US2004084668A1PendingUtilityA1
Back-biasing to populate strained layer quantum wells
Est. expiryJul 8, 2022(expired)· nominal 20-yr term from priority
H10D 30/801
38
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Claims
Abstract
Transistors including a buried channel layer intermediate to a source and a drain and a surface layer intermediate to the buried layer and a gate are operated so as to cause current between the source and the drain to flow predominately through the buried channel layer by applying a back-bias voltage to the transistor. The back-bias voltage modulates a free charge carrier density distribution in the buried layer and in the surface layer.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method for operating one or more transistors, comprising:
providing a transistor comprising a buried channel layer intermediate to a source and a drain, and a surface layer intermediate to the buried layer and a gate; applying a voltage to the gate to control a current between the source and the drain; and causing the current to flow predominately through the buried channel layer by applying a back-bias voltage to the transistor to modulate a free charge carrier density distribution in the buried layer and in the surface layer.
2 . The method of claim 1 , wherein applying the back-bias voltage comprises substantially preventing formation of an inversion region in the surface layer.
3 . The method of claim 1 , wherein applying the back-bias voltage comprises selecting the back-bias voltage in cooperation with the gate voltage to cause radio frequency operation of the transistor.
4 . The method of claim 1 , wherein applying the voltage to the gate comprises selecting a range of gate voltages to operate the transistor in a substantially linear drain current versus source voltage condition.
5 . The method of claim 1 , wherein applying the voltage to the gate comprises operating the transistor as an analog device.
6 . The method of claim 5 , wherein operating the transistor comprises operating the transistor as a power device.
7 . The method of claim 1 , wherein the buried channel layer has a heterojunction interface.
8 . The method of claim 1 , wherein the buried channel layer comprises a strained semiconductor.
9 . The method of claim 8 , wherein the surface layer comprises a semiconductor that is substantially strain-free.
10 . The method of claim 8 , wherein the buried layer is intermediate to the surface layer and a relaxed layer comprising silicon and germanium.
11 . The method of claim 8 , wherein the strained semiconductor is under tensile strain, and applying the back-bias voltage comprises causing the buried channel layer to provide an n-type channel, and further comprising providing a second transistor associated with the first transistor and comprising a second buried channel layer comprising a semiconductor under compressive strain, and further comprising applying a second back-bias voltage to the second transistor to cause the second buried channel layer to provide a p-type channel.
12 . The method of claim 1 , wherein the buried channel layer comprises a quantum well.
13 . The method of claim 1 , wherein applying the back-bias voltage comprises applying the back-bias voltage to one of a substrate and an intermediate layer adjacent to the transistor.
14 . A semiconductor device, comprising:
a transistor comprising a buried channel layer intermediate to a source and a drain, and a surface layer intermediate to the buried layer and a gate; a terminal facilitating application of a voltage to the gate to control a current between the source and the drain; and a charge carrier modulator facilitating application of a back-bias voltage to the transistor to modulate a free charge carrier density distribution in the buried layer and in the surface layer to cause the current to flow predominately through the buried channel layer.
15 . The device of claim 14 , wherein the buried channel layer comprises a semiconductor under tensile strain.
16 . The device of claim 15 , wherein the buried channel layer consists substantially of silicon.
17 . The device of claim 15 , wherein the buried channel layer comprises silicon and germanium.
18 . The device-of claim 14 , wherein the buried channel layer has a heterojunction interface that is associated with a heterojunction offset, the offset promoting confinement of free charge carriers in the buried channel layer.
19 . The device of claim 18 , wherein the heterojunction offset is one of a type I offset and a type II offset.
20 . The device of claim 18 , wherein the buried channel layer is a quantum well.
21 . The device of claim 14 , wherein the device is an analog device.
22 . The device of claim 14 , wherein the buried channel layer comprises a semiconductor under compressive strain.
23 . The device of claim 22 , wherein the buried channel layer consists substantially of germanium.
24 . The device of claim 22 , wherein the buried channel layer comprises silicon and germanium.
25 . The device of claim 14 , further comprising a relaxed layer comprising silicon and germanium, in contact with the buried layer on a side opposite to the surface layer.
26 . The device of claim 14 , wherein the buried channel layer comprises a semiconductor under tensile strain providing an n-type channel, and further comprising a second transistor associated with the first transistor and comprising a second buried channel layer comprising a second semiconductor under compressive strain providing a p-type channel.Join the waitlist — get patent alerts
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