Optical waveguide device and fabricating method thereof

Abstract

Optical waveguide device 101 has waveguide 103 strip-shaped in the depth direction of the drawing and protruding from peripheral portion 102. A core (not illustrated) is disposed inside waveguide 103. Wall 106 to be cut is integrated with waveguide 103 to form one core layer. No unevenness occurs in a cutting line of wall 106 indicated with broken line 105. Accordingly, high-precision cutting is enabled by cutting wall 106 along the cutting line.

What is claimed is:  
     
         1 . An optical waveguide device, comprising: 
 a core for propagating light; and    a member having a predetermined width to be cut in its lengthwise direction, said member being arranged to cross said core at a predetermined angle, and a height of said member being constant at a position where said member crosses said core.    
     
     
         2 . An optical waveguide device, comprising: 
 a core for propagating light; and    a member having a predetermined width to be cut in its lengthwise direction, said member being arranged to cross said core at a predetermined angle, and a height of said member being varied uniformly at a position where said member crosses said core.    
     
     
         3 . An optical waveguide device, comprising: 
 a core for propagating light; and    a member having a predetermined width to be cut in its lengthwise direction, said member being connected with said core at a predetermined angle to provide a T-shaped pattern, and a height of said member being constant at a position where said member is connected with said core.    
     
     
         4 . An optical waveguide device, comprising: 
 a core for propagating light; and    a member having a predetermined width to be cut in its lengthwise direction, said member being connected with said core at a predetermined angle to provide a T-shaped pattern, and a height of said member being varied uniformly at a position where said member is connected with said core.    
     
     
         5 . An optical waveguide device, according to  claim 1 , wherein said core is the same in material as said member.  
     
     
         6 . An optical waveguide device, according to  claim 2 , wherein said core is the same in material as said member.  
     
     
         7 . An optical waveguide device, according to  claim 3 , wherein said core is the same in material as said member.  
     
     
         8 . An optical waveguide device, according to  claim 4 , wherein said core is the same in material as said member.  
     
     
         9 . An optical waveguide device, according to  claim 5 , wherein said core is fabricated to integrate with said member at a common fabricating step.  
     
     
         10 . An optical waveguide device, according to  claim 6 , wherein said core is fabricated to integrate with said member at a common fabricating step.  
     
     
         11 . An optical waveguide device, according to  claim 7 , wherein said core is fabricated to integrate with said member at a common fabricating step.  
     
     
         12 . An optical waveguide device, according to  claim 8 , wherein said core is fabricated to integrate with said member at a common fabricating step.  
     
     
         13 . An optical waveguide device, according to  claim 9 , wherein said core and said member are covered with a clad.  
     
     
         14 . An optical waveguide device, according to  claim 10 , wherein said core and said member are covered with a clad.  
     
     
         15 . An optical waveguide device, according to  claim 11 , wherein said core and said member are covered with a clad.  
     
     
         16 . An optical waveguide device, according to  claim 12 , wherein said core and said member are covered with a clad.  
     
     
         17 . An optical waveguide device, according to  claim 9 , wherein said core and said member are covered at least on a side of a substrate with a clad.  
     
     
         18 . An optical waveguide device, according to  claim 10 , wherein said core and said member are covered at least on a side of a substrate with a clad.  
     
     
         19 . An optical waveguide device, according to  claim 11 , wherein said core and said member are covered at least on a side of a substrate with a clad.  
     
     
         20 . An optical waveguide device, according to  claim 12 , wherein said core and said member are covered at least on a side of a substrate with a clad.  
     
     
         21 . An optical waveguide device, according to  claim 1 , wherein said core and said member are formed on a core layer which is the same in material as said core.  
     
     
         22 . An optical waveguide device, according to  claim 2 , wherein said core and said member are formed on a core layer which is the same in material as said core.  
     
     
         23 . An optical waveguide device, according to  claim 3 , wherein said core and said member are formed on a core layer which is the same in material as said core.  
     
