US2004046096A1PendingUtilityA1

Support apparatus

30
Assignee: AU OPTRONICS CORPPriority: Sep 11, 2002Filed: Apr 8, 2003Published: Mar 11, 2004
Est. expirySep 11, 2022(expired)· nominal 20-yr term from priority
Inventors:Chiu-Hung Chen
H10P 72/7624H10P 72/7614
30
PatentIndex Score
0
Cited by
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References
0
Claims

Abstract

A support apparatus. The apparatus is utilized in a semiconductor process and comprises a base, a supporting portion, and a retainer ring. The base defines a hole. The supporting portion passes through the hole and protrudes from the base. The retainer ring firmly connects the base and the supporting portion.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A support apparatus, comprising: 
 a base:    a supporting portion, disposed on the base; and    a fixing portion, connecting the base and the supporting portion.    
     
     
         2 . The support apparatus as claimed in  claim 1 , wherein the fixing portion is a retainer ring.  
     
     
         3 . The support apparatus as claimed in  claim 2 , wherein the supporting portion comprises an annular slot, and the retainer ring clips onto the supporting portion fitting into the annular slot.  
     
     
         4 . The support apparatus as claimed in  claim 1 , wherein the base is male threaded and the fixing portion is female threaded connected with the male screw.  
     
     
         5 . The support apparatus as claimed in  claim 1 , wherein the base is female threaded and the fixing portion is male threaded connected with the female thread.  
     
     
         6 . The support apparatus as claimed in  claim 1 , wherein the base is stainless steel.  
     
     
         7 . The support apparatus as claimed in  claim 6 , wherein the supporting portion is ceramic.  
     
     
         8 . The support apparatus as claimed in  claim 6 , wherein the supporting portion is polybenzimidazole (PBI).  
     
     
         9 . The support apparatus as claimed in  claim 6 , wherein the supporting portion is quartz.  
     
     
         10 . A support apparatus utilized in semiconductor process, comprising: 
 a base, defining a hole;    a supporting portion, passed through the hole and protruding from the base; and    a retainer ring, firmly connecting the base and the supporting portion.    
     
     
         11 . The support apparatus as claimed in  claim 10 , wherein the supporting portion comprises an annular slot and the retainer ring clips onto the supporting portion fitting into the annular slot.  
     
     
         12 . The support apparatus as claimed in  claim 10 , wherein the retainer ring is a C-shaped retainer ring.  
     
     
         13 . The support apparatus as claimed in  claim 12 , wherein the supporting portion comprises an annular slot and the C-shaped retainer ring clips onto the supporting portion fitting into the annular slot.  
     
     
         14 . The support apparatus as claimed in  claim 10 , wherein the base is stainless steel.  
     
     
         15 . The support apparatus as claimed in  claim 14 , wherein the supporting portion is ceramic.  
     
     
         16 . The support apparatus as claimed in  claim 14 , wherein the supporting portion is polybenzimidazole (PBI).  
     
     
         17 . The support apparatus as claimed in  claim 14 , wherein the supporting portion is quartz.  
     
     
         18 . A support apparatus utilized in a semiconductor process, comprising: 
 a base, provided with a groove and a first fixing portion;    a supporting portion, placed in the groove of the base; and    a cover, having a second fixing portion connected to the first fixing portion of the base.    
     
     
         19 . The support apparatus as claimed in  claim 18 , wherein the first fixing portion is male threaded and the second fixing portion is female threaded connected with the male screw.  
     
     
         20 . The support apparatus as claimed in  claim 18 , wherein the first fixing portion is female threaded and the second fixing portion is male threaded connected with the female thread.  
     
     
         21 . The support apparatus as claimed in  claim 18 , wherein the base is stainless steel.  
     
     
         22 . The support apparatus as claimed in  claim 21 , wherein the supporting portion is ceramic.  
     
     
         23 . The support apparatus as claimed in  claim 21 , wherein the supporting portion is polybenzimidazole (PBI).  
     
     
         24 . The support apparatus as claimed in  claim 21 , wherein the supporting portion is quartz.  
     
     
         25 . The support apparatus as claimed in  claim 21 , wherein the cover is stainless steel.

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