US2003136776A1PendingUtilityA1

Ceramic heater

42
Assignee: IBIDEN CO LTDPriority: Nov 30, 1999Filed: Feb 3, 2003Published: Jul 24, 2003
Est. expiryNov 30, 2019(expired)· nominal 20-yr term from priority
Inventors:Yasutaka Ito
H10P 72/0432
42
PatentIndex Score
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Cited by
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References
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Claims

Abstract

A ceramic heater capable of reducing temperature uniformity at the periphery of through holes such as insertion holes and vacuum suction holes is provided, which protects wafer against thermal shocks and has improved controllability for temperature control parts such as thermocouples and temperature fuse. Further, a ceramic heater capable of uniform resin curing is provided. A heat generation body is disposed on the surface or inside of a ceramic substrate. Further, corners for the insertion holes, the recesses and the vacuum suction holes of the ceramic substrate are chamfered.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A ceramic heater having temperature control means on a surface or inside of a ceramic substrate in which at least a portion of corners of the ceramic substrate is chamfered.  
     
     
         2 . The ceramic heater according to  claim 1 , wherein the ceramic substrate has through holes and corners of the through holes are chamfered.  
     
     
         3 . The ceramic heater according to  claim 1 , wherein a corner at least on a heating surface of an outer circumference of the ceramic substrate is chamfered.  
     
     
         4 . The ceramic heater according to  claim 3 , wherein grooves are formed in the ceramic substrate and corners of the grooves are chamfered.  
     
     
         5 . The ceramic heater according to  claim 1 , wherein grooves are formed in the ceramic substrate and corners of the grooves are chamfered.  
     
     
         6 . The ceramic heater according to  claim 1 , wherein grooves are formed in the ceramic substrate and corners of the grooves are chamfered.  
     
     
         7 . The ceramic heater according to  claim 2 , wherein a corner at least on a heating surface of an outer circumference of the ceramic substrate is chamfered.  
     
     
         8 . The ceramic heater according to  claim 7 , wherein grooves are formed in the ceramic substrate and corners of the grooves are chamfered.  
     
     
         9 . The ceramic heater according to  claim 2 , wherein grooves are formed in the ceramic substrate and corners of the grooves are chamfered.  
     
     
         10 . The ceramic heater according to  claim 2 , wherein grooves are formed in the ceramic substrate and corners of the grooves are chamfered.

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