US2004084668A1PendingUtilityA1

Back-biasing to populate strained layer quantum wells

Assignee: AMBERWAVE SYSTEMS CORPPriority: Jul 8, 2002Filed: Oct 17, 2003Published: May 6, 2004
Est. expiryJul 8, 2022(expired)· nominal 20-yr term from priority
H10D 30/801
38
PatentIndex Score
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Claims

Abstract

Transistors including a buried channel layer intermediate to a source and a drain and a surface layer intermediate to the buried layer and a gate are operated so as to cause current between the source and the drain to flow predominately through the buried channel layer by applying a back-bias voltage to the transistor. The back-bias voltage modulates a free charge carrier density distribution in the buried layer and in the surface layer.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A method for operating one or more transistors, comprising: 
 providing a transistor comprising a buried channel layer intermediate to a source and a drain, and a surface layer intermediate to the buried layer and a gate;    applying a voltage to the gate to control a current between the source and the drain; and    causing the current to flow predominately through the buried channel layer by applying a back-bias voltage to the transistor to modulate a free charge carrier density distribution in the buried layer and in the surface layer.    
     
     
         2 . The method of  claim 1 , wherein applying the back-bias voltage comprises substantially preventing formation of an inversion region in the surface layer.  
     
     
         3 . The method of  claim 1 , wherein applying the back-bias voltage comprises selecting the back-bias voltage in cooperation with the gate voltage to cause radio frequency operation of the transistor.  
     
     
         4 . The method of  claim 1 , wherein applying the voltage to the gate comprises selecting a range of gate voltages to operate the transistor in a substantially linear drain current versus source voltage condition.  
     
     
         5 . The method of  claim 1 , wherein applying the voltage to the gate comprises operating the transistor as an analog device.  
     
     
         6 . The method of  claim 5 , wherein operating the transistor comprises operating the transistor as a power device.  
     
     
         7 . The method of  claim 1 , wherein the buried channel layer has a heterojunction interface.  
     
     
         8 . The method of  claim 1 , wherein the buried channel layer comprises a strained semiconductor.  
     
     
         9 . The method of  claim 8 , wherein the surface layer comprises a semiconductor that is substantially strain-free.  
     
     
         10 . The method of  claim 8 , wherein the buried layer is intermediate to the surface layer and a relaxed layer comprising silicon and germanium.  
     
     
         11 . The method of  claim 8 , wherein the strained semiconductor is under tensile strain, and applying the back-bias voltage comprises causing the buried channel layer to provide an n-type channel, and further comprising providing a second transistor associated with the first transistor and comprising a second buried channel layer comprising a semiconductor under compressive strain, and further comprising applying a second back-bias voltage to the second transistor to cause the second buried channel layer to provide a p-type channel.  
     
     
         12 . The method of  claim 1 , wherein the buried channel layer comprises a quantum well.  
     
     
         13 . The method of  claim 1 , wherein applying the back-bias voltage comprises applying the back-bias voltage to one of a substrate and an intermediate layer adjacent to the transistor.  
     
     
         14 . A semiconductor device, comprising: 
 a transistor comprising a buried channel layer intermediate to a source and a drain, and a surface layer intermediate to the buried layer and a gate;    a terminal facilitating application of a voltage to the gate to control a current between the source and the drain; and    a charge carrier modulator facilitating application of a back-bias voltage to the transistor to modulate a free charge carrier density distribution in the buried layer and in the surface layer to cause the current to flow predominately through the buried channel layer.    
     
     
         15 . The device of  claim 14 , wherein the buried channel layer comprises a semiconductor under tensile strain.  
     
     
         16 . The device of  claim 15 , wherein the buried channel layer consists substantially of silicon.  
     
     
         17 . The device of  claim 15 , wherein the buried channel layer comprises silicon and germanium.  
     
     
         18 . The device-of  claim 14 , wherein the buried channel layer has a heterojunction interface that is associated with a heterojunction offset, the offset promoting confinement of free charge carriers in the buried channel layer.  
     
     
         19 . The device of  claim 18 , wherein the heterojunction offset is one of a type I offset and a type II offset.  
     
     
         20 . The device of  claim 18 , wherein the buried channel layer is a quantum well.  
     
     
         21 . The device of  claim 14 , wherein the device is an analog device.  
     
     
         22 . The device of  claim 14 , wherein the buried channel layer comprises a semiconductor under compressive strain.  
     
     
         23 . The device of  claim 22 , wherein the buried channel layer consists substantially of germanium.  
     
     
         24 . The device of  claim 22 , wherein the buried channel layer comprises silicon and germanium.  
     
     
         25 . The device of  claim 14 , further comprising a relaxed layer comprising silicon and germanium, in contact with the buried layer on a side opposite to the surface layer.  
     
     
         26 . The device of  claim 14 , wherein the buried channel layer comprises a semiconductor under tensile strain providing an n-type channel, and further comprising a second transistor associated with the first transistor and comprising a second buried channel layer comprising a second semiconductor under compressive strain providing a p-type channel.

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