Sample separating apparatus and method, and substrate manufacturing method

Abstract

This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus ( 100 ) has a pair of substrate holding portions ( 270, 280 ). A bonded substrate stack ( 50 ) is sandwiched from upper and lower sides and horizontally held by the substrate holding portions ( 270, 280 ) and rotated. A jet is ejected from a nozzle ( 260 ) and injected into the porous layer of the bonded substrate stack ( 50 ), thereby separating the bonded substrate stack ( 50 ) into two substrates at the porous layer. Another separating apparatus ( 5000 ) has a pair of substrate holding portions ( 270, 280 ), a nozzle ( 260 ) of rejecting a fluid to the porous layer of a bonded substrate stack ( 50 ), and an abrupt operation prevention mechanism ( 4000 ) for preventing the lower substrate holding portion ( 280 ) from abruptly moving downward but allowing it to moderately move when separating the bonded substrate stack ( 50 ).

What is claimed is:  
     
         1 . A separating apparatus for separating a plate-like sample having a separation layer at the separation layer, comprising: 
 a holding mechanism for holding the plate-like sample in a substantially horizontal state while rotating the sample; and    an ejection portion for ejecting a fluid to the separation layer of the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer by the fluid.    
     
     
         2 . The apparatus according to  claim 1 , characterized in that said holding mechanism comprises a pair of sample holding mechanisms for holding the plate-like sample by sandwiching the sample from upper and lower sides.  
     
     
         3 . The apparatus according to  claim 2 , characterized in that said pair of holding mechanisms have chuck mechanisms for chucking the plate-like sample, respectively.  
     
     
         4 . The apparatus according to  claim 2 , characterized in that said pair of holding mechanisms have an application portion for applying a press force to the plate-like sample in an axial direction, and hold the plate-like sample to which the press force is being applied by said application portion.  
     
     
         5 . The apparatus according to  claim 2 , characterized in that said pair of holding mechanisms have an application portion for applying a force to the plate-like sample in an axial direction, and hold the plate-like sample to which the force is being applied by said application portion.  
     
     
         6 . The apparatus according to  claim 4 , characterized in that said application portion presses the plate-like sample in the axial direction using a force of a spring.  
     
     
         7 . The apparatus according to  claim 4 , characterized in that said application portion presses the plate-like sample in the axial direction using a force generated by a cylinder.  
     
     
         8 . The apparatus according to  claim 4 , characterized in that said application portion presses the plate-like sample in the axial direction using pressure of a fluid.  
     
     
         9 . The apparatus according to  claim 2 , characterized in that at least one of said pair of sample holding mechanisms comprises a Bernoulli chuck.  
     
     
         10 . The apparatus according to  claim 4 , characterized in that said application portion supplies a fluid to a surface of the plate-like sample and applies the press force to the plate-like sample using the fluid.  
     
     
         11 . The apparatus according to  claim 10 , characterized in that the fluid supplied to the surface of the plate-like sample by said application portion is a liquid.  
     
     
         12 . The apparatus according to  claim 10 , characterized in that the fluid supplied to the plate-like sample by said application portion is a gas.  
     
     
         13 . The apparatus according to  claim 4 , characterized in that at least one of said pair of sample holding mechanisms comprises a holding member that comes into contact with the plate-like sample to hold the plate-like sample, and said application portion applies the press force to the plate-like sample via said holding member.  
     
     
         14 . The apparatus according to  claim 13 , characterized in that said application portion presses said holding member using a fluid and applies the press force to the plate-like sample via said holding member.  
     
     
         15 . The apparatus according to  claim 14 , characterized in that the fluid supplied to said holding member by said application portion is a liquid.  
     
     
         16 . The apparatus according to  claim 14 , characterized in that the fluid supplied to said holding member by said application portion is a gas.  
     
     
         17 . The apparatus according to  claim 2 , characterized in that at least one of said pair of sample holding mechanisms comprises a holding member that comes into contact with the plate-like sample to hold the plate-like sample and a Bernoulli chuck for supporting said holding member.  
     
     
         18 . The apparatus according to  claim 13 , characterized in that said application portion presses said holding member using a magnetic force and applies the press force to the plate-like sample via said holding member.  
     
