Semiconductor device and method of producing the same

Abstract

A semiconductor device of the present invention includes a conductive film made up of a polysilicon film, a barrier metal film and a high melting point, metal nitride film sequentially laminated in this order. The conductive film is annealed to lower the resistance of the metal nitride film. Annealing causes the metal nitride film, which is formed in an amorphous state, to release nitrogen and increases the crystal size of metal having a high melting point. This successfully improves the crystallization of the high melting point metal and lowers the resistance of the metal nitride film without regard to the crystallization of the underlying barrier metal film. It is therefore possible to improve the crystallization of the metal nitride film or to obviate the step of providing the barrier metal film with a double-layer structure, i.e., to simplify the production procedure. A method of producing the semiconductor device is also disclosed.

What is claimed is:  
     
         1 . In a semiconductor device, a conductive film formed on a semiconductor substrate for forming an electrode, an interconnection or the like comprises a laminate of a polysilicon film, a barrier metal film and a metal nitride film having a high melting point, as named from a bottom to a top of said laminate.  
     
     
         2 . A semiconductor device as claimed in  claim 1 , wherein said barrier metal film and said metal nitride film comprise a TiN film and a WN film, respectively.  
     
     
         3 . A semiconductor device as claimed in  claim 2 , wherein said conductive film constitutes a gate electrode included in a MOS transistor.  
     
     
         4 . A semiconductor device as claimed in  claim 3 , wherein said nitride film is 0.2 μm thick or less while said gate electrode has a dimension of 0.13 μm or less in a direction of gate length.  
     
     
         5 . A method of producing a conductive film included in a semiconductor device, comprising the steps of: 
 (a) sequentially forming a laminate made up of a polysilicon film, a barrier metal film and a metal nitride film having a high melting point on an insulation film in this order; and    (b) annealing said laminate to thereby lower a resistance of said metal nitride film.    
     
     
         6 . A method as claimed in  claim 5 , wherein said metal nitride film is formed in an amorphous state under a condition containing at least 0.1 of nitrogen.  
     
     
         7 . A method as claimed in  claim 6 , wherein said metal nitride film is formed by CVD or sputtering.  
     
     
         8 . A method of producing a gate electrode included in a MOS transistor, comprising the steps of: 
 (a) sequentially forming a polysilicon film, a barrier metal film and a metal nitride layer having a high melting point on a gate insulation film in this order to thereby constitute a conductive film having a laminate structure;    (b) patterning said conductive film to thereby form the gate electrode;    (c) implanting ions in a source and a drain region in a semiconductor layer by using the gate the gate electrode as a mask; and    (d) effecting annealing to thereby activate resulting ion implanted layers and lower a resistance of said metal nitride film at the same time.    
     
     
         9 . A method as claimed in  claim 8 , wherein said metal nitride film is formed in an amorphous state under a condition containing at least 0.1 of nitrogen.  
     
     
         10 . A method as claimed in  claim 9 , wherein said metal nitride film is formed by CVD or sputtering.  
     
     
         11 . A method as claimed in  claim 10 , wherein said metal nitride film is annealed in order to release nitrogen contained in said metal nitride film.  
     
     
         12 . A method as claimed in  claim 11 , wherein said metal nitride film is subjected to rapid thermal processing using lamp annealing.  
     
     
         13 . A method as claimed in  claim 12 , wherein said metal nitride film is annealed at a temperature of 800° C. or above, preferably at 900° C. or above.  
     
     
         14 . A method as claimed in  claim 9 , wherein said metal nitride film is annealed in order to release nitrogen contained in said metal nitride film.  
     
     
         15 . A method as claimed in  claim 14 , wherein said metal nitride film is subjected to rapid thermal processing using lamp annealing.  
     
     
         16 . A method as claimed in  claim 15 , wherein said metal nitride film is annealed at a temperature of 800° C. or above, preferably at 900° C. or above.  
     
     
         17 . A method as claimed in  claim 8  wherein said metal nitride film is annealed in order to release nitrogen contained in said metal nitride film.  
     
     
         18 . A method as claimed in  claim 17 , wherein said metal nitride film is subjected to rapid thermal processing using lamp annealing.  
     
     
         19 . A method as claimed in  claim 18 , wherein said metal nitride film is annealed at a temperature of 800° C. or above, preferably at 900° C. or above.  
     
     
         20 . A method of producing a gate electrode included in a MOS transistor, comprising the steps of: 
 (a) sequentially forming a polysilicon film, a barrier metal film and a metal nitride film having a high melting point on a gate insulation film in this order to thereby constitute a conductive film having a laminate structure;    (b) annealing said conductive film to thereby lower a resistance of said metal nitride layer; and    (c) patterning said conductive film to thereby form the gate electrode.    
     
     
         21 . A method as claimed in  claim 20 , wherein said metal nitride film is formed in an amorphous state under a condition containing at least 0.1 of nitrogen.  
     
     
         22 . A method as claimed in  claim 21 , wherein said metal nitride film is formed by CVD or sputtering.  
     
     
         23 . A method as claimed in  claim 22 , wherein said metal nitride film is annealed in order to release nitrogen contained in said metal nitride film.  
     
     
         24 . A method as claimed in  claim 23 , wherein said metal nitride film is subjected to rapid thermal processing using lamp annealing.  
     
     
         25 . A method as claimed in  claim 24 , wherein said metal nitride film is annealed at a temperature of 800° C. or above, preferably at 900° C. or above.  
     
     
         26 . A method as claimed in  claim 21 , wherein said metal nitride film is annealed in order to release nitrogen contained in said metal nitride film.  
     
     
         27 . A method as claimed in  claim 26 , wherein said metal nitride film is subjected to rapid thermal processing using lamp annealing.  
     
     
         28 . A method as claimed in  claim 27 , wherein said metal nitride film is annealed at a temperature of 800° C. or above, preferably at 900° C. or above.  
     
     
         29 . A method as claimed in  claim 20 , wherein said metal nitride film is annealed in order to release nitrogen contained in said metal nitride film.  
     
     
         30 . A method as claimed in  claim 29 , wherein said metal nitride film is subjected to rapid thermal processing using lamp annealing.  
     
     
         31 . A method as claimed in  claim 30 , wherein said metal nitride film is annealed at a temperature of 800° C. or above, preferably at 900° C. or above.