Actuatable loadport system

Abstract

A system adapted to exchange wafer carriers between an overhead transport mechanism and a platform is provided. The system employs a wafer carrier having at least one handle extending therefrom, an overhead transfer mechanism, a transporter coupled to the overhead transfer mechanism and adapted to move therealong and having a wafer carrier coupling mechanism adapted to couple to the at least one wafer carrier handle, a platform positioned below the overhead transfer mechanism such that wafer carriers traveling along the overhead transfer mechanism travel over the platform, and an actuator coupled to the platform and adapted so as to elevate the platform to an elevation wherein the loading platform may contact the bottom of a wafer carrier coupled to the overhead transfer mechanism.

The invention claimed is:  
     
         1 . A method of exchanging wafer carriers between an overhead transport mechanism and a local storage apparatus, the method comprising: 
 positioning a frame of a storage apparatus that comprises a plurality of storage shelves such that the storage is adjacent an overhead transport mechanism adapted to support and transport wafer carriers;    positioning a movable portion of the storage apparatus in vertical alignment with a position through which a first wafer carrier supported by the overhead transport mechanism will travel;    moving the movable portion of the storage apparatus vertically toward the first wafer carrier;    contacting the first wafer carrier with the movable portion of the storage apparatus; and    moving the first wafer carrier relative to the overhead transport mechanism via the contact with the movable portion of the storage apparatus such that the movable portion of the storage apparatus supports the first wafer carrier and the overhead transport mechanism no longer supports the first wafer carrier.    
     
     
         2 . The method of  claim 1 , wherein positioning a movable portion of the storage apparatus in vertical alignment with a position through which a first wafer carrier supported by the overhead transport mechanism will travel comprises positioning the movable portion of the storage apparatus below the position through which the first wafer carrier will travel.  
     
     
         3 . The method of  claim 1 , wherein moving the movable portion of the storage apparatus vertically toward the position through which a first wafer carrier will travel comprises elevating the movable portion.  
     
     
         4 . The method of  claim 1 , wherein contacting the first wafer carrier with the movable portion of the storage apparatus comprises causing the first wafer carrier to locate atop the movable portion.  
     
     
         5 . The method of  claim 5 , wherein the step of causing the first wafer carrier to locate atop the movable portion occurs before the step of moving the first wafer carrier relative to the overhead transport mechanism via the contact with the moveable portion.  
     
     
         6 . The method of  claim 1 , wherein contacting the first wafer carrier with the movable portion of the storage apparatus comprises achieving kinematic coupling between the movable portion and the first wafer carrier.  
     
     
         7 . The method of  claim 1 , wherein moving the first wafer carrier relative to the overhead transport mechanism comprises elevating the first wafer carrier relative to the overhead transport mechanism.  
     
     
         8 . The method of  claim 7 , wherein elevating the first wafer carrier off of the overhead transport mechanism comprises elevating the first wafer carrier off of a wafer carrier support of the overhead transport mechanism.  
     
     
         9 . The method of  claim 8 , wherein moving the first wafer carrier relative to the overhead transport mechanism further comprises lowering the first wafer carrier relative to the overhead transport mechanism.  
     
     
         10 . The method of  claim 7 , wherein moving the first wafer carrier relative to the overhead transport mechanism further comprises lowering the first wafer carrier relative to the overhead transport mechanism.  
     
     
         11 . The method of  claim 10 , further comprising causing horizontal relative motion between the first wafer carrier and the wafer carrier support to prevent contact between the first wafer carrier and the wafer carrier support during lowering the first wafer carrier relative to the overhead transport mechanism.  
     
     
         12 . The method of  claim 1 , wherein moving the first wafer carrier relative to the overhead transport mechanism comprises lowering the first wafer carrier relative to the overhead transport mechanism.  
     
     
         13 . The method of  claim 12 , wherein moving the first wafer carrier relative to the overhead transport mechanism further comprises elevating the first wafer carrier relative to the overhead transport mechanism before lowering the first wafer carrier relative to the overhead transport mechanism.  
     
     
         14 . The method of  claim 1 , further comprising lowering the first wafer carrier to a location of a load port.  
     
     
         15 . The method of  claim 14 , wherein lowering the first wafer carrier to a location of a load port comprises lowering the first wafer carrier to a load port of the storage apparatus supported by the frame of the storage apparatus.  
     
     
         16 . The method of  claim 1 , further comprising delivering the first wafer carrier to a shelf of the plurality of shelves.  
     
     
         17 . The method of  claim 1 , wherein positioning a movable portion of the storage apparatus in vertical alignment with a position through which a first wafer carrier supported by the overhead transport mechanism will travel, comprises laterally moving the movable portion relative to the frame.  
     
     
         18 . The method of  claim 17 , wherein laterally moving the movable portion relative to the frame comprises rotating the movable portion.  
     