     
         19 . The apparatus according to  claim 4 , characterized in that said application portion applies the press force to the plate-like sample from a lower sample holding mechanism of said pair of sample holding mechanisms while fixing a vertical position of an upper sample holding mechanism.  
     
     
         20 . The apparatus according to  claim 4 , characterized in that said application portion applies the press force to the plate-like sample from an upper sample holding mechanism of said pair of sample holding mechanisms while fixing a vertical position of a lower sample holding mechanism.  
     
     
         21 . The apparatus according to  claim 4 , characterized in that said application portion applies the press force to the plate-like sample from both of said pair of sample holding mechanisms.  
     
     
         22 . The apparatus according to  claim 4 , characterized in that said application portion applies the press force to the plate-like sample using a weight.  
     
     
         23 . The apparatus according to  claim 22 , characterized in that said application portion changes stepwise the force for pressing the plate-like sample using a plurality of weights.  
     
     
         24 . The apparatus according to  claim 22 , characterized in that said application portion presses the plate-like sample with a relatively small force when a portion near a periphery of the plate-like sample is to be separated, and presses the plate-like sample with a relatively large force when a portion near the center of the plate-like sample is to be separated.  
     
     
         25 . The apparatus according to  claim 22 , characterized in that said application portion presses the plate-like sample with a relatively small force at a first step of separation of the plate-like sample, and presses the plate-like sample with a relatively large force at a second step of separation of the plate-like sample.  
     
     
         26 . The apparatus according to  claim 22 , characterized in that said application portion presses the portion near the center of the plate-like sample.  
     
     
         27 . The apparatus according to  claim 4 , characterized in that said application portion presses the plate-like sample with a relatively small force when a portion near a periphery of the plate-like sample is to be separated, and presses the plate-like sample with a relatively large force when a portion near the center of the plate-like sample is to be separated.  
     
     
         28 . The apparatus according to  claim 4 , characterized in that said application portion presses the plate-like sample with a relatively small force at a first step of separation of the plate-like sample, and presses the plate-like sample with a relatively large force at a second step of separation of the plate-like sample.  
     
     
         29 . The apparatus according to  claim 4 , characterized in that said application portion presses the portion near the center of the plate-like sample.  
     
     
         30 . The apparatus according to claims  1 , characterized in that said holding mechanism has a structure capable of transferring/receiving the plate-like sample to/from a conveyor mechanism for chucking a surface of the plate-like sample to hold the sample.  
     
     
         31 . The apparatus according to  claim 13 , characterized in that said holding mechanism comprises a convex support portion for holding the plate-like sample while forming a gap between a predetermined portion of a surface of the plate-like sample and a predetermined portion of a surface of said holding member.  
     
     
         32 . The apparatus according to  claim 1 , characterized in that said holding mechanism holds a substantially central portion of the plate-like sample.  
     
     
         33 . The apparatus according to  claim 1 , characterized in that said holding mechanism comprises a sample holding mechanism for holding one surface of the plate-like sample.  
     
     
         34 . The apparatus according to  claim 33 , characterized in that said sample holding mechanism comprises a chuck mechanism for chucking the plate-like sample.  
     
     
         35 . The apparatus according to  claim 34 , characterized in that said chuck mechanism chucks a plurality of portions of the plate-like sample.  
     
     
         36 . The apparatus according to  claim 34 , characterized in that said chuck mechanism chucks a peripheral portion of the plate-like sample.  
     
     
         37 . The apparatus according to  claim 34 , characterized in that said chuck mechanism chucks the plate-like sample to warp the plate-like sample.  
     
     
         38 . The apparatus according to  claim 34 , characterized in that said holding mechanism has a structure capable of exchanging the plate-like sample with a conveyor mechanism for chucking a surface of the plate-like sample to hold the sample.  
     
     
         39 . The apparatus according to  claim 35 , characterized in that said sample holding mechanism comprises a convex support portion at a substantially central portion.  
     
     
         40 . The apparatus according to  claim 34 , characterized in that said chuck mechanism chucks the plate-like sample when a portion near a periphery of the plate-like sample is to be separated, and does not chuck the plate-like sample when a portion near the center of the plate-like sample is to be separated.  
     
