Crystals comprising single-walled carbon nanotubes
Abstract
The invention is directed to a method of manufacturing single-walled carbon nanotubes comprising the steps of providing on a substrate at least one pillar comprising alternate layers of a first precursor material comprising fullerene molecules and a second precursor material comprising a catalyst, and heating the at least one pillar. It further is directed to a precursor arrangement for manufacturing single-walled carbon nanotubes comprising on a substrate at least one pillar comprising alternate layers of a first precursor material comprising fullerene molecules and a second precursor material comprising a catalyst. A third aspect is a nanotube arrangement comprising a substrate and thereupon at least one crystal comprising a bundle of single-walled carbon nanotubes with essentially identical orientation and structure.
Claims
exact text as granted — not AI-modified1 . Method of manufacturing single-walled carbon nanotubes ( 19 ) comprising the steps of
a) providing on a substrate ( 4 ) a plurality of pillars ( 8 ) comprising alternate layers of a first precursor material ( 15 ) comprising fullerene molecules and a second precursor material ( 16 ) comprising a catalyst, b) heating the plurality of pillars ( 8 ).
2 . Method according claim 1 whereby the substrate ( 4 ) is selected to offer at least one crystallisation site for growing the single-walled carbon nanotubes ( 19 ).
3 . Method according to one of claims 1 or 2 whereby the substrate ( 4 ) is selected to comprise thermally oxidized silicon or molybdenum in the form of a grid or as a solid film provided on a silicon wafer.
4 . Method according to one of claims 1 to 3 whereby for providing the the plurality of pillars ( 8 ) between 5 and 10 layers of the precursor materials ( 15 , 16 ) are deposited upon each other, each layer having a thickness between 5 and 30 nm.
5 . Method according to one of claims 1 to 4 whereby the precursor materials ( 15 , 16 ) are deposited through a shadow mask ( 7 ) comprising one or more apertures ( 14 ).
6 . Method according to one of claims 1 to 5 whereby the precursor materials ( 15 , 16 ) are provided by thermal evaporation.
7 . Method according to claim 6 whereby the evaporation of the precursor materials ( 15 , 16 ) is performed at a pressure of around 10 −9 Torr, and whereby the substrate ( 4 ) is kept at room temperature.
8 . Method according to claim 6 or 7 whereby the evaporation of the precursor materials ( 15 , 16 ) is controlled by using a shuttering mechanism ( 18 ) and an in situ balance for monitoring the deposition rate for the precursor materials ( 15 , 16 ).
9 . Method according to one of claims 6 to 8 whereby the evaporation is controlled such that the thickness of the layers decreases with their distance from the substrate ( 4 ).
10 . Method according to one of claims 1 to 9 whereby the heating is performed up to a temperature of essentially 950° C. in a vacuum of essentially 10 −6 Torr or in an essentially inert gas atmosphere, for a time between 3 minutes and an hour.
11 . Precursor arrangement for manufacturing single-walled carbon nanotubes ( 19 ) comprising on a substrate ( 4 ) a plurality of pillars ( 8 ) comprising alternate layers of a first precursor material ( 15 ) comprising fullerene molecules and a second precursor material ( 16 ) comprising a catalyst.
12 . Precursor arrangement according to claim 11 , wherein the layers have a thickness that decreases with their distance from the substrate ( 4 ).
13 . Precursor arrangement according to claim 11 or 12 , wherein the substrate ( 4 ) has at least one crystallisation site for growing the single-walled carbon nanotubes ( 19 ), said substrate ( 4 ) preferably comprising thermally oxidized silicon or molybdenum in the form of a grid or as a solid film provided on a silicon wafer.
14 . Precursor arrangement according to one of claims 11 to 13 , wherein the second precursor material ( 16 ) comprises a magnetic material, preferably a metal being selected from the group Ni, Co, Fe, Mo.
15 . Nanotube arrangement comprising a substrate ( 4 ) and thereupon at least one crystal ( 20 ) comprising a bundle of single-willed carbon nanotubes ( 19 ) with essentially identical orientation and structure.
16 . Nanotube arrangement according to claim 15 wherein the substrate ( 4 ) has a surface with crystallisation sites wherefrom the single-walled carbon nanotubes ( 19 ) have grown, preferably comprising thermally oxidized silicon or molybdenum in the form of a grid or as a solid film provided on a silicon wafer.
17 . Nanotube arrangement according to claim 15 or 16 wherein in the case of several crystals ( 20 ), said crystals ( 20 ) are essentially parallel to each other.
18 . Nanotube arrangement according to one of claims 15 to 17 wherein the single-walled carbon nanotubes ( 19 ) are essentially straight along their length.
19 . Nanotube crystal comprising a bundle of straight single-walled carbon nanotubes ( 19 ) with essentially identical orientation and structure.
20 . Display, electrical circuit, switching element or sensor element comprising at least one nanotube arrangement according to one of claims 15 to 18 or at least one nanotube crystal ( 20 ) according to claim 19.Join the waitlist — get patent alerts
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