Method of fabricating polishing pad having detection window thereon

Abstract

The present invention provides a method of fabricating a polishing pad having a detection window thereon. A mold having a cavity therein and a transparent thermosetting plastic part that is incompletely hardened are provided. The transparent thermosetting plastic part is disposed in the mold and a high molecular weight foam is injected into the cavity of the mold. The transparent thermosetting plastic part and the high molecular weight foam are hardened at the same time. After the step of demolding is performed, a polishing pad having a detection window thereon is formed. Moreover, the transparent thermosetting plastic part can be designed to have the central portion thicker than its peripheral portion for preventing deformation that is caused by the material difference of the detection window and other portions of the polishing pad.

What is claimed is:  
     
         1 . A method of fabricating a polishing pad having a detection window thereon, comprising: 
 providing a transparent thermosetting plastic part and a mold with a cavity, wherein the transparent thermosetting plastic part is not completely hardened;    placing the transparent thermosetting plastic part into the cavity of the mold;    injecting a high molecular weight foam into the cavity of the mold, wherein the high molecular weight foam and the transparent thermosetting plastic part become completely hardened at the same time; and    performing demolding to remove the mold, so as to obtain the polishing pad with the detection window.    
     
     
         2 . The method of  claim 1 , wherein a material of the transparent thermosetting plastic part is selected from the following group consisting of a fully transparent high molecular weight material and a semi-transparent high molecular weight material.  
     
     
         3 . The method of  claim 1 , wherein a material of the transparent thermosetting plastic part is selected from the following group consisting of acrylic resin (PMMA), polyurethane (PU), polyvinyl chloride (PVC), epoxy resin and unsaturated polyester (UP).  
     
     
         4 . The method of  claim 1 , wherein the transparent thermosetting plastic part has a hardness ranging from 70 Shore A to 75 Shore D.  
     
     
         5 . The method of  claim 1 , wherein the transparent thermosetting plastic part has a central portion thicker than a peripheral portion.  
     
     
         6 . The method of  claim 1 , wherein the high molecular weight foam comprises a polyurethane foam.  
     
     
         7 . The method of  claim 1 , wherein the transparent thermosetting plastic part has a shape selected from the following group consisting of round, ellipsoidal and tetragonal.  
     
     
         8 . The method of  claim 1 , wherein a side surface of the transparent thermosetting plastic part is an uneven surface.  
     
     
         9 . The method of  claim 8 , wherein the side surface of the transparent thermosetting plastic part is configured to have a shape selected from the following group consisting of a serrated shape, a wavy shape and a toothed shape.  
     
     
         10 . The method of  claim 1 , wherein the polishing pad has an attrition rate equivalent to that of the detection window.  
     
     
         11 . A method of fabricating a polishing pad having a detection window thereon, comprising: 
 providing a transparent thermosetting plastic part and a mold with a cavity, wherein the transparent thermosetting plastic part is not completely hardened;    placing the transparent thermosetting plastic part into the cavity of the mold;    injecting a high molecular weight foam into the cavity of the mold;    forming a high molecular weight material layer on the high molecular weight foam in the cavity of the mold; wherein the high molecular weight foam, the high molecular weight material layer and the transparent thermosetting plastic part become completely hardened at the same time; and    performing demolding to remove the mold, so as to obtain the polishing pad with the detection window.    
     
     
         12 . The method of  claim 11 , wherein a material of the transparent thermosetting plastic part is selected from the following group consisting of a fully transparent high molecular weight material and a semi-transparent high molecular weight material.  
     
     
         13 . The method of  claim 11 , wherein a material of the transparent thermosetting plastic part is selected from the following group consisting of acrylic resin (PMMA), polyurethane (PU), polyvinyl chloride (PVC), epoxy resin and unsaturated polyester (UP).  
     
     
         14 . The method of  claim 11 , wherein the transparent thermosetting plastic part has a hardness ranging from 70 Shore A to 75 Shore D.  
     