     
         41 . The apparatus according to  claim 34 , characterized in that said chuck mechanism chucks the plate-like sample at a first step of separation of the plate-like sample, and does not chuck the plate-like sample at a second step of separation of the plate-like sample.  
     
     
         42 . The apparatus according to  claim 1 , characterized in that said holding mechanism comprises an edge portion support member for supporting an edge portion of the plate-like sample.  
     
     
         43 . The apparatus according to  claim 1 , characterized in that said holding mechanism comprises a plurality of edge portion support members for supporting an edge portion of the plate-like sample and a rotation source for rotating at least one of said plurality of edge portion support members, and the plate-like sample is rotated by transmitting a rotational force from said rotated edge portion support member to the plate-like sample.  
     
     
         44 . The apparatus according to  claim 42 , characterized in that said holding mechanism comprises a table for supporting said edge portion support member, and a rotation source for rotating said table, and the plate-like sample is rotated by rotating said table.  
     
     
         45 . The apparatus according to  claim 42 , characterized in that said holding mechanism further comprises a convex support portion for partially supporting a lower surface of the plate-like sample.  
     
     
         46 . The apparatus according to  claim 43 , characterized in that said holding mechanism further comprises a convex support portion for partially supporting a lower surface of the plate-like sample, said convex support portion being rotated together with the plate-like sample placed on said support portion.  
     
     
         47 . The apparatus according to  claim 42 , further comprising a driving mechanism for driving said edge portion support member toward the center or outer periphery of the plate-like sample, and when the plate-like sample is to be held, said edge portion support member is driven toward the center by said driving mechanism.  
     
     
         48 . The apparatus according to  claim 42 , characterized in that each of said plurality of edge portion support members has a shape obtained by bonding bottom portions of two cones.  
     
     
         49 . The apparatus according to  claim 1 , further comprising a spacing mechanism for, after the plate-like sample is separated into two samples, spacing the separated plate-like samples apart from each other.  
     
     
         50 . The apparatus according to  claim 49 , characterized in that said spacing mechanism spaces the separated plate-like samples apart substantially in the axial direction.  
     
     
         51 . The apparatus according to  claim 49 , characterized in that said spacing mechanism spaces the separated plate-like samples apart substantially in a planar direction.  
     
     
         52 . The apparatus according to  claim 1 , further comprising a cleaning portion for cleaning the plate-like sample which is being separated or the separated plate-like samples.  
     
     
         53 . A separating apparatus for separating a plate-like sample having a separation layer at the separation layer, comprising: 
 a holding mechanism for holding the plate-like sample in a substantially horizontal state while rotating the sample; and    an ejection portion for ejecting a fluid to the separation layer of the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer by the fluid.    
     
     
         54 . The apparatus according to  claim 53 , further comprising a scanning portion for scanning said ejection portion or the plate-like sample in separating the plate-like sample.  
     
     
         55 . The apparatus according to  claim 53 , further comprising a pivot portion for pivoting said ejection portion about an axis parallel to an axis of the plate-like sample.  
     
     
         56 . The apparatus according to  claim 1 , characterized in that the plate-like sample to be processed has a fragile layer as the separation layer.  
     
     
         57 . The apparatus according to  claim 56 , characterized in that the fragile layer is a porous layer.  
     
     
         58 . The apparatus according to  claim 56 , characterized in that the fragile layer is a microcavity layer.  
     
     
         59 . The apparatus according to  claim 1 , characterized in that the plate-like sample to be processed is a semiconductor substrate.  
     
     
         60 . The apparatus according to  claim 1 , characterized in that the plate-like sample to be processed is formed by bonding a first substrate and a second substrate and has a fragile layer as the separation layer.  
     
     
         61 . The apparatus according to  claim 1 , characterized in that the plate-like sample to be processed is formed by forming a porous layer on a surface of a first semiconductor substrate, forming an unporous layer on the porous layer, and bonding a second substrate to the unporous layer.  
     
     
         62 . A separating system comprising: 
 a separating apparatus of  claim 1;  and    a conveyor robot for transferring a plate-like sample to said separating apparatus in a substantially horizontal state and receiving in the substantially horizontal state plate-like samples separated by said separating apparatus.    
     
