US2003156812A1PendingUtilityA1
Polished polyimide substrate
Priority: Apr 17, 1998Filed: Dec 13, 2002Published: Aug 21, 2003
Est. expiryApr 17, 2018(expired)· nominal 20-yr term from priority
G02B 6/3652G02B 6/138G02B 6/3692G02B 6/30G02B 6/3688G02B 6/364G02B 6/3636G02B 2006/12176
41
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Claims
Abstract
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
100 . A substrate for a circuit structure comprising a planar substrate mass of polyimide material having a first side and a second side, said first side being polished to a surface smoothness between about 1 μinch and 20 μinch, capable of receiving a circuit structure, wherein said second side is polished, further comprising a first polymer layer applied to said first polished side of said planar substrate mass.Join the waitlist — get patent alerts
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