US2004023057A1PendingUtilityA1

Patterned thin film and method of forming same

39
Assignee: TDK CORPPriority: Jul 31, 2002Filed: Jul 11, 2003Published: Feb 5, 2004
Est. expiryJul 31, 2022(expired)· nominal 20-yr term from priority
Inventors:Akifumi Kamijima
H10D 84/00Y10T428/12333Y10T428/12646H05K 2201/098H05K 2203/1184H01F 17/0006Y10T428/12528C25D 5/022H05K 3/108H05K 2203/0577Y10T428/12903Y10T428/12438H01F 41/042H05K 1/165
39
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Claims

Abstract

A method of forming a patterned thin film comprises the step of forming a frame having an undercut near the bottom thereof on an electrode film, and the plating step of forming the patterned thin film by plating through the use of the frame. The patterned thin film includes a plurality of linear portions disposed side by side. Each of the linear portions has a portion close to the electrode film. This portion has a width greater than the width of the remaining portion of each of the linear portions.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A method of forming a patterned thin film including a linear portion by frame plating, the method comprising: 
 the step of forming a frame having an undercut near a bottom thereof on a base layer; and    the plating step of forming the patterned thin film by plating through the use of the frame such that the linear portion has a portion close to the base layer, the portion having a width greater than a width of the remaining portion of the linear portion.    
     
     
         2 . The method according to  claim 1 , wherein the patterned thin film is formed to include a plurality of linear portions disposed side by side.  
     
     
         3 . A patterned thin film disposed on a base layer and including a linear portion, wherein the linear portion has a portion close to the base layer, the portion having a width greater than a width of the remaining portion of the linear portion.  
     
     
         4 . The patterned thin film according to  claim 3 , including a plurality of linear portions disposed side by side.

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