Aqueous grinding fluid for wire-sawing or band-sawing

Abstract

An aqueous grinding fluid has compositions mainly consisting of 40.0-95.0 wt. % a polyalcohol and/or a polyalcohol derivative, 5.0-50.0 wt. % water, 0.1-3.5 wt. % bentonite, 0.1-5.0 wt. % cellulose and weight %, 0.5-10.0 wt. % mica and optionally a small amount of a surfactant or polar solvent. Bentonite, cellulose and mica are preferably added with such combination to adjust a viscosity of a slurry to 150-300 mPa.second as a value measured by a rotating cylinder type viscometer. The aqueous suspension is nonflammable and stabilized in dispersiveness and settleability-proof of abrasive grits as well as a viscosity for a long time, and facilitates washing and cleaning of sliced wafers and a grinding machine without radiation of stinks.

1 . An aqueous grinding fluid useful for wire-sawing or band-sawing having compositions mainly consisting of 40.0-95.0 wt. % a polyalcohol and/or a polyalcohol derivative, 5.0-50.0 wt. % water, 0.1-3.5 wt. % bentonite, 0.1-5.0 wt. % cellulose and weight %, 0.5-10.0 wt. % mica and optionally a surfactant or polar solvent.  
     
     
         2 . The aqueous grinding fluid according to  claim 1 , wherein its viscosity measured by a rotating cylinder type viscometer is adjusted to 150-300 mPa.second by combinative addition of bentonite, cellulose and mica.  
     
     
         3 . The aqueous grinding fluid according to  claim 1 , wherein its pH value is adjusted to 5.0-12.0.