Homogeneous fixed abrasive polishing pad

Abstract

A homogeneous fixed abrasive polishing article, or pad, including a matrix of a cured resin coated soft filler material having at least one working surface and an abrasive uniformly distributed throughout the filler material. A method for manufacturing the polishing pad includes the steps of mixing a binder, solvent and filler material together; drying the resin coated filler material; grinding the resin coated filler material; sieving the resin coated filler material; mixing an abrasive material with the resin coated filler material; sieving the abrasive material and the resin coated filler material thereby creating a powder material; transferring the powder material to a mold to form a working surface for the polishing pad; compressing the powder material; and curing the powder material. Alternatively, the abrasive may be mixed with the binder, solvent and filler material in the first step instead of later in the process.

We claim:  
     
         1 . A homogeneous fixed abrasive polishing article comprising: 
 a) a matrix formed of a cured resin coated talc material and having at least one working surface; and    b) an abrasive uniformly distributed throughout the matrix.    
     
     
         2 . The polishing article of  claim 1  wherein the abrasive comprises ceria.  
     
     
         3 . The polishing article of  claim 1  further comprising an optically transparent portion.  
     
     
         4 . A homogeneous fixed abrasive polishing article comprising: 
 a) a filler material having a hardness less than 3 on the Mohs hardness scale;    b) an abrasive uniformly distributed throughout the filler material; and    c) a plurality of conduits through the polishing article adapted for delivering a fluid through the polishing article.    
     
     
         5 . The polishing article of  claim 4  wherein the filler material comprises talc.  
     
     
         6 . The polishing article of  claim 4  wherein the abrasive comprises ceria.  
     
     
         7 . The polishing article of  claim 4  further comprising at least one optically transparent window adapted to allow for transmission of light through the polishing article.  
     
     
         8 . A homogeneous fixed abrasive polishing article comprising: 
 a) a matrix comprised substantially of a filler material having a hardness less than 3 on the Mohs hardness scale, wherein the matrix has at least one substantially planar working surface;    b) an abrasive uniformly distributed throughout the matrix; and    c) a plurality of grooves created in the working surface for the transportation of fluids over the working surface.    
     
     
         9 . The polishing article of  claim 8  wherein the filler material comprises talc.  
     
     
         10 . The polishing article of  claim 8  wherein the abrasive comprises ceria.  
     
     
         11 . The polishing article of  claim 8  further comprising an optically transparent window portion.  
     
     
         12 . A method for manufacturing a homogeneous fixed abrasive polishing article having a working surface, comprising the steps of: 
 a) mixing a binder, a solvent and a filler material together, wherein the filler material has a hardness less than 3 on the Mohs hardness scale, thereby creating a resin coated filler material;    b) drying the resin coated filler material;    c) grinding the resin coated filler material;    d) sieving the resin coated filler material;    e) mixing an abrasive material with the resin coated filler material;    f) sieving the abrasive material and the resin coated filler material thereby creating a powder material;    g) transferring the powder material to a mold wherein the mold has at least one substantially planar surface to form a working surface for the polishing article;    h) compressing the powder material; and    i) curing the powder material.    
     
     
         13 . The method of  claim 12  further comprising the steps of: 
 j) removing the cured powder material from the mold; and  
 k) preparing the cured powder material for use on a chemical mechanical planarization tool.  
 
     
     
         14 . The method of  claim 12  wherein the filler material comprises talc.  
     
     
         15 . The method of  claim 12  wherein the abrasive is ceria.  
     
     
         16 . The method of  claim 13  further comprising the step of: 
 l) creating a plurality of conduits through the cured powder material to facilitate the distribution of fluids through the polishing article to the working surface.  
 
     
     
         17 . The method of  claim 13  further comprising the step of: 
 l) creating a plurality of grooves in the working surface of the polishing article.  
 
     
     
         18 . The method of  claim 17  wherein the grooves are formed in the working surface of the polishing article after curing.  
     
     
         19 . The method of  claim 17  wherein the grooves are formed as a result of the shape of the mold during the curing step.  
     
     
         20 . A method for manufacturing a homogeneous fixed abrasive polishing article having a working surface, comprising the steps of: 
 a) mixing a binder, a solvent, an abrasive material and a filler material together, wherein the filler material has a hardness less than 3 on the Mohs hardness scale, thereby creating a resin coated abrasive-filler material;    b) drying the resin coated abrasive-filler material;    c) grinding the resin coated abrasive-filler material;    d) sieving the resin coated abrasive-filler material thereby creating a powder material;    e) compressing the powder material in a mold; and    f) curing the powder material.    
     
     
         21 . The method of  claim 20  further comprising the steps of: 
 g) removing the cured powder material from the mold; and  
 h) preparing the cured powder material for use on a chemical mechanical planarization tool.  
 
     
     
         22 . The method of  claim 20  wherein the filler material comprises talc.  
     
     
         23 . The method of  claim 20  wherein the abrasive is ceria.  
     
     
         24 . The method of  claim 21  further comprising the step of: 
 i) creating a plurality of conduits through the polishing article to facilitate the distribution of fluids through the polishing article to the working surface.  
 
     
     
         25 . The method of  claim 21  further comprising the step of: 
 i) creating a plurality of grooves in the working surface of the polishing article.  
 
     
     
         26 . The method of  claim 25  wherein the grooves are cut into the working surface of the polishing article after the curing step.  
     
     
         27 . The method of  claim 25  wherein the grooves are formed as a result of the shape of the mold during the curing step.  
     
     
         28 . The method of  claim 21  wherein the step of curing the powder comprises applying heat.  
     
     
         29 . The method of  claim 28  wherein the step of curing the powder material by applying heat is performed simultaneously with the step of compressing the powder material.