     
         24 . An optical waveguide device, according to  claim 4 , wherein said core and said member are formed on a core layer which is the same in material as said core.  
     
     
         25 . An optical waveguide device, according to  claim 1 , wherein said core includes a plurality of cores which are arranged in parallel with a predetermined interval; and said member is connected in common with said plurality of cores.  
     
     
         26 . An optical waveguide device, according to  claim 2 , wherein said core includes a plurality of cores which are arranged in parallel with a predetermined interval; and said member is connected in common with said plurality of cores.  
     
     
         27 . An optical waveguide device, according to  claim 3 , wherein said core includes a plurality of cores which are arranged in parallel with a predetermined interval; and said member is connected in common with said plurality of cores.  
     
     
         28 . An optical waveguide device, according to  claim 4 , wherein said core includes a plurality of cores which are arranged in parallel with a predetermined interval; and said member is connected in common with said plurality of cores.  
     
     
         29 . An optical waveguide device, according to  claim 1 , wherein said core is of a tapered shape at an end portion thereof, with which said member is in contact.  
     
     
         30 . An optical waveguide device, according to  claim 2 , wherein said core is of a tapered shape at an end portion thereof, with which said member is in contact.  
     
     
         31 . An optical waveguide device, according to  claim 3 , wherein said core is of a tapered shape at an end portion thereof, with which said member is in contact.  
     
     
         32 . An optical waveguide device, according to  claim 4 , wherein said core is of a tapered shape at an end portion thereof, with which said member is in contact.  
     
     
         33 . An optical waveguide device, according to  claim 29 , wherein said tapered shape of said core is larger in width, as a distance of said core is smaller relative to said member.  
     
     
         34 . An optical waveguide device, according to  claim 30 , wherein said tapered shape of said core is larger in width, as a distance of said core is smaller relative to said member.  
     
     
         35 . An optical waveguide device, according to  claim 31 , wherein said tapered shape of said core is larger in width, as a distance of said core is smaller relative to said member.  
     
     
         36 . An optical waveguide device, according to  claim 32 , wherein said tapered shape of said core is larger in width, as a distance of said core is smaller relative to said member.  
     
     
         37 . An optical waveguide device, according to  claim 29 , wherein said tapered shape of said core is smaller in width, as a distance of said core is smaller relative to said member.  
     
     
         38 . An optical waveguide device, according to  claim 30 , wherein said tapered shape of said core is smaller in width, as a distance of said core is smaller relative to said member.  
     
     
         39 . An optical waveguide device, according to  claim 31 , wherein said tapered shape of said core is smaller in width, as a distance of said core is smaller relative to said member.  
     
     
         40 . An optical waveguide device, according to  claim 32 , wherein said tapered shape of said core is smaller in width, as a distance of said core is smaller relative to said member.  
     
     
         41 . An optical waveguide device, according to  claim 1 , wherein said member is arranged to cross said core at an angle of 90°.  
     
     
         42 . An optical waveguide device, according to  claim 2 , wherein said member is arranged to cross said core at an angle of 90°.  
     
     
         43 . An optical waveguide device, according to  claim 3 , wherein said member is arranged to cross said core at an angle of 90°.  
     
     
         44 . An optical waveguide device, according to  claim 4 , wherein said member is arranged to cross said core at an angle of 90°.  
     
     
         45 . An optical waveguide device, according to  claim 1 , wherein said member is arranged to cross said core at an angle of −10° to 10°.  
     
     
         46 . An optical waveguide device, according to  claim 2 , wherein said member is arranged to cross said core at an angle of −10° to 10°.  
     
     
         47 . An optical waveguide device, according to  claim 3 , wherein said member is arranged to cross said core at an angle of −10° to 10°.  
     
     
         48 . An optical waveguide device, according to  claim 4 , wherein said member is arranged to cross said core at an angle of −10° to 10°.  
     
