, and the first plate is located at the second position when the second plate is located at the fourth position so that the punches pass through the first plate to punch the backing-film.    
     
     
         2 . The apparatus as claimed in  claim 1 , wherein the first plate is provided with a plurality of lead holes corresponding to the punches of the second plate.  
     
     
         3 . The apparatus as claimed in  claim 1 , wherein the base is provided with a concave portion for the backing-film disposing thereupon.  
     
     
         4 . The apparatus as claimed in  claim 1 , further comprising: 
 a cylinder, connecting with the second plate, for moving the first plate and the second plate; and    a plurality of main rods, disposed on the base, for guiding the movement of the first plate and the second plate; and    a plurality of connecting members connecting the first plate and the second plate in a manner such that the first plate moves relative to the second plate.    
     
     
         5 . The apparatus as claimed in  claim 4 , wherein the first plate is provided with a plurality of first through holes, and the second plate is provided with a plurality of second through holes corresponding to the first through holes, and the main rods pass through the first through holes and the second through holes.  
     
     
         6 . The apparatus as claimed in  claim 4 , wherein each of the connecting members is provided with an opening for connecting the first plate and the second plate.  
     
     
         7 . The apparatus as claimed in  claim 4 , further comprising: 
 a gas-supplying device, communicating with the cylinder and supplying gas to the cylinder;    two buttons electrically coupled to the gas-supplying device, wherein the gas-supplying device supplies gas to the cylinder when the buttons are actuated at the same time; and    an actuating rod connecting the cylinder and the second plate.    
     
     
         8 . A preventive maintenance method for CMP machine backing film, comprising: 
 (a) providing a punching apparatus;    (b) providing the CMP machine having a shaft and a detachable top ring disposed on the shaft, wherein the top ring is provided with a plurality of air holes, a detachable guide ring, and a replaceable backing-film, and the backing-film is pre-drilled by the punching apparatus to produce a plurality of holes that correspond to the air holes;    (c) disassembling the top ring from the shaft before the preventive maintenance for the backing-film proceeds;    (d) cleaning the top ring after disassembling the guide ring from the top ring and removing the used backing-film; and    (e) putting the new backing-film on the top ring and assembling the top ring to the shaft.