Stage system and stage driving method for use in exposure apparatus

Abstract

A stage system includes a stage being movable in a predetermined direction, a first unit for applying a force to the stage in the predetermined direction, a moving mechanism for moving one of the first unit and a structure including the first unit, a first measuring system for measuring at least one of the position and movement amount of the stage, and a second measuring system for measuring at least one of the position and movement amount of one of the first unit and the structure, wherein the stage is controlled on the basis of a measured value of the first measuring system, and wherein the moving system is controlled on the basis of a measured value of the second measuring system.

What is claimed is:  
     
         1 . A stage system, comprising: 
 a stage being movable in a predetermined direction;    a first unit for applying a force to the stage in the predetermined direction;    moving means for moving one of the first unit and a structure including the first unit;    first measuring means for measuring at least one of the position and movement amount of the stage; and    second measuring means for measuring at least one of the position and movement amount of one of the first unit and the structure;    wherein the stage is controlled on the basis of a measured value of said first measuring means, and wherein said moving means is controlled on the basis of a measured value of said second measuring means.    
     
     
         2 . A stage system according to  claim 1 , wherein the first unit is controlled on the basis of a measured value of said first measuring means.  
     
     
         3 . A stage system according to  claim 1 , wherein the first unit is controlled on the basis of information related to a target position of the stage.  
     
     
         4 . A stage system according to  claim 1 , wherein the first unit includes a linear motor.  
     
     
         5 . A stage system according to  claim 1 , wherein the first unit has a function for applying a force to a gravity center of the stage.  
     
     
         6 . A stage system according to  claim 1 , wherein said moving means is controlled on the basis of information related to a target position of the stage.  
     
     
         7 . A stage system according to  claim 1 , wherein said moving means includes one of a linear motor and a ball screw.  
     
     
         8 . A stage system according to  claim 1 , wherein the stage is movable in three freedom directions.  
     
     
         9 . A stage system according to  claim 8 , wherein the first unit is operable to apply a force to the stage in three freedom directions.  
     
     
         10 . A stage system according to  claim 8 , wherein said moving means is operable to move one of the first unit and the structure in one freedom direction.  
     
     
         11 . A stage system according to  claim 1 , wherein the stage is movable in six freedom directions.  
     
     
         12 . A stage system according to  claim 11 , wherein the first unit is operable to apply a force to the stage in six freedom directions.  
     
     
         13 . A stage system according to  claim 11 , wherein said moving means comprises an X-Y stage.  
     
     
         14 . A stage system according to  claim 1 , further comprising a second unit separate from the first unit.  
     
     
         15 . A stage system according to  claim 14 , wherein the second unit is controlled on the basis of information related to a target position of the stage.  
     
     
         16 . A stage system according to  claim 15 , wherein the second unit is feed-forward controlled on the basis of information related to a target position of the stage.  
     
     
         17 . A stage system according to  claim 15 , wherein the information concerns acceleration of the stage.  
     
     
         18 . A stage system according to  claim 14 , wherein the second unit has a function for applying a force to a gravity center of the stage.  
     
     
         19 . A stage system according to  claim 14 , further comprising second moving means for moving one of the second unit and a second structure including the second unit.  
     
     
         20 . A stage system according to  claim 14 , wherein said moving means is operable to move the first and second units integrally.  
     
     
         21 . A stage system according to  claim 14 , wherein the second unit includes an electromagnet.  
     
     
         22 . A stage system according to  claim 21 , wherein the second unit includes at least one set of electromagnets for producing forces opposite to each other and parallel to said predetermined direction.  
     
     
         23 . A stage system according to  claim 14 , wherein the second is operable to apply a force to the stage in one freedom direction.  
     
     
         24 . A stage system according to  claim 14 , wherein the second unit is operable to apply a force to the stage in two freedom directions.  
     
     
         25 . A stage system, comprising: 
 a stage being movable in a predetermined direction;    a first unit for applying a force to the stage in a predetermined direction;    a second unit separate from the first unit, for applying a force to the stage in the predetermined direction; and    moving means for moving one of the second unit and a structure including the second unit;    wherein positioning of the stage is performed on the basis of the first unit, and wherein acceleration and deceleration of the stage are performed on the basis of the second unit.    
     
