Method of manufacture an on-chip inductor having a square geometry and high Q factor

Abstract

An on-chip inductor and/or on-chip transformer includes at least one dielectric layer and at least one conductive winding on the at least one dielectric layer. The conductive winding has a substantially square geometry and has at least its exterior corners geometrically shaped to reduce impedance of the conductive winding at a particular operating frequency. Since the quality factor of an on-chip inductor is inversely proportional to the effective series impedance of an inductor at an operating frequency, by reducing the effective series impedance, the quality factor is increased.

What is claimed is:  
     
         1 . A method for manufacturing an on-chip inductor comprises: 
 creating a dielectric layer; and    creating a conductive winding on the dielectric layer, wherein the conductive winding has a substantially square geometry, wherein corners of the conductive winding are geometrically shaped to reduce impedance of the on-chip inductor at an operating frequency.    
     
     
         2 . The method of  claim 1 , wherein the creating of the conductive winding further comprises: 
 creating the geometric shaping of the corners to include an interior angle per corner of approximately ninety degrees, and an exterior angle per corner of approximately one hundred thirty-five degrees.    
     
     
         3 . The method of  claim 1 , wherein the creating of the conductive winding further comprises: 
 creating the geometric shaping of the corners to include an interior angle per corner of approximately one hundred thirty-five degrees, and an exterior angle per corner of approximately one hundred thirty-five degrees.    
     
     
         4 . The method of  claim 1  further comprises: 
 creating the conductive winding to have a spiral configuration, wherein the corners of the spiral configuration are geometrically shaped to reduce impedance of the on-chip inductor at the operating frequency.  
 
     
     
         5 . The method of  claim 1 , wherein the creating of the conductive winding further comprises: 
 creating a first winding on a first layer;    creating a second winding on a second layer; and    connecting the first winding to the second winding with at least one bridge.    
     
     
         6 . The method of  claim 1 , wherein the creating of the conductive winding further comprises: 
 creating the geometric shaping of the corners to include angled exterior corners, wherein at least one angle per exterior corner reduces current turbulence in the corner at the operating frequency.    
     
     
         7 . The on-chip inductor of  claim 6 , wherein the creating of the conductive winding further comprises: 
 creating the geometric shaping of the corners to include angled interior corners, wherein at least one angle per interior corner further reduces current turbulence in the corner at the operating frequency.    
     
     
         8 . A method of manufacturing an on-chip transformer comprises: 
 creating primary conductive winding that has a substantially square geometry, wherein corners of the primary conductive winding are geometrically shaped to reduce impedance of the primary conductive winding at an operating frequency; and    creating secondary conductive winding that has a substantially square geometry, wherein corners of the secondary conductive winding are geometrically shaped to reduce impedance of the secondary conductive winding at an operating frequency, wherein the secondary conductive winding is magnetically coupled to the primary conductive winding.    
     
     
         9 . The method of  claim 8 , wherein the creating of the primary and secondary conductive windings further comprises: 
 creating the geometric shaping of the corners to include an interior angle per corner of approximately ninety degrees, and an exterior angle per corner of approximately one hundred thirty-five degrees.    
     
     
         10 . The method of  claim 8 , wherein the creating of the primary and secondary conductive windings further comprises: 
 creating the geometric shaping of the corners to include an interior angle per corner of approximately one hundred thirty-five degrees, and an exterior angle per corner of approximately one hundred thirty-five degrees.    
     
     
         11 . The method of  claim 8  further comprises: 
 creating dielectric layer;  
 creating the primary conductive winding on the dielectric layer, wherein the primary conductive winding includes a spiral configuration, wherein the corners of the spiral configuration are geometrically shaped to reduce impedance of the primary conductive winding at the operating frequency; and  
 creating the secondary conductive winding on the dielectric layer, wherein the secondary conductive winding includes a secondary spiral configuration interwoven with the spiral configuration of the primary conductive winding, wherein the corners of the secondary spiral configuration are geometrically shaped to reduce impedance of the secondary conductive winding at the operating frequency.  
 
     
     
         12 . The method of  claim 8  further comprises: 
 creating a first dielectric layer;  
 creating the primary conductive winding on the first dielectric layer, wherein the primary conductive winding includes a spiral configuration, wherein the corners of the spiral configuration are geometrically shaped to reduce impedance of the primary conductive winding at the operating frequency;  
 creating a second dielectric layer juxtaposed to the primary conductive winding; and  
 creating the secondary conductive winding on the secondary dielectric layer, wherein the secondary conductive winding includes the spiral configuration, wherein the corners of the spiral configuration are geometrically shaped to reduce impedance of the secondary conductive winding at the operating frequency.  
 
     
     
         13 . The method of  claim 8 , wherein creating each of the primary and secondary conductive windings further comprises: 
 creating a first winding on a first layer;    creating a second winding on a second layer; and    connecting the first winding to the second winding with at least one bridge.    
     
     
         14 . The method of  claim 8 , wherein the creating of the primary and secondary conductive windings further comprises: 
 creating the geometric shaping of the corners to include angled exterior corners, wherein at least one angle per exterior corner reduces current turbulence in the corner at the operating frequency.    
     
     
         15 . The method of  claim 14 , wherein the creating of the primary and secondary conductive windings further comprises: 
 creating the geometric shaping of the corners to include angled interior corners, wherein at least one angle per interior corner further reduces current turbulence in the corner at the operating frequency.