Inorganic nanoporous membranes and methods to form same

Abstract

The invention provides a method of forming an inorganic porous membrane that includes forming an inorganic membrane material on a substrate, forming a porous self-assembled material on the inorganic membrane material, and patterning the membrane material using the porous self-assembled material as a mask.

1 . A method of forming an inorganic porous membrane comprising: 
 forming an inorganic membrane material;    forming a porous self-assembled material on said inorganic membrane material; and    patterning the membrane material using said porous self-assembled material as a mask.    
     
     
         2 . The method in  claim 1 , wherein said forming of said porous self-assembled material comprises: 
 forming a layer that comprises a material that self-assembles into a structure having pores.    
     
     
         3 . The method in  claim 2 , wherein said forming of said layer further comprises removal of at least one component from said layer.  
     
     
         4 . The method in  claim 3 , wherein said component comprises a multi block copolymer.  
     
     
         5 . The method in  claim 2 , further comprising orienting said pores perpendicular to the plane of said layer.  
     
     
         6 . The method in  claim 1 , wherein said forming of said porous self-assembled material comprises forming an alumina film; and 
 anodizing said alumina film.    
     
     
         7 . The method in  claim 6 , wherein said anodizing forms a porous alumina film.  
     
     
         8 . The method in  claim 1 , wherein said forming of said porous self-assembled material comprises chemically synthesizing nanoparticles into a layer.  
     
     
         9 . The method in  claim 8 , wherein interstities between said nanoparticles in said layer comprise pores in said porous self-assembled material.  
     
     
         10 . The method in  claim 1 , wherein said forming of said porous self-assembled material comprises: 
 forming a first material on said membrane material, wherein said first material includes self-assembled particles; and    removing said particles to leave pores in said first material.    
     
     
         11 . A method of forming a porous self-assembled mask comprising: 
 forming a layer that comprises a material that self-assembles into a structure having pores.    
     
     
         12 . The method in  claim 11 , further comprising orienting said pores perpendicular to the plane of said layer.  
     
     
         13 . A method of forming a porous self-assembled mask comprising: 
 forming an alumina film; and    anodizing said alumina film.    
     
     
         14 . The method in  claim 13 , wherein said anodizing forms a porous alumina film.  
     
     
         15 . A method of forming a porous self-assembled mask comprising chemically synthesizing nanoparticles into a layer.  
     
     
         16 . The method in  claim 15 , wherein interstities between said nanoparticles in said layer comprise pores in said porous self-assembled mask.  
     
     
         17 . A method of forming a porous self-assembled mask comprising: 
 forming a first material, wherein said first material includes self-assembled particles; and    removing said particles to leave pores in said first material.    
     
     
         18 . The method in  claim 17 , further comprising, before said removing process, orienting said particles perpendicular to the plane of said first material.  
     
     
         19 . The method in  claim 17 , wherein said particles comprise multi block copolymers.  
     
     
         20 . An inorganic porous membrane comprising: 
 a substrate support having a gap; and    an inorganic film suspended from said substrate across said gap, said inorganic film comprising an array of pores,    wherein said pores have pore diameters less than 30 nm, and    wherein said pores have pore diameter distributions of less than 20%.