Label sheet for cleaning and conveying member having cleaning function

Abstract

A label sheet for cleaning is formed of a label for cleaning including a cleaning layer having a 180° peeling adhesion to a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of surfaces of said cleaning layer, and a separator on which the label is removably provided through the adhesive layer.

1 . A label sheet for cleaning comprising: 
 a label for cleaning including a cleaning layer having a 180° peeling adhesion to a mirror surface of a silicon wafer of 0.20 N/10 mm or less after receiving an active energy and an adhesive layer provided on one of the surfaces of said cleaning layer; and    a separator on which said label is removably provided through said adhesive layer.    
     
     
         2 . A label sheet for cleaning according to  claim 1 , further comprising a base material, said label being provided on one of surfaces of said base material and said adhesive layer being provided on the other surface of said base material.  
     
     
         3 . A label sheet for cleaning according to  claim 1 , wherein a plurality of labels are continuously provided on an elongated separator at regular intervals.  
     
     
         4 . A label sheet for cleaning according to  claim 1 , wherein a reinforcing portion is formed through a concave portion around the label for cleaning.  
     
     
         5 . A label sheet for cleaning according to  claim 4 , wherein the concave portion is provided like a trench over at least a whole periphery of the label for cleaning.  
     
     
         6 . A label sheet for cleaning according to  claim 4 , wherein the reinforcing portion is formed like a band on both ends of the separator.  
     
     
         7 . A label sheet for cleaning according to  claim 6 , wherein the band-shaped reinforcing portion on at least one of sides is not provided in contact with the label for cleaning.  
     
     
         8 . A label sheet for cleaning according to any of  claims 1  to  7 , wherein the label for cleaning and/or the reinforcing portion are/is formed by punching an adhesive film in each shape which comprises a base material, said cleaning layer and an ordinary adhesive layer and by removing the unnecessary adhesive film.  
     
     
         9 . A conveying member having a cleaning function comprising a label sheet for cleaning on the conveying member, wherein the label sheet for cleaning has a smaller shape than that of the conveying member and is not protruded from an end of the conveying member.  
     
     
         10 . A conveying member having a cleaning function according to  claim 9 , wherein the label sheet for cleaning has a cleaning layer provided on one of the surfaces of a base material and an ordinary adhesive layer provided on the other surface.  
     
     
         11 . A conveying member having a cleaning function according to  claim 10 , wherein a surface of the cleaning layer is protected by a removing film.  
     
     
         12 . A label sheet for cleaning to be used in the conveying member having a cleaning function according to any of  claims 9  to  11 , wherein a cleaning layer is provided on one of surfaces of a base material with a surface thereof protected by a removing film and the other surface is removably provided on a separator through an ordinary adhesive layer, and a shape of the label is smaller than that of the conveying member.  
     
     
         13 . A label sheet for cleaning according to  claim 12 , wherein a plurality of labels for cleaning are continuously provided on an elongated separator at intervals.  
     
     
         14 . A conveying member having a cleaning function and the label sheet for cleaning according to  claim 9 , wherein the cleaning layer is a curing type adhesive which is polymerized and cured upon receipt of an active energy.  
     
     
         15 . A conveying member having a cleaning function and the label sheet for cleaning according to any of  claims 9  to  14 , wherein the cleaning layer has a modulus of tensile elasticity of 10 N/mm 2  or more in accordance with JIS K7127.  
     
     
         16 . A method of cleaning a substrate processing equipment wherein the conveying member having a cleaning function according to  claim 9  or  10  is conveyed into the substrate processing equipment.  
     
     
         17 . A method of manufacturing a label sheet for cleaning in which a cleaning layer formed of an adhesive is provided on one of the surfaces of a base material there of protected by a removing film and the other surface is removably provided on a separator through an ordinary adhesive layer, wherein the cleaning layer is a curing type adhesive which is polymerized and cured upon receipt of an active energy and the sheet punching process to have a shape of the label is carried out after a polymerization and curing reaction of the adhesive of the cleaning layer.  
     
     
         18 . A method of manufacturing a label sheet for cleaning according to  claim 17 , wherein the cleaning layer has a modulus of tensile elasticity of 10 N/mm 2  or more in accordance with JIS K7127 during label forming punching process of the sheet.