     
         63 . The system according to  claim 62 , characterized in that said conveyor robot transfers the plate-like sample while supporting the sample from a lower side to said separating apparatus.  
     
     
         64 . The system according to  claim 62 , characterized in that said conveyor robot receives a lower plate-like sample of two separated plate-like samples from said separating apparatus while supporting the sample from the lower side.  
     
     
         65 . The system according to  claim 62 , characterized in that said conveyor robot receives an upper plate-like sample of the two separated plate-like samples from said separating apparatus while supporting the sample from an upper side.  
     
     
         66 . The system according to  claim 62 , characterized in that said system further comprises a centering apparatus for aligning the center of the plate-like sample at a predetermined position, and said conveyor robot receives the plate-like sample from said centering apparatus and transfers the sample to said separating apparatus.  
     
     
         67 . The system according to  claim 62 , characterized in that said system further comprises a turning apparatus for rotating the plate-like sample through 180° to turn the sample, and said conveyor robot transfers the upper plate-like sample, separated by said separating apparatus, to said turning apparatus in the horizontal state.  
     
     
         68 . The system according to  claim 62 , further comprising a cleaning/drying apparatus for cleaning and drying the plate-like samples separated by said separating apparatus.  
     
     
         69 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 holding the plate-like sample by a holding mechanism in a substantially horizontal state;    ejecting a fluid from an election portion to the separation layer of the plate-like sample while rotating the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer using the fluid; and    removing separated plate-like samples from said holding mechanism.    
     
     
         70 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 pressing and holding the plate-like sample by a holding mechanism in a substantially horizontal state;    ejecting a fluid from an election portion to the separation layer of the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer using the fluid; and    removing separated plate-like samples from said holding mechanism.    
     
     
         71 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 transferring the plate-like sample to a separating apparatus of  claim 1  in a horizontal state;    separating the plate-like sample by said separating apparatus; and    receiving separated plate-like samples from said separating apparatus.    
     
     
         72 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 transferring the plate-like sample to a centering apparatus in a horizontal state and aligning the center of the plate-like sample at a predetermined position by said centering apparatus;    receiving the plate-like sample from said centering apparatus and transferring the plate-like sample to a separating apparatus of  claim 1  in the horizontal state to separate the plate-like sample by said separating apparatus; and    receiving separated plate-like samples from said separating apparatus.    
     
     
         73 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 transferring the plate-like sample to a centering apparatus in a horizontal state and aligning the center of the plate-like sample at a predetermined position by said centering apparatus;    receiving the plate-like sample from said centering apparatus and transferring the plate-like sample to a separating apparatus of  claim 1  in the horizontal state to separate the plate-like sample by said separating apparatus;    receiving an upper substrate of two separated plate-like samples from said separating apparatus, transferring the substrate to a turning apparatus, and rotating the plate-like sample through 180° to turn the substrate by said turning apparatus;    receiving the plate-like sample from said turning apparatus; and    receiving a lower substrate of the two separated plate-like samples from said separating apparatus.    
     
     
         74 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 transferring the plate-like sample to a centering apparatus in a horizontal state and aligning the center of the plate-like sample at a predetermined position by said centering apparatus;    receiving the plate-like sample from said centering apparatus and transferring the plate-like sample to a separating apparatus of  claim 1  in the horizontal state to separate the plate-like sample by said separating apparatus;    receiving an upper substrate of two separated plate-like samples from said separating apparatus, transferring the substrate to a turning apparatus, and rotating the plate-like sample through 180° to turn the substrate by said turning apparatus;    receiving the plate-like sample from said turning apparatus, transferring the sample to a cleaning/drying apparatus, and cleaning and drying the sample by said cleaning/drying apparatus; and    receiving a lower substrate of the two separated plate-like samples from said separating apparatus, transferring the substrate to said cleaning/drying apparatus, and cleaning and drying the substrate by said cleaning/drying apparatus.    
     
     
         75 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 transferring the plate-like sample to a separating apparatus of  claim 1  in the horizontal state to separate the plate-like sample by said separating apparatus;    receiving an upper substrate of two separated plate-like samples from said separating apparatus, transferring the substrate to a turning apparatus, and rotating the plate-like sample through 180° to turn the substrate by said turning apparatus;    receiving the plate-like sample from said turning apparatus; and    receiving a lower substrate of the two separated plate-like samples from said separating apparatus.    
     
