Polishing tool

Abstract

A polishing tool is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. A fixed abrasive polishing tool includes abrasive particles which are subjected to surface treatment by a coupling agent, and resin for fixing said abrasive particles. The coupling agent has an organic functional group which is not substantially bonded to said resin

What is claimed is:  
     
         1 . A fixed abrasive polishing tool comprising: 
 abrasive particles which are subjected to surface treatment by a coupling agent; and    resin for fixing said abrasive particles;    wherein said coupling agent has an organic functional group which is not substantially bonded to said resin.    
     
     
         2 . A fixed abrasive polishing tool according to  claim 1 , wherein said coupling agent comprises a chromium coupling agent, a silane coupling agent, a titanium coupling agent, an aluminium coupling agent, a zirconium coupling agent, or organometallic compounds.  
     
     
         3 . A fixed abrasive polishing tool according to  claim 1 , wherein said resin comprises polyacrylate based resin, polymethacrylate based resin, polystyrene, polyethylene, diallyl phtalate, an ethylene propylenediene ternary copolymer, an epoxy resin, a phenol resin, an urethane resin, a melamine resin, polycarbonate, polyvinyl chloride, polyimide, a styrene-butadiene copolymer, or natural rubber.  
     
     
         4 . A fixed abrasive polishing tool according to  claim 1 , wherein said coupling agent and said resin have solubility parameters which are different from each other by three or more.  
     
     
         5 . A fixed abrasive polishing tool according to  claim 1 , wherein said coupling agent and said resin have solubility parameters which are different from each other by six or more.  
     
     
         6 . A fixed abrasive polishing tool comprising: 
 abrasive particles; and    resin for fixing said abrasive particles;    wherein said resin comprises a core-shell composite polymer which is formed by polymerization to surround said abrasive particles.    
     
     
         7 . A fixed abrasive polishing tool comprising: 
 abrasive particles;    first resin for holding said abrasive particles; and    second resin which is bonded to said first resin;    wherein bond strength of said first resin and said second resin is small.    
     
     
         8 . A fixed abrasive polishing tool according to  claim 7 , wherein 
 said first resin comprises a water soluble resin or elastomer; and    said second resin comprises teflon, a silicone rubber, a natural rubber, polyisobutylene, polybutadiene, butadiene styrene copolymer, polystyrene, neoprene, polybutadiene-acrylonitrile, polyvinyl chloride, polyvinyl acetate, polymethyl methacrylate, polyethylene terephthalate, polyacrylonitrile, an epoxy resin, or an urethane resin.    
     
     
         9 . A fixed abrasive polishing tool according to  claim 7 , wherein 
 said first resin comprises teflon, a silicone rubber, a natural rubber, polyisobutylene, polybutadiene, butadiene styrene copolymer, polystyrene, neoprene, polybutadiene-acrylonitrile, polyvinyl chloride, polyvinyl acetate, polymethyl methacrylate, polyethylene terephthalate, polyacrylonitrile, an epoxy resin, or an urethane resin; and    said second resin comprises a water soluble resin or elastomer.    
     
     
         10 . A fixed abrasive polishing tool according to  claim 7 , wherein said first resin and said second resin have solubility parameters which are different from each other by three or more.  
     
     
         11 . A fixed abrasive polishing tool according to  claim 7 , wherein said first resin and said second resin have solubility parameters which are different from each other by six or more.  
     
     
         12 . A method of manufacturing a fixed abrasive polishing tool, comprising: 
 treating abrasive particles with a coupling agent; and    fixing said abrasive particles which are subjected to surface treatment by said coupling agent;    wherein said coupling agent has an organic functional group which is not substantially bonded to said resin.    
     
     
         13 . A method of manufacturing a fixed abrasive polishing tool, comprising: 
 providing a core-shell composite polymer which is formed by polymerization to surround abrasive particles; and    forming said core-shell composite polymer to form a polishing tool.    
     
     
         14 . A method according to  claim 13 , wherein said core-shell composite polymer comprises swelling resin.