     
         15 . The method of  claim 11 , wherein the transparent thermosetting plastic part has a central portion thicker than a peripheral portion.  
     
     
         16 . The method of  claim 11 , wherein the high molecular weight foam comprises a polyurethane foam.  
     
     
         17 . The method of  claim 11 , wherein a material of the high molecular weight material layer is selected from the following group consisting of polyurethane (PU), silicon rubber, polybutyl rubber (PBR), polyvinyl chloride (PVC) latex and polyacrylic acid series (PMMA) latex.  
     
     
         18 . The method of  claim 11 , wherein the transparent thermosetting plastic part has a shape selected from the following group consisting of round, ellipsoidal and tetragonal.  
     
     
         19 . The method of  claim 11 , wherein a side surface of the transparent thermosetting plastic part is an uneven surface.  
     
     
         20 . The method of  claim 19 , wherein the side surface of the transparent thermosetting plastic part is configured to have a shape selected from the following group consisting of a serrated shape, a wavy shape and a toothed shape.  
     
     
         21 . The method of  claim 11 , wherein the high molecular weight foam has a hardness larger than that of the high molecular weight material layer.  
     
     
         22 . The method of  claim 21 , wherein the hardness of the high molecular weight foam ranges from 30 Shore D to 80 Shore D.  
     
     
         23 . The method of  claim 21 , wherein the high molecular weight material layer has a hardness ranging from 5 Shore A to 60 Shore A.  
     
     
         24 . The method of  claim 11 , wherein the polishing pad has an attrition rate equivalent to that of the detection window.  
     
     
         25 . A method of fabricating a polishing pad having a detection window thereon, comprising: 
 providing a transparent thermosetting plastic part and a mold with a cavity, wherein the transparent thermosetting plastic part is not completely hardened;    placing the transparent thermosetting plastic part into the cavity of the mold, while a side surface of the transparent thermosetting plastic part is coated with an incomplete reactive material;    injecting a high molecular weight foam into the cavity of the mold, wherein the incomplete reactive material has chemical reactions with the high molecular weight foam, and wherein the incomplete reactive material, the high molecular weight foam and the transparent thermosetting plastic part become completely hardened at the same time; and    performing demolding to remove the mold, so as to obtain the polishing pad with the detection window.    
     
     
         26 . The method of  claim 25 , wherein a material of the transparent thermosetting plastic part is selected from the following group consisting of a fully transparent high molecular weight material and a semi-transparent high molecular weight material.  
     
     
         27 . The method of  claim 25 , wherein a material of the transparent thermosetting plastic part is selected from the following group consisting of acrylic resin (PMMA), polyurethane (PU), polyvinyl chloride (PVC), epoxy resin and unsaturated polyester (UP).  
     
     
         28 . The method of  claim 25 , wherein the transparent thermosetting plastic part has a hardness ranging from 70 Shore A to 75 Shore D.  
     
     
         29 . The method of  claim 25 , wherein the transparent thermosetting plastic part has a central portion thicker than a peripheral portion.  
     
     
         30 . The method of  claim 25 , wherein the high molecular weight foam comprises a polyurethane foam.  
     
     
         31 . The method of  claim 25 , wherein the incomplete reactive material comprises a thermal adhesive.  
     
     
         32 . The method of  claim 25 , wherein the transparent thermosetting plastic part has a shape selected from the following group consisting of round, ellipsoidal and tetragonal.  
     
     
         33 . The method of  claim 25 , wherein the side surface of the transparent thermosetting plastic part is an uneven surface.  
     
     
         34 . The method of  claim 33 , wherein the side surface of the transparent thermosetting plastic part is configured to have a shape selected from the following group consisting of a serrated shape, a wavy shape and a toothed shape.  
     
     
         35 . The method of  claim 25 , wherein the polishing pad has an attrition rate equivalent to that of the detection window.