US2003129118A1PendingUtilityA1

Process for purifying perfluorinated products

44
Priority: Nov 10, 1997Filed: Jul 17, 2002Published: Jul 10, 2003
Est. expiryNov 10, 2017(expired)· nominal 20-yr term from priority
Inventors:Ralph Newton Miller
C07C 19/08B01D 3/36C01B 21/083C01B 21/0835C01B 21/0837C01P 2006/80C07C 17/38
44
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Claims

Abstract

Nitrogen trifluoride (NF 3 ) containing less than 10 parts-per-million molar impurities, e.g., tetrafluoromethane (PFC-14), is disclosed. Azeotropic and extractive distillation processes using entraining agents for separating NF 3 and PFC-14 from each other and from mixtures with other electronics industry materials are disclosed.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . Nitrogen trifluoride (NF 3 ) containing less than 10 parts-per-million-molar of impurities.  
     
     
         2 . Nitrogen trifluoride (NF 3 ) containing less than 10 parts-per-million-molar of fluorinated impurities.  
     
     
         3 . Nitrogen trifluoride (NF 3 ) containing less than 10 parts-per-million-molar tetrafluoromethane (PFC-14).  
     
     
         4 . Nitrogen trifluoride (NF 3 ) containing less than 3 parts-per-million-molar tetrafluoromethane (PFC-14).  
     
     
         5 . Nitrogen trifluoride (NF 3 ) containing less than 1 parts-per-million-molar tetrafluoromethane (PFC-14).  
     
     
         6 . 99.999 molar percent pure nitrogen trifluoride (NF 3 ).  
     
     
         7 . 99.9999 molar percent pure nitrogen trifluoride (NF 3 ).

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