US2004126625A1PendingUtilityA1
High dielectric strength member
Priority: Dec 27, 2002Filed: Dec 18, 2003Published: Jul 1, 2004
Est. expiryDec 27, 2022(expired)· nominal 20-yr term from priority
C23C 24/04C23C 4/11H02H 1/00H01B 3/12
47
PatentIndex Score
0
Cited by
0
References
0
Claims
Abstract
A sprayed member is obtained by plasma spraying an oxide containing a rare earth element having atomic number 64 to 71 onto a substrate to form a spray coating. The sprayed member exhibits a high dielectric strength without a need for sealing treatment and is useful as dielectric rolls, heating substrates, electrostatic chucks, susceptors and the like.
Claims
exact text as granted — not AI-modified1 . A high dielectric strength member comprising a substrate and a high dielectric strength coating formed thereon in the form of a sprayed coating of an oxide containing a rare earth element having atomic number 64 to 71.
2 . The high dielectric strength member of claim 1 wherein the sprayed coating has not been subjected to sealing treatment.Join the waitlist — get patent alerts
Track US2004126625A1 — get alerts on status changes and closely related new filings.
We store only your email — no account needed. See our privacy policy.