     
         19 . The method of  claim 18 , wherein rotating the movable portion comprises moving the movable portion through an arc.  
     
     
         20 . The method of  claim 19 , wherein moving the movable portion through an arc comprises moving the movable portion outward of the frame.  
     
     
         21 . The method of  claim 20 , wherein moving the movable portion outward of the frame comprises moving the movable portion beyond a footprint of the frame.  
     
     
         22 . The method of  claim 17 , wherein laterally moving the movable portion relative to the frame comprises causing the movable portion to translate relative to the frame.  
     
     
         23 . The method of  claim 22 , wherein causing the movable portion to translate relative to the frame comprises linearly extending the movable portion.  
     
     
         24 . The method of  claim 23 , wherein linearly extending the movable portion comprises moving the movable portion outward of the frame.  
     
     
         25 . The method of  claim 24 , wherein moving the movable portion outward of the frame comprises moving the movable portion beyond a footprint of the frame.  
     
     
         26 . An apparatus for storing and moving wafer carriers, comprising: 
 a frame adapted to be positioned adjacent an overhead transport mechanism adapted to support a plurality of wafer carriers and transport the plurality of wafer carriers along a wafer carrier transport path;    at least one shelf supported by the frame and adapted to support and store a wafer carrier; and    a movable portion supported by the frame, the movable portion being adapted to extend and retract relative to the frame, so as to contact a wafer carrier supported by the overhead transport mechanism, and so as to remove the wafer carrier from the overhead transport mechanism, such that the movable portion supports the wafer carrier and the adjacent overhead transport mechanism no longer supports the wafer carrier.    
     
     
         27 . The apparatus of  claim 26 , wherein the frame supports the movable portion such that the movable portion is vertically aligned with the wafer carrier transport path.  
     
     
         28 . The apparatus of  claim 26 , wherein the frame supports the shelf such that the shelf is vertically aligned with the wafer carrier transport path.  
     
     
         29 . The apparatus of  claim 26 , wherein the at least one shelf supported by the frame comprises a plurality of shelves.  
     
     
         30 . The apparatus of  claim 26 , wherein the frame supports the shelf such that the shelf is below the wafer carrier transport path.  
     
     
         31 . The apparatus of  claim 26 , wherein the movable portion is adapted so as to kinematically couple with the wafer carrier.  
     
     
         32 . The apparatus of  claim 26 , wherein the movable portion is vertically aligned with the at least one shelf.  
     
     
         33 . The apparatus of  claim 26 , further comprising a first actuator adapted to extend and retract the movable portion relative to the frame.  
     
     
         34 . The apparatus of  claim 33 , wherein the first actuator is supported by the frame.  
     
     
         35 . The apparatus of  claim 33 , wherein the first actuator is adapted to extend and retract the movable portion vertically.  
     
     
         36 . The apparatus of  claim 33 , wherein the first actuator comprises a portion of a load port assembly.  
     
     
         37 . The apparatus of  claim 33 , wherein the movable portion is further adapted to extend laterally relative to the frame so as to align with the wafer carrier supported by the overhead transfer mechanism.  
     
     
         38 . The apparatus of  claim 37 , wherein the movable portion is adapted to extend laterally by rotating through an arc relative to the frame.  
     
     
         39 . The apparatus of  claim 37 , wherein the movable portion is adapted to extend laterally by moving linearly relative to the frame.  
     
     
         40 . The apparatus of  claim 37 , wherein the movable portion is adapted to extend laterally beyond a footprint of the frame.  
     
     
         41 . An apparatus for storing and moving wafer carriers, comprising: 
 a frame adapted to be positioned adjacent an overhead transport mechanism adapted to support a plurality of wafer carriers and transport the plurality of wafer carriers along a wafer carrier transport path;    a robot supported by the frame and adapted to move wafer carriers relative to the frame;    at least one shelf supported by the frame and adapted to support and store a wafer carrier; and    a movable portion supported by the frame, the movable portion being adapted to extend and retract relative to the frame, so as to contact a wafer carrier supported by the overhead transport mechanism, and so as to remove the wafer carrier from the overhead transport mechanism, such that the movable portion supports the wafer carrier and the adjacent overhead transport mechanism no longer supports the wafer carrier.    
     
     
         42 . The apparatus of  claim 41 , wherein the robot is adapted to move wafer carriers onto and off of the at least one shelf.  
     
     
         43 . The apparatus of  claim 41 , wherein the robot is adapted to move wafer carriers between the at least one shelf and a load port.  
     
     
         44 . The apparatus of  claim 41 , wherein the robot is adapted to move wafer carriers between the movable portion and the at least one shelf.  
     
     
         45 . The apparatus of  claim 41 , wherein the robot comprises a vertical guide and a horizontal guide.