Integrated precursor delivery system

Abstract

An integrated precursor delivery system which integrates a precursor delivery system with a processing chamber is provided for improving the precursor delivery lines to the processing chamber, and for keeping the delivery lines intact during servicing the processing chamber. The apparatus provides an integrated precursor delivery system mounted on the processing chamber lid with the chamber lid being removable for allowing manual access to the inside of the processing chamber. With the precursor delivery system is in the close vicinity of the processing chamber, the delivery lines are shortest possible, minimizing the chance of precursor contamination. With the delivery system and the chamber lid in one unit, the removal of the chamber lid will no longer require breaking the delivery lines, leading to better contamination control. The present invention is particular suitable for liquid precursors since liquid is much more difficult to evacuate than gas. The invention further provides a hybrid system of integrated precursor delivery system and remote precursor delivery system. For gaseous precursors, especially non-reactive precursor such as nitrogen, argon, helium, the cleaning of the delivery line is very simple. Therefore a hybrid system of integrated and remote precursor delivery systems offers the best solution, an integrated precursor delivery system for the difficult-to-clean precursors, and a remote precursor delivery system for the easy-to-clean precursors.

What is claimed is:  
     
         1 . An integrated precursor delivery system apparatus which integrates a precursor delivery system with a processing chamber, the apparatus comprising: 
 a hollow processing chamber comprising a removable chamber lid for allowing manual access to the inside of the processing chamber;    a liquid precursor container mounted on the chamber lid for storing the precursor in bulk liquid form;    a carrier gas system connected to an inlet of the liquid precursor container; and    a precursor delivery line communicated with the liquid precursor container and the processing chamber;    whereby the precursor delivery line delivers vaporized precursor and carrier gas from the liquid precursor container to the processing chamber with the precursor delivery line remaining intact during the removal of the chamber lid.    
     
     
         2 . An apparatus as in claim  23  further comprising a precursor heater to heat the precursor container.  
     
     
         3 . An apparatus as in claim  23  in which the precursor delivery system further comprises a delivery line heater to heat the precursor delivery line.  
     
     
         4 . An apparatus as in claim  23  in which the precursor delivery system further comprises a precursor metering device to control the flow rate of the vaporized precursor and carrier gas.  
     
     
         5 . An apparatus as in claim  26  in which the precursor metering device is a mass flow controller.  
     
     
         6 . An apparatus as in claim  23  further comprising a precursor refilling system for refilling the liquid precursor container.  
     
     
         7 . An apparatus as in claim  28  in which the precursor refilling system comprising flexible refilling lines to accommodate the movement of the chamber lid.  
     
     
         8 . An apparatus as in claim  23  further comprising a plurality of integrated precursor delivery systems.  
     
     
         9 . An apparatus as in claim  23  further comprising a remote precursor delivery system.  
     
     
         10 . An apparatus as in claim  31  in which the remote precursor delivery system provides gaseous precursor.  
     
     
         11 . An apparatus as in claim  31  in which the remote precursor delivery system comprises flexible lines to accommodate the movement of the chamber lid.  
     
     
         12 . An apparatus as in claim  31  in which the remote precursor delivery system comprises an o-ring seal between the chamber lid and the rest of the hollow processing chamber to accommodate the movement of the chamber lid.