     
         76 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 transferring the plate-like sample to a separating apparatus of  claim 1  in the horizontal state to separate the plate-like sample by said separating apparatus;    receiving an upper substrate of two separated plate-like samples from said separating apparatus, transferring the substrate to a turning apparatus, and rotating the plate-like sample through 180° to turn the substrate by said turning apparatus;    receiving the plate-like sample from said turning apparatus, transferring the sample to a cleaning/drying apparatus, and cleaning and drying the sample by said cleaning/drying apparatus; and    receiving a lower substrate of the two separated plate-like samples from said separating apparatus, transferring the substrate to said cleaning/drying apparatus, and cleaning and drying the substrate by said cleaning/drying apparatus.    
     
     
         77 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the steps of: 
 transferring the plate-like sample to a separating apparatus of  claim 1  in the horizontal state to separate the plate-like sample by said separating apparatus; and    transferring each of separated plate-like samples to a cleaning/drying apparatus and cleaning and drying the sample by said cleaning/drying apparatus.    
     
     
         78 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the step of: 
 ejecting a fluid to the separation layer of the plate-like sample while holding and rotating the plate-like sample in a substantially horizontal state to separate the plate-like sample at the separation layer using the fluid.    
     
     
         79 . A separating method of separating a plate-like sample having a separation layer at the separation layer, comprising the step of: 
 ejecting a fluid to the separation layer of the plate-like sample while pressing and holding the plate-like sample in a substantially horizontal state to separate the plate-like sample at the separation layer using the fluid.    
     
     
         80 . A method of manufacturing a substrate, comprising: 
 the preparation step of bonding a first substrate having a fragile layer to a second substrate to prepare a bonded substrate stack;    the separation step of separating the bonded substrate stack at the fragile layer using a fluid; and    the removal step of removing the fragile layer remaining on the second substrate after the separation step,    wherein the separation step comprises ejecting the fluid to the fragile layer of the bonded substrate stack while holding and rotating the bonded substrate stack in a substantially horizontal state to separate the bonded substrate stack at the fragile layer using the fluid.    
     
     
         81 . A method of manufacturing a substrate, comprising: 
 the preparation step of bonding a first substrate having a fragile layer to a second substrate to prepare a bonded substrate stack;    the separation step of separating the bonded substrate stack at the fragile layer using a fluid; and    the removal step of removing the fragile layer remaining on the second substrate after the separation step,    wherein the separation step comprises ejecting the fluid to the fragile layer of the bonded substrate stack while pressing and holding the bonded substrate stack in a substantially horizontal state to separate the bonded substrate stack at the fragile layer using the fluid.    
     
     
         82 . A separating apparatus for separating a plate-like sample having a separation layer at the separation layer, comprising: 
 a holding mechanism for holding the plate-like sample;    an ejection portion for ejecting a fluid to the plate-like sample held by said holding mechanism to separate the plate-like sample at the separation layer using the fluid; and    an abrupt operation prevention mechanism for preventing said holding mechanism from abruptly moving due to a force of the fluid acting in the plate-like sample while allowing said holding mechanism to moderately move when separating the plate-like sample.    
     
     
         83 . The apparatus according to  claim 82 , characterized in that said abrupt operation prevention mechanism comprises a damper mechanism.  
     
     
         84 . The apparatus according to  claim 82 , further comprising a rotating mechanism for rotating said holding mechanism about an axis substantially perpendicular to a fluid ejection direction of said ejection portion when separating the plate-like sample.  
     
     
         85 . The apparatus according to  claim 84 , characterized in that said abrupt operation prevention mechanism is coaxial with said holding mechanism.  
     
     
         86 . The apparatus according to  claim 82 , characterized in that said holding mechanism comprises a pair of sample holding portions for sandwiching and holding the plate-like sample, at least one of said pair of sample holding portions can move in a direction substantially perpendicular to the fluid ejection direction of said ejection portion, and said abrupt operation prevention mechanism prevents said movable sample holding portion from abrupt movement while allowing said movable sample holding portion to moderately move when separating the plate-like sample.  
     
