US2004035441A1PendingUtilityA1

Apparatus and method for cleaning substrate

36
Priority: Oct 14, 1999Filed: Aug 26, 2003Published: Feb 26, 2004
Est. expiryOct 14, 2019(expired)· nominal 20-yr term from priority
Inventors:Lim-Su Lee
H10P 72/0412H10P 52/00G02F 1/133302
36
PatentIndex Score
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Cited by
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References
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Claims

Abstract

A substrate cleaning apparatus and method for a liquid crystal display panel capable of removing foreign substances attached to the lower and upper surfaces of a substrate as well as onto the side surface thereof. The apparatus includes upper and lower cleaning modules arranged in such a manner as to contact the upper and lower surfaces of the substrate. Also, a side-cleaning module is arranged at the side surfaces of the substrate.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A substrate cleaning apparatus for cleaning a substrate of a liquid crystal display panel comprising: 
 a first cleaning module on a substrate, said substrate having upper and lower surfaces; and    a side-cleaning module at a side surface of the substrate.    
     
     
         2 . The apparatus of  claim 1 , wherein the side-cleaning module includes a brush cleaner.  
     
     
         3 . The apparatus of  claim 2 , wherein the brush cleaner extends partially along the side surface of the substrate.  
     
     
         4 . The apparatus of  claim 2 , wherein the brush cleaner of the side-cleaning module is rotatable.  
     
     
         5 . The apparatus of  claim 2 , wherein the side-cleaning module further comprises a water jet device.  
     
     
         6 . The apparatus of  claim 5 , wherein the water jet device generates ultrasonic waves onto the side surface of the substrate.  
     
     
         7 . The apparatus of  claim 5 , wherein the water jet device generates ultrasonic waves onto the side surface of the substrate at a high pressure.  
     
     
         8 . The apparatus of  claim 1 , wherein the side-cleaning module comprises a vibration generating device.  
     
     
         9 . The apparatus of  claim 8 , wherein the vibration generating device includes a sonar.  
     
     
         10 . The apparatus of  claim 8 , wherein the vibration generating device generates ultrasonic waves onto the side surface of the substrate.  
     
     
         11 . The apparatus of  claim 8 , wherein the vibration generating device jets water onto the side surface of the substrate.  
     
     
         12 . The apparatus of  claim 1 , wherein the first cleaning module includes a brush cleaner.  
     
     
         13 . A method of cleaning a substrate of a liquid crystal display panel comprising: 
 providing a first cleaning module on a substrate, said substrate having upper and lower surfaces;    providing a side-cleaning module on a side surface of the substrate;    removing foreign substances on a side surface of the substrate using the side-cleaning module; and    removing foreign substances on the upper and lower surface of the substrate using the cleaning module.    
     
     
         14 . The method of  claim 13 , wherein the side-cleaning module is rotatable.  
     
     
         15 . The method of  claim 14 , wherein the side-cleaning module extends partially along the side surface of the substrate.  
     
     
         16 . The method of  claim 13 , wherein the first cleaning module is rotatable.  
     
     
         17 . The method of  claim 13 , wherein the first cleaning module includes upper and lower cleaning brushes.  
     
     
         18 . The method of  claim 17 , wherein the upper and lower cleaning brushes are arranged at the upper and lower surfaces of the substrate, respectively.  
     
     
         19 . The method of  claim 13 , further comprising cleaning the side surface of the substrate using a water jet device.  
     
     
         20 . The method of  claim 19 , wherein the water jet device generates ultrasonic waves.  
     
     
         21 . The method of  claim 19 , wherein the cleaning step includes jetting water onto the side surface of the substrate at a high pressure.  
     
     
         22 . The method of  claim 21 , wherein the water includes de-ionized water.  
     
     
         23 . A method of cleaning a substrate of a liquid crystal display panel comprising: 
 providing a cleaning module at a substrate, said substrate having upper and lower surfaces;    providing a side-cleaning module arranged at a side surface of the substrate;    removing foreign substances on a side surface of the substrate using the side-cleaning module;    removing foreign substances on the upper and lower surface of the substrate using the cleaning module; and    cleaning the side surface of the substrate using a water jet device.    
     
     
         24 . The method of  claim 23 , wherein the water jet device causes vibration on the side surface of the substrate.  
     
     
         25 . The method of  claim 24 , wherein the vibration is generated by ultrasonic waves.  
     
     
         26 . The method in  claim 23 , wherein the cleaning step includes jetting water onto the side surface of the substrate at a high pressure.  
     
     
         27 . The method of  claim 26 , wherein the water includes de-ionized water.

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