Device for integrating a vacuum pumping system in a clean room false floor of a semiconductor component manufacturing plant

Abstract

According to the invention, vacuum pumping systems are integrated in the intermediate space between a supporting slab and a clean room false floor formed from a juxtaposition of false floor tiles held by posts resting on the supporting slab. A platform, whose size is greater than the floor space requirement of the vacuum pumping system to be integrated, and substantially equal to that of a false floor tile, is held away from the supporting slab by feet resting on the supporting slab. Thus part of the space underneath the vacuum pumping systems is freed, for the free passage of cables and ducts. Simultaneously the vacuum pumping system is isolated with respect to the false floor, in order to avoid the transmission of vibrations.

What is claimed is:  
     
         1  - A device for the integration of a vacuum pumping system in the intermediate space between a supporting slab and a clean room false floor formed from a juxtaposition of false floor tiles held by false floor tile support posts resting on the supporting slab, this device comprising: 
 a platform, whose size is greater than the floor space requirement of the vacuum pumping system to be integrated and substantially equal to that of a false floor tile;  
 means for holding the platform, parallel and away from the supporting slab, and at a distance from the false floor by a height greater than the height of the vacuum pumping system to be integrated.  
 
     
     
         2  - A device as claimed in  claim 1 , wherein the platform is held up in position by four support blocks each having a jaw gripping a false floor tile support post and having a connecting part gripping the platform.  
     
     
         3  - A device as claimed in  claim 2 , wherein the connecting part comprises a shaft protruding vertically upwards and fitting into a corresponding lower housing of the platform.  
     
     
         4  - A device as claimed in  claim 3 , wherein the corresponding lower housing of the platform is a hole in the central branch of a U-section fixed on the under-face of the platform.  
     
     
         5  - A device as claimed in  claim 3 , wherein the platform comprises, for its being kept in position by four support blocks, three oblong holes and one round hole.  
     
     
         6  - A device as claimed in  claim 2 , wherein each support block comprises an elastic and damped intermediate link, opposing the transmission of vibrations from the vacuum pumping system to the false floor.  
     
     
         7  - A device as claimed in  claim 1 , wherein the platform is held up by four feet that are independent of the means of holding up the false floor tiles and that rest on the supporting slab.  
     
     
         8  - A device as claimed in  claim 7 , wherein the feet have length-adjustment means, for adapting the vertical position of the platform.  
     
     
         9  - A device as claimed in  claim 7 , wherein the platform is approximately 650×560 mm in size, while the feet are disposed in a square with a side of approximately 480 mm and in a position off-centred as regards the length.  
     
     
         10  - A device as claimed in  claim 1 , wherein the platform comprises a continuous sheet edged with a continuous upper peripheral rim, the whole constituting a liquid retaining tank.  
     
     
         11  - A device as claimed in  claim 1 , wherein the platform bears a polymer mat, interposed between the platform and the vacuum pumping system or systems.  
     
     
         12  - A device as claimed in  claim 1 , wherein the platform carrying one or two vacuum pumping systems is held above an opening of the supporting slab.  
     
     
         13  - A device as claimed in  claim 1 , wherein the platform carrying one or two vacuum pumping systems is held above a solid area of the supporting slab, between the openings.  
     
     
         14  - A device as claimed in  claim 1 , this device comprising a mobile lifting frame, with four support legs having directional castors and having a height greater than that of a vacuum pumping system to be integrated, and with two cross members with slide rails on which there slides a movable carriage carrying a winch.  
     
     
         15  - A device as claimed in  claim 14 , wherein the winch acts on a cable that carries a T-shaped linking component, connected by its adjustable central area to the end of the cable, and having fixing holes at the ends of its branches for attaching the vacuum pumping system.  
     
     
         16  - A semiconductor manufacturing plant, comprising a clean room with a false floor and a supporting slab and a vacuum pumping system, wherein the vacuum pumping system is supported by a device as claimed in  claim 1 , with an intermediate support platform in the intermediate space between the supporting slab and the false floor, freeing a portion of space underneath the vacuum pumping system for the passage of cables and ducts and mechanically isolating the vacuum pumping system with respect to the false floor.