C-chuck insulator strip

Abstract

A susceptor assembly and an insulator strip for a susceptor assembly to reduce or eliminate arcing and temperature spikes between a ground cable and a thermocouple wire in susceptor and C-chuck assemblies. In one embodiment of the invention, an insulator strip is placed between the thermocouple lead and the ground cable in a susceptor assembly support arm channel.

1 . An insulator strip for a susceptor assembly including a support arm having a support arm channel, a ground strap and a thermocouple lead, the insulator strip comprising a strip of an insulating material configured for placement in the support arm channel between the ground strap and the thermocouple lead.  
     
     
         2 . The insulator strip of  claim 1  further comprising a strip of aluminum oxide material.  
     
     
         3 . The insulator strip of  claim 1  further comprising a strip of 99.5% aluminum oxide material.  
     
     
         4 . The insulator strip of  claim 1  further comprising a strip of an insulating material shaped to conform to a geometry of the support arm channel.  
     
     
         5 . The insulator strip of  claim 1  further comprising a bend formed a first end of the strip of insulating material locking member.  
     
     
         6 . The insulator strip of  claim 1  further comprising a locking member formed a first end of the strip of insulating material.  
     
     
         7 . A susceptor assembly comprising: 
 a susceptor disk;    an insulating support disk attached to an underside of the susceptor disk;    a support arm attached to and supporting the susceptor disk and the insulating support disk, the susceptor support arm including a channel;    a ground wire conductively connected to the susceptor disk and extending along a length of the channel of the support arm;    a thermocouple lead connected to the susceptor disk and extending along a length of the channel of the support arm; and    an insulator strip extending along a length of the channel of the support arm, ii the insulator strip including a strip of an insulating material configured for placement in the channel of the support arm between the ground strap and the thermocouple lead.    
     
     
         8 . The susceptor assembly of  claim 7  further comprising a strip of aluminum oxide material.  
     
     
         9 . The susceptor assembly of  claim 7  further comprising a strip of 99.5% aluminum oxide material.  
     
     
         10 . The susceptor assembly of  claim 7  further comprising a strip of an insulating material shaped to conform to a geometry of the support arm channel.  
     
     
         11 . The susceptor assembly of  claim 7  further comprising a bend formed a first end of the strip of insulating material locking member.  
     
     
         12 . The susceptor assembly of  claim 7  further comprising a locking member formed a first end of the strip of insulating material.  
     
     
         13 . The susceptor assembly of  claim 7  further comprising a removable channel cover attached to the support arm to enclose a portion of the conductor in the channel.  
     
     
         14 . The susceptor assembly of  claim 13  wherein the channel cover is attached to the support arm within the channel by having opposed edges which slide into two slots facing one another on the inside of the channel.  
     
     
         15 . A susceptor assembly for processing a substrate at temperatures of up to 500 degree Celsius comprising: 
 a susceptor having a substantially planar surface for supporting a substrate;    a ceramic susceptor support arm supporting the susceptor, the susceptor support arm including an open channel for routing wiring from a hub end of the support arm adjacent to the susceptor to a support end of the support arm distal from the susceptor, wherein the channel includes a removable channel cover attached to the support arm to enclose a portion of the conductor in the channel a susceptor disk;    an insulating support disk attached to an underside of the susceptor disk;    a ground wire conductively connected to the susceptor disk and extending along a length of the channel of the support arm;    a thermocouple lead connected to the susceptor disk and extending along a length of the channel of the support arm;    an insulator strip extending along a length of the channel of the support arm, the insulator strip including a strip of an insulating material configured for placement in the channel of the support arm between the ground strap and the thermocouple lead; and    a removable channel cover attached to the support arm to enclose a portion of the conductor and the insulator strip in the channel.    
     
     
         16 . The susceptor assembly of  claim 15  further comprising a strip of aluminum oxide material.  
     
     
         17 . The susceptor assembly of  claim 15  further comprising a strip of 99.5% aluminum oxide material.  
     
     
         18 . The susceptor assembly of  claim 15  further comprising a strip of an insulating material shaped to conform to a geometry of the support arm channel.  
     
     
         19 . The susceptor assembly of  claim 15  further comprising a bend formed a first end of the strip of insulating material locking member.  
     
     
         20 . The susceptor assembly of  claim 15  further comprising a locking member formed a first end of the strip of insulating material.