Apparatus for decomposing halogenated hydrocarbon gas

Abstract

The object is to provide a method and an apparatus for decomposing halogenated hydrocarbon gas economically and stably without relying on any special treatment and without generating dioxins. The apparatus includes a carrier supporting a catalyst for decomposing halogenated hydrocarbon gas, wherein the carrier is resistant to a halogen-containing gas and is electrically conductive, the halogenated hydrocarbon gas passing through the catalyst which is supported by the carrier; and a heating mechanism for heating the carrier by an electromagnetic induction heating.

What is claimed is:  
     
         1 . An apparatus for decomposing a halogenated hydrocarbon gas comprising: 
 a carrier for supporting a catalyst for decomposing halogenated hydrocarbon gas, wherein the carrier is resistant to a halogen-containing gas and is electrically conductive, the halogenated hydrocarbon gas passing through the catalyst supported by the carrier; and    a heating mechanism for heating the carrier by electromagnetic induction heating.    
     
     
         2 . The apparatus of  claim 1 , wherein the carrier is a carbon ceramic.  
     
     
         3 . The apparatus of  claim 1 , wherein the carrier is made of SiC.  
     
     
         4 . The apparatus of  claim 1 , wherein the carrier is made of stainless steel.  
     
     
         5 . The apparatus of  claim 1 , wherein the carrier is in a honeycomb shape.  
     
     
         6 . The apparatus of  claim 3 , wherein the carrier is in a honeycomb shape.  
     
     
         7 . The apparatus of  claim 4 , wherein the carrier is in a honeycomb shape.  
     
     
         8 . An apparatus for decomposing a halogenated hydrocarbon gas comprising: 
 a heating body which is resistant to a halogen-containing gas and is electrically conductive, wherein the halogenated hydrocarbon gas passes through the heating body; and    a heating mechanism for heating the heating body by electromagnetic induction heating.    
     
     
         9 . The apparatus of  claim 8 , wherein the heating body is made of SiC.  
     
     
         10 . The apparatus of  claim 8 , wherein the heating body is made of stainless steel.