US2004072520A1PendingUtilityA1
Support substrate for thin-sheet work
Priority: Dec 21, 2001Filed: Dec 11, 2002Published: Apr 15, 2004
Est. expiryDec 21, 2021(expired)· nominal 20-yr term from priority
Inventors:Masahiko Kitamura
H10P 72/7416H10P 72/7402H10P 72/0442H10P 72/50H10P 72/7616
36
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Claims
Abstract
A magnetic tape or magnetized tape is affixed to one side of a sheet-like workpiece, for example, the front surface of a semiconductor wafer. A substrate has a support area, which is at least partially formed of a porous material and is at least partially magnetized or magnetic.
Claims
exact text as granted — not AI-modified1 . A substrate for supporting a sheet-like workpiece having a magnetic tape affixed onto one side thereof, which has a support area that is at least partially formed of a porous material and at least partially magnetized.
2 . The substrate of claim 1 , wherein the support area is formed of a porous material containing a plurality of magnets dispersed therein.
3 . The substrate of claim 1. , wherein the support area is formed of a magnetized porous material.
4 . The substrate of claim 1 which has a frame surrounding the support area.
5 . A substrate for supporting a sheet-like workpiece having a magnetized tape affixed to one side thereof, which has a support area that is at least partially formed of a porous material and at least partially magnetic.
6 . The substrate of claim 5 , wherein the support area is formed of a porous and magnetic material.
7 . The substrate of claim 5 which has a frame surrounding the support area.Join the waitlist — get patent alerts
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