Resist pattern for alignment measurement

Abstract

A resist pattern for alignment measurement being shrunk by a heat flow comprises a plurality of positive type or negative type line patterns. Widths of spaces between the line patters are greater than twice those of the line patterns. Alternatively, the resist pattern comprises a box-shaped or slit-shaped measurement pattern and a pair of box-shaped or slit-shaped auxiliary patterns provided inside and outside the measurement pattern, respectively.

1 . A resist pattern for alignment measurement, said resist pattern being shrunk by a heat flow, comprising: 
 a plurality of line patterns.    
     
     
         2 . The resist pattern for alignment measurement according to  claim 1 , wherein said line patterns are all positive types.  
     
     
         3 . The resist pattern for alignment measurement according to  claim 1 , wherein said line patterns are all negative types.  
     
     
         4 . The resist pattern for alignment measurement according to  claim 1 , wherein widths of spaces between said line patters are greater than twice those of said line patterns.  
     
     
         5 . A resist pattern for alignment measurement, said resist pattern being shrunk by a heat flow, comprising: 
 a measurement pattern; and    a pair of auxiliary patterns provided inside and outside said measurement pattern, respectively.    
     
     
         6 . The resist pattern for alignment measurement according to  claim 5 , wherein said measurement and auxiliary patterns are box-shaped.  
     
     
         7 . The resist pattern for alignment measurement according to  claim 5 , wherein said measurement and auxiliary patterns are slit-shaped.  
     
     
         8 . The resist pattern for an alignment measurement according to  claim 5 , wherein said measurement and auxiliary patterns are all positive types.  
     
     
         9 . The resist pattern for an alignment measurement according to  claim 5 , wherein said measurement and auxiliary patterns are all negative types.  
     
     
         10 . A resist pattern for alignment measurement, said resist pattern being shrunk by a heat flow, comprising 
 a measurement pattern; and    at least one auxiliary pattern provided inside or outside said measurement pattern, wherein widths of spaces between said measurement and auxiliary pattern are equal in vertical and horizontal directions.    
     
     
         11 . A resist pattern for alignment measurement, said resist pattern being shrunk by a heat flow, comprising 
 a box-shaped measurement pattern; and    an auxiliary pattern provided outside said measurement pattern, wherein widths of spaces between internal edges of said measurement pattern in vertical and horizontal directions and widths of spaces between outer edges of said measurement pattern and inner edges of said auxiliary pattern in vertical and horizontal directions are all equal.