US2004087248A1PendingUtilityA1

Polishing method and apparatus

43
Priority: Jul 12, 2002Filed: Jul 11, 2003Published: May 6, 2004
Est. expiryJul 12, 2022(expired)· nominal 20-yr term from priority
Inventors:Kazuto Hirokawa
B24D 18/0009B24B 37/015
43
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

A polishing tool such as a fixed abrasive polishing tool or a polishing pad is used in a polishing apparatus. A workpiece is pressed against a polishing surface of the polishing tool containing a resin to bring the workpiece into sliding contact with the polishing tool, thereby polishing the workpiece. The polishing surface of the polishing tool is kept at a temperature equal to or lower than a glass transition temperature of the polishing tool.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A polishing method for polishing a workpiece, comprising: 
 pressing a workpiece against a polishing surface of a polishing tool containing a resin to bring the workpiece into sliding contact with said polishing tool, thereby polishing the workpiece with abrasive particles;    wherein at least a part of said polishing tool is kept at a temperature equal to or lower than a glass transition temperature of said polishing tool.    
     
     
         2 . A method according to  claim 1 , wherein said polishing surface of said polishing tool is kept at said temperature equal to or lower than the glass transition temperature of said polishing tool.  
     
     
         3 . A method according to  claim 1 , wherein a table or a base plate on which said polishing tool is mounted is cooled to cool said polishing tool or regulate the temperature of said polishing tool to said temperature equal to or lower than the glass transition temperature of said polishing tool.  
     
     
         4 . A method according to  claim 1 , wherein a polishing liquid having a temperature equal to or lower than the glass transition temperature of said polishing tool is supplied to said polishing surface while the workpiece is being polished.  
     
     
         5 . A method according to  claim 4 , wherein said polishing liquid comprises cold water or a chemical liquid.  
     
     
         6 . A method according to  claim 1 , wherein a dressing liquid having a temperature equal to or lower than the glass transition temperature of said polishing tool is supplied to said polishing surface while said polishing surface is being dressed.  
     
     
         7 . A method according to  claim 1 , wherein a surface of the workpiece being polished is cooled to cool the surface of the workpiece or to regulate the temperature of the surface of the workpiece, thereby cooling said polishing tool or regulating the temperature of said polishing tool to said temperature equal to or lower than the glass transition temperature of said polishing tool.  
     
     
         8 . A method according to  claim 1 , further comprising: 
 holding a processing assistance member in contact with said polishing surface; and    cooling said processing assistance member or regulating the temperature of said processing assistance member to keep said polishing tool at said temperature equal to or lower than the glass transition temperature of said polishing tool.    
     
     
         9 . A method according to  claim 8 , wherein said processing assistance member comprises a dresser for dressing said polishing tool or a member attached to said dresser, said dresser or said member being held in contact with said polishing tool.  
     
     
         10 . A method according to  claim 8 , wherein said processing assistance member is operable independently of said dresser and a holder for holding the workpiece, and said processing assistance member is held in contact with said polishing tool.  
     
     
         11 . A method according to  claim 8 , wherein said processing assistance member is attached to a holder for holding the workpiece and held in contact with said polishing tool.  
     
     
         12 . A polishing method for polishing a workpiece, comprising: 
 pressing a workpiece against a polishing surface of a polishing tool containing a resin to bring the workpiece into sliding contact with said polishing tool, thereby polishing the workpiece with abrasive particles;    wherein a processing circumstance is kept at a temperature equal to or lower than a glass transition temperature of said polishing tool.    
     
     
         13 . A polishing apparatus for polishing a workpiece, comprising: 
 a polishing tool containing a resin;    a holder for holding and pressing a workpiece against said polishing tool to bring the workpiece into sliding contact with said polishing tool, thereby polishing the workpiece with abrasive particles;    a temperature regulating device for keeping said polishing tool at a temperature equal to or lower than a glass transition temperature of said polishing tool.    
     
     
         14 . An apparatus according to  claim 13 , wherein said temperature regulating device cools a table or a base plate on which said polishing tool is mounted to cool said polishing tool or regulate the temperature of said polishing tool to said temperature equal to or lower than the glass transition temperature of said polishing tool.  
     
     
         15 . An apparatus according to  claim 13 , wherein a polishing liquid having a temperature equal to or lower than the glass transition temperature of said polishing tool is supplied to said polishing surface while the workpiece is being polished.  
     
     
         16 . An apparatus according to  claim 15 , wherein said polishing liquid comprises cold water or a chemical liquid.  
     
     
         17 . An apparatus according to  claim 13 , wherein a surface of the workpiece being polished is cooled to cool the surface of the workpiece or to regulate the temperature of the surface of the workpiece, thereby cooling said polishing tool or regulating the temperature of said polishing tool to said temperature equal to or lower than the glass transition temperature of said polishing tool.  
     
     
         18 . An apparatus according to  claim 13 , further comprising: 
 a processing assistance member which is brought in contact with said polishing surface; and    a temperature regulating device for cooling said processing assistance member or regulating the temperature of said temperature regulating device to keep said polishing tool at said temperature equal to or lower than the glass transition temperature of said polishing tool.    
     
     
         19 . An apparatus according to  claim 18 , wherein said processing assistance member comprises a dresser for dressing said polishing tool or a member attached to said dresser, said dresser or said member being held in contact with said polishing tool.  
     
     
         20 . An apparatus according to  claim 18 , wherein said processing assistance member is operable independently of said dresser and a holder for holding the workpiece, and said processing assistance member is held in contact with said polishing tool.  
     
     
         21 . An apparatus according to  claim 18 , wherein said processing assistance member is attached to a holder for holding the workpiece and held in contact with said polishing tool.  
     
     
         22 . A method of manufacturing a polishing tool, comprising: 
 drying a mixed liquid including a resin and chemical agents to form a dried solid material; and    compressing and forming said dried solid material with heat into a polishing tool;    wherein said drying temperature is lower than the temperature of said compressing and forming.    
     
     
         23 . A method according to  claim 22 , wherein said mixed liquid includes abrasive particles.  
     
     
         24 . A method of manufacturing a polishing tool, comprising: 
 drying a mixed liquid including a resin and chemical agents to form a dried solid material; and    compressing and forming said dried solid material with heat into a polishing tool;    wherein the temperature of said compressing and forming is higher than a glass transition temperature of said resin or a dissolution temperature of said resin.    
     
     
         25 . A method according to  claim 24 , wherein said mixed liquid includes abrasive particles.  
     
     
         26 . A method of manufacturing a polishing tool, comprising: 
 drying a mixed liquid including a resin and chemical agents to form a dried solid material; and    compressing and forming said dried solid material with heat into a polishing tool;    wherein a resin solvent is added to said mixed liquid.    
     
     
         27 . A method according to  claim 26 , wherein said mixed liquid includes abrasive particles.  
     
     
         28 . A method of manufacturing a polishing tool, comprising: 
 drying a mixed liquid including a resin and chemical agents to form a dried solid material; and    compressing and forming said dried solid material with heat into a polishing tool;    wherein an organic solvent or a foaming agent is added to said dried solid material.    
     
     
         29 . A method according to  claim 28 , wherein said mixed liquid includes abrasive particles.

Join the waitlist — get patent alerts

Track US2004087248A1 — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.