     
         87 . The apparatus according to  claim 86 , characterized in that said abrupt operation prevention mechanism comprises 
 a movable portion which moves in contact with said movable sample holding portion, and    a reaction generation portion for generating a reaction against a force applied from said movable sample holding portion to said movable portion.    
     
     
         88 . The apparatus according to  claim 87 , characterized in that said movable portion smoothly moves.  
     
     
         89 . The apparatus according to  claim 87 , characterized in that said movable portion comprises a piston, said reaction generation portion comprises a frame member constructing a pressure chamber for causing pressure to act on said piston, and said frame member has a channel for discharging a fluid from said pressure chamber.  
     
     
         90 . The apparatus according to  claim 89 , characterized in that said abrupt operation prevention mechanism has a valve for controlling the fluid flowing through the channel.  
     
     
         91 . The apparatus according to  claim 89 , characterized in that said abrupt operation prevention mechanism further comprises a restoring mechanism for extending said piston retracted into said frame member and simultaneously filling said pressure chamber with the fluid when separating the plate-like sample.  
     
     
         92 . The apparatus according to  claim 91 , characterized in that said restoring mechanism has a spring, and said piston is extended by a force of the spring to fill said pressure chamber with the fluid.  
     
     
         93 . The apparatus according to  claim 91 , characterized in that said restoring mechanism comprises a filling mechanism for filing said pressure chamber with the fluid, and said piston is extended by filling said pressure chamber with the fluid by said filling mechanism.  
     
     
         94 . The apparatus according to  claim 82 , characterized in that said holding mechanism further comprises a press mechanism for applying a press force to the plate-like sample in a direction substantially perpendicular to the fluid ejection direction of said ejection portion when holding the plate-like sample.  
     
     
         95 . The apparatus according to  claim 82 , characterized in that said apparatus further comprises a driving portion for changing a position where the fluid ejected from said ejection portion is injected into the plate-like sample, and the plate-like sample is separated while changing the position.  
     
     
         96 . The apparatus according to  claim 95 , characterized in that said driving portion comprises a motor for rotating the plate-like sample about an axis substantially perpendicular to the fluid ejection direction of said ejection portion.  
     
     
         97 . The apparatus according to  claim 82 , characterized in that the separation layer is a fragile layer.  
     
     
         98 . The apparatus according to  claim 97 , characterized in that the fragile layer is a porous layer.  
     
     
         99 . The apparatus according to  claim 97 , characterized in that the fragile layer is a microcavity layer.  
     
     
         100 . The apparatus according to  claim 82 , characterized in that the plate-like sample to be separated is a semiconductor substrate.  
     
     
         101 . The apparatus according to  claim 82 , characterized in that the plate-like sample to be separated is formed by bonding a first substrate and a second substrate.  
     
     
         102 . A separating method of ejecting a fluid to a separation layer of a plate-like sample having the separation layer to separate the plate-like sample at the separation layer, characterized by comprising the step of: 
 separating the plate-like sample while preventing the plate-like sample from abruptly warping due to a force of the fluid acting in the plate-like sample and allowing the plate-like sample to moderately warp.    
     
     
         103 . The method according to  claim 102 , characterized in that the separation layer is a fragile layer.  
     
     
         104 . The method according to  claim 103 , characterized in that the fragile layer is a porous layer.  
     
     
         105 . The method according to  claim 103 , characterized in that the fragile layer is a microcavity layer.  
     
     
         106 . The method according to  claim 102 , characterized in that the plate-like sample to be separated is a semiconductor substrate.  
     
     
         107 . The method according to  claim 102 , characterized in that the plate-like sample to be separated is formed by bonding a first substrate and a second substrate.  
     
     
         108 . A method of manufacturing a substrate, comprising: 
 the preparation step of bonding a first substrate having a fragile layer to a second substrate to prepare a bonded substrate stack;    the separation step of separating the bonded substrate stack at the fragile layer using a fluid; and    the removal step of removing the fragile layer remaining on the second substrate after the separation step,    wherein the separation step comprises separating the bonded substrate stack at the fragile layer while preventing the bonded substrate stack from abruptly warping due to a force of the fluid acting in the bonded substrate stack and allowing the bonded substrate stack to moderately warp.