US2003132135A1PendingUtilityA1

Protective wafer storage system, device, and method

37
Priority: Jan 14, 2002Filed: Jan 14, 2002Published: Jul 17, 2003
Est. expiryJan 14, 2022(expired)· nominal 20-yr term from priority
Inventors:Stephen NataleScott Limb
H10P 72/15H10P 72/1922
37
PatentIndex Score
0
Cited by
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References
0
Claims

Abstract

A protective insert is used to secure a wafer cassette within a storage box and reduce mechanical stresses transmitted from the storage box to the wafer cassette. The protective insert is formed from at least one mechanical stress reducing material in such a way that the protective insert can secure the wafer cassette within the storage box and reduce mechanical stresses transmitted from the storage box to the wafer cassette.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . A protective wafer storage system comprising: 
 a cassette for holding at least one wafer;    a storage box for holding the cassette; and    a protective insert operably coupled to secure the cassette within the storage box and reduce mechanical stresses transmitted from the storage box to the cassette.    
     
     
         2 . The protective wafer storage system of  claim 1 , wherein the protective insert is operably coupled to reduce shock transmitted from the storage box to the cassette.  
     
     
         3 . The protective wafer storage system of  claim 1 , wherein the protective insert is operably coupled to reduce vibration transmitted from the storage box to the cassette.  
     
     
         4 . The protective wafer storage system of  claim 1 , wherein the protective insert is formed from a single material.  
     
     
         5 . The protective wafer storage system of  claim 4 , wherein the single material comprises a pliable plastic sheeting.  
     
     
         6 . The protective wafer storage system of  claim 1 , wherein the protective insert is formed from a plurality of materials.  
     
     
         7 . The protective wafer storage system of  claim 1 , wherein the protective insert is formed from an inexpensive material.  
     
     
         8 . The protective wafer storage system of  claim 1 , wherein the protective insert is formed from a washable material.  
     
     
         9 . An apparatus comprising at least one mechanical stress reducing material formed to secure a cassette within a storage box and reduce mechanical stresses transmitted from the storage box to the cassette in a protective wafer storage system.  
     
     
         10 . The apparatus of  claim 9 , wherein the at least one mechanical stress reducing material reduces shock transmitted from the storage box to the cassette.  
     
     
         11 . The apparatus of  claim 9 , wherein the at least one mechanical stress reducing material reduces vibration transmitted from the storage box to the cassette.  
     
     
         12 . The apparatus of  claim 9 , wherein the at least one mechanical stress reducing material comprises a pliable plastic sheeting.  
     
     
         13 . The apparatus of  claim 9 , wherein the at least one mechanical stress reducing material is inexpensive.  
     
     
         14 . The apparatus of  claim 9 , wherein the at least one mechanical stress reducing material is washable.  
     
     
         15 . A method for securing a cassette within a storage box and reducing mechanical stresses transmitted from the storage box to the cassette in a protective wafer storage system, the method comprising: 
 obtaining a protective insert comprising at least one mechanical stress reducing material formed to secure the cassette within the storage box and reduce mechanical stresses transmitted from the storage box to the cassette; and    introducing the protective insert between the cassette and the storage box for securing the cassette within the storage box and reducing mechanical stresses transmitted from the storage box to the cassette.    
     
     
         16 . The method of  claim 15 , further comprising: 
 subjecting the storage box to a mechanical stress sufficient to damage contents of the cassette without the protective insert but insufficient to damage the contents of the cassette with the protective insert.    
     
     
         17 . The method of  claim 15 , further comprising: 
 removing the protective insert from between the cassette and the storage box; and    discarding the protective insert.    
     
     
         18 . The method of  claim 15 , further comprising: 
 removing the protective insert from between the cassette and the storage box; and    washing the protective insert.    
     
     
         19 . The method of  claim 17 , further comprising: 
 re-using the protective insert after washing the protective insert.

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