Cassette

Abstract

The present invention relates to a supporting plate ( 10 ) and a cassette ( 20 ) for accommodating substrates using the same. The supporting plate includes a main body ( 11 ) and at least two stiff shafts ( 13 ). The main body includes a plurality of wing panels ( 15 ) extending from the main body and at least two through grooves ( 18 ). A space interval ( 17 ) is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions ( 151 ) extending from the free side of each wing panel, and the wing panels slope down. The two stiff shafts being received in the two through grooves.

What is claimed is:  
     
         1 . A supporting plate for supporting substrates, comprising: 
 a main body having a plurality of wing panels extending from the main body and at least two through grooves,    at least two stiff shafts being received in the two through grooves,    wherein each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.    
     
     
         2 . The supporting plate as described in  claim 1 , wherein the wing panels are spaced apart from one another a predetermined distance.  
     
     
         3 . The supporting plate as described in  claim 1 , wherein each space interval defines at least a hole through the main body.  
     
     
         4 . The supporting plate as described in  claim 1 , wherein the main body defines a plurality of holding member for holding the stiff rods in the through grooves.  
     
     
         5 . The supporting plate as described in  claim 1 , wherein the through grooves are formed perpendicular to the wing panels.  
     
     
         6 . The supporting plate as described in  claim 1 , wherein the stiff shaft is made of metal.  
     
     
         7 . The supporting plate as described in  claim 1 , wherein the stiff shaft defines threaded holes in opposite ends thereof.  
     
     
         8 . A cassette for accommodating a plurality of substrates in mutual isolation, comprising: 
 a pair of frames, and    at least a pair of supporting plate fixed to the frames, each supporting plate comprising: 
 a main body having a plurality of wing panels extending from the main body and at least two through grooves,  
 at least two stiff shafts being received in the two through grooves,  
 wherein space interval is defined between neighboring wing panels, each wing panel comprises a plurality of protrusions extending from the free side of each wing panel, and the wing panels slope down.  
   
     
     
         9 . The cassette as described in  claim 8 , wherein the wing panels are spaced apart from one another a predetermined distance.  
     
     
         10 . The cassette as described in  claim 8 , wherein each space interval defines at least a hole through the main body.  
     
     
         11 . The cassette as described in  claim 8 , wherein the main body defines a plurality of holding member for holding the stiff rods in the through grooves.  
     
     
         12 . The cassette as described in  claim 8 , wherein the through grooves are formed perpendicular to the wing panels.  
     
     
         13 . The cassette as described in  claim 8 , wherein the stiff shaft is made of metal.  
     
     
         14 . The cassette as described in  claim 8 , wherein the stiff shaft defines threaded holes in opposite ends thereof.  
     
     
         15 . The cassette as described in  claim 8 , wherein the stiff shaft forms a coupling end and defines a threaded hole in each end.  
     
     
         16 . The cassette as described in  claim 8 , wherein the frame forms recesses for receiving the coupling ends of the stiff rods and through holes in the recesses.  
     
     
         17 . A cassette for supporting substrates, comprising: 
 a pair of frames, and    at least a pair of supporting plates fixed to the frames,    wherein each two supporting plates face each other, and each supporting plate defines a plurality of wing panels on an inward facing side, each wing panel comprises a plurality of protrusions extending from a free side of each wing panel, and the wing panels slope down.    
     
     
         18 . The cassette as described in  claim 17 , wherein the wing panels are spaced apart from one another a predetermined distance.  
     
     
         19 . The cassette as described in  claim 17 , wherein each space interval defines at least a hole through the main body.