Stopper rod and cassette using the same

Abstract

This invention relates to a cassette ( 1 ) for supporting substrates and includes a pair of frames ( 2 ) opposite each other, at least two supporting bodies ( 3 ) arranged opposite each other between the frames, and at least a stopper rod ( 4 ) arranged between the frames. The frames, the supporting bodies and the stopper rods define a space for accommodating the substrates, and each stopper rod includes a metal rod ( 40 ) and a resin layer ( 42 ). The resin layer forms a coating on the metal rod, forming a unit.

What is claimed is:  
     
         1 . A cassette for supporting substrates, comprising: 
 a pair of frames opposite each other,    at least two supporting bodies arranged opposite each other between the frames, and    at least a stopper rod arranged between the frames, 
 wherein the frames, the supporting bodies and the stopper rods define a space for accommodating substrates, and each stopper rod comprises a metal rod and a resin layer, and the resin layer coats the metal rod, forming a unit of the metal rod and resin layer.  
   
     
     
         2 . The cassette as described in  claim 1 , wherein a thickness of the resin layer is at least 500 micrometers.  
     
     
         3 . The cassette as described in  claim 1 , wherein the resin layer is made using a surface coating method.  
     
     
         4 . The cassette as described in  claim 1 , wherein the resin layer is made using an injection molding method.  
     
     
         5 . A stopper rod of a cassette for accommodating substrates, comprising: 
 a metal rod, and    a resin layer, 
 wherein the resin layer coats the metal rod, forming a unit of the metal rod and resin layer.  
   
     
     
         6 . The stopper rod as described in  claim 5 , wherein a thickness of the resin layer is at least 500 micrometers.  
     
     
         7 . The stopper rod as described in  claim 5 , wherein the resin layer is made using a surface coating method.  
     
     
         8 . The stopper rod as described in  claim 3 , wherein the resin layer is made using an injection molding method.  
     
     
         9 . A cassette for supporting substrates, comprising: 
 a pair of frames opposite each other,    at least two supporting bodies arranged opposite each other between the frames to from restriction in a first horizontal direction, and    at least a stopper rod disposed beside said supporting bodies to form restriction in a second horizontal direction perpendicular to said first horizontal direction; 
 wherein each of said stopper rods comprises a metal rod and a resin layer, and the resin layer coaxially enclosing the metal rod, forming a unitary piece of the metal rod and resin layer without any gap therebetween so that water can not axially invade an interior of said resin layer and exterior of the metal rod.