     
         49 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a core layer of a flat plate shape on said clad; removing said core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being arranged to cross a core for propagating light at a predetermined angle, and a height of said member being constant at a position where said member crosses said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         50 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a core layer of a flat plate shape on said clad;    removing said core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being arranged to cross a core for propagating light at a predetermined angle, and a height of said member being varied uniformly at a position where said member crosses said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         51 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a core layer of a flat plate shape on said clad;    removing said core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being connected with a core for propagating light at a predetermined angle to provide a T-shaped pattern, and a height of said member being constant at a position where said member is connected with said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         52 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a core layer of a flat plate shape on said clad;    removing said core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being connected with a core for propagating light at a predetermined angle to provide a T-shaped pattern, and a height of said member being varied uniformly at a position where said member is connected with said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         53 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a first core layer of a flat plate shape on said clad;    forming a second core layer on said first core layer;    removing said second core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being arranged to cross a core for propagating light at a predetermined angle, and a height of said member being constant at a position where said member crosses said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         54 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a first core layer of a flat plate shape on said clad;    forming a second core layer on said first core layer;    removing said second core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being arranged to cross a core for propagating light at a predetermined angle, and a height of said member being varied uniformly at a position where said member crosses said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         55 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a first core layer of a flat plate shape on said clad;    forming a second core layer on said first core layer;    removing said second core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being connected with a core for propagating light at a predetermined angle to provide a T-shaped pattern, and a height of said member being constant at a position where said member is connected with said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         56 . A method of fabricating an optical waveguide device, comprising the steps of: 
 forming a clad on a substrate;    forming a first core layer of a flat plate shape on said clad;    forming a second core layer on said first core layer;    removing said second core layer in a predetermined shape at a predetermined depth to provide a member having a predetermined width to be cut in its lengthwise direction, said member being connected with a core for propagating light at a predetermined angle to provide a T-shaped pattern, and a height of said member being varied uniformly at a position where said member is connected with said core, while said predetermined shape excluding said core and said member; and    cutting said member in said lengthwise direction.    
     
     
         57 . A method of fabricating an optical waveguide device, according to  claim 49 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         58 . A method of fabricating an optical waveguide device, according to  claim 50 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         59 . A method of fabricating an optical waveguide device, according to  claim 51 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         60 . A method of fabricating an optical waveguide device, according to  claim 52 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         61 . A method of fabricating an optical waveguide device, according to  claim 53 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         62 . A method of fabricating an optical waveguide device, according to  claim 54 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         63 . A method of fabricating an optical waveguide device, according to  claim 55 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         64 . A method of fabricating an optical waveguide device, according to  claim 56 , wherein said cutting step is carried out to cut said member by means of reactive ion etching.  
     
     
         65 . A method of fabricating an optical waveguide device, according to  claim 49 , wherein said cutting step is carried out to cut said member by use of a dicing saw.  
     
     
         66 . A method of fabricating an optical waveguide device, according to  claim 50 , wherein said cutting step is carried out to cut said member by use of a dicing saw.  
     
     
         67 . A method of fabricating an optical waveguide device, according to  claim 51 , wherein said cutting step is carried out to cut said member by use of a dicing saw.  
     
     
         68 . A method of fabricating an optical waveguide device, according to  claim 52 , wherein said cutting step is carried out to cut said member by use of a dicing saw.  
     
     
         69 . A method of fabricating an optical waveguide device, according to  claim 53 , wherein said cutting step is carried out to cut said member by use of a dicing saw.  
     
     
         70 . A method of fabricating an optical waveguide device, according to  claim 54 , wherein said cutting step is carried out to cut said member by use of a dicing saw.  
     
     
         71 . A method of fabricating an optical waveguide device, according to  claim 55 , wherein said cutting step is carried out to cut said member by use of a dicing saw.  
     
     
         72 . A method of fabricating an optical waveguide device, according to  claim 56 , wherein said cutting step is carried out to cut said member by use of a dicing saw.