Substrate holding apparatus

Abstract

A substrate holding apparatus for holding substrates in vertical posture includes a first holder, a second holder and a substrate fall preventing stand arranged along edges of the substrates and located below centers of the substrates. The first holder is disposed in a position for holding the substrates between lower ends and lateral ends of the substrates. The second holder is disposed in a position for holding the substrates at the lower ends of the substrates, or in a position opposed to the first holder across the lower ends for holding the substrates between the lower ends and lateral ends of the substrates. The substrate fall preventing stand being disposed opposite the first holder across the lower ends of the substrates and above the second holder.

What is claimed is:  
     
         1 . A substrate holding apparatus for holding substrates in vertical posture, comprising: 
 a first holder, a second holder and a substrate fall preventing stand arranged along edges of the substrates and located below centers of the substrates;    said first holder being disposed in a position for holding the substrates between lower ends and lateral ends of the substrates;    said second holder being disposed in a position for holding the substrates at the lower ends of the substrates, or in a position opposed to said first holder across the lower ends for holding the substrates between the lower ends and lateral ends of the substrates;    said substrate fall preventing stand being disposed opposite said first holder across the lower ends of the substrates and above said second holder.    
     
     
         2 . An apparatus as defined in  claim 1 , wherein said first holder and said second holder are arranged such that a straight line extending through a point of contact between an edge of each substrate and said first holder and a point of contact between an edge of said each substrate and said second holder and a tangent to said each substrate in said second holder form an angle in a range of 25 to 40 degrees outwardly of said each substrate.  
     
     
         3 . An apparatus as defined in  claim 1 , wherein said first holder and said substrate fall preventing stand are arranged vertically level with each other.  
     
     
         4 . An apparatus as defined in  claim 2 , wherein said first holder and said substrate fall preventing stand are arranged vertically level with each other.  
     
     
         5 . An apparatus as defined in  claim 1 , wherein said first holder, said second holder and said substrate fall preventing stand extend from a base of a transport mechanism, and have distal ends thereof fixed to one another by a connecting member.  
     
     
         6 . An apparatus as defined in  claim 2 , wherein said first holder, said second holder and said substrate fall preventing stand extend from a base of a transport mechanism, and have distal ends thereof fixed to one another by a connecting member.  
     
     
         7 . An apparatus as defined in  claim 3 , wherein said first holder, said second holder and said substrate fall preventing stand extend from a base of a transport mechanism, and have distal ends thereof fixed to one another by a connecting member.  
     
     
         8 . An apparatus as defined in  claim 4 , wherein said first holder, said second holder and said substrate fall preventing stand extend from a base of a transport mechanism, and have distal ends thereof fixed to one another by a connecting member.  
     
     
         9 . An apparatus as defined in  claim 1 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         10 . An apparatus as defined in  claim 2 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         11 . An apparatus as defined in  claim 3 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         12 . An apparatus as defined in  claim 4 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         13 . An apparatus as defined in  claim 5 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         14 . An apparatus as defined in  claim 6 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         15 . An apparatus as defined in  claim 7 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         16 . An apparatus as defined in  claim 8 , wherein said first holder and said second holder have groove-like contact/support portions formed in upper positions thereof.  
     
     
         17 . An apparatus as defined in  claim 1 , wherein said substrate fall preventing stand has slopes formed in positions out of contact with the edges of the substrates.  
     
     
         18 . An apparatus as defined in  claim 2 , wherein said substrate fall preventing stand has slopes formed in positions out of contact with the edges of the substrates.  
     
     
         19 . An apparatus as defined in  claim 3 , wherein said substrate fall preventing stand has slopes formed in positions out of contact with the edges of the substrates.  
     
     
         20 . An apparatus as defined in  claim 1 , wherein said second holder is disposed in a position symmetrical to said first holder with respect to the lower ends of the substrates.