     
         26 . A stage system according to  claim 25 , wherein the second unit is operable to produce a force larger than that produced by the first unit.  
     
     
         27 . A stage system according to  claim 25 , wherein, for production of the same driving force, heat generation of the second unit is smaller than that of the first unit.  
     
     
         28 . A stage system according to  claim 25 , wherein the first unit is operable to produce an electromagnetic force by use of a coil and a magnet, and wherein the second unit is operable to produce an attraction force by use of a magnetic element and an electromagnet.  
     
     
         29 . A stage system according to  claim 28 , wherein the second unit includes at least one set of electromagnets for producing forces opposite to each other and parallel to said predetermined direction.  
     
     
         30 . A stage system according to  claim 25 , further comprising first measuring means for measuring a position of the stage.  
     
     
         31 . A stage system according to  claim 29 , wherein the first unit is controlled on the basis of a measured value of said first measuring means.  
     
     
         32 . A stage system according to  claim 25 , further comprising second measuring means for measuring at least one of a position and movement amount of the second unit.  
     
     
         33 . A stage system according to  claim 32 , wherein said moving means is controlled on the basis of a measured value of said second measuring means.  
     
     
         34 . A stage system according to  claim 25 , wherein the second unit has a function for applying a force to the stage throughout a movement stroke of the stage.  
     
     
         35 . A stage system according to  claim 25 , wherein said moving means is operable to move the first and second units integrally.  
     
     
         36 . A stage system according to  claim 25 , further comprising second moving means for moving one of the first unit and a second structure including the first unit.  
     
     
         37 . A stage system according to  claim 36 , further comprising third measuring means for measuring at least one of a position and movement amount of one of the first unit and the second structure including the first unit.  
     
     
         38 . A stage system according to  claim 37 , wherein said second moving means is controlled on the basis of a measured value of said third measuring means.  
     
     
         39 . A stage system according to  claim 25 , further comprising acceleration information producing means for producing a signal related to acceleration of the stage, and positional information producing means for producing a signal related to a position of the stage, wherein the first unit is controlled on the basis of a signal from said positional information producing means, and wherein the second unit is controlled on the basis of a signal from said acceleration information producing means.  
     
     
         40 . A stage system according to  claim 39 , wherein the second unit is feed-forward controlled on the basis of a signal from said acceleration information producing means.  
     
     
         41 . A stage system according to  claim 39 , wherein said moving means is controlled on the basis of a signal from said positional information producing means.  
     
     
         42 . A stage system according to  claim 25  wherein the stage is movable in three freedom directions.  
     
     
         43 . A stage system according to  claim 42 , wherein the first unit is operable to apply a force to the stage in three freedom directions.  
     
     
         44 . A stage system according to  claim 42 , wherein the second unit is operable to apply a force to the stage in one freedom direction.  
     
     
         45 . A stage system according to  claim 42 , wherein said moving means is operable to move one of the first unit and the structure including the first unit, in one freedom direction.  
     
     
         46 . A stage system according to  claim 25 , wherein the stage is movable in six freedom directions.  
     
     
         47 . A stage system according to  claim 46 , wherein the first unit is operable to apply a force to the stage in six freedom directions.  
     
     
         48 . A stage system according to  claim 46 , wherein the second unit is operable to apply a force to the stage in two freedom directions.  
     
     
         49 . A stage system according to  claim 45 , wherein said moving means has a function for moving one of the second unit and the structure including the second unit, in two freedom directions.  
     
     
         50 . A stage system according to  claim 25 , wherein said moving means comprises an X-Y stage.  
     
     
         51 . A stage system according to  claim 25 , wherein the first unit has a function for applying a force to a gravity center of the stage.  
     
     
         52 . A stage system according to  claim 25 , wherein the second unit has a function for applying a force to a gravity center of the stage.  
     
     
         53 . A stage system, comprising: 
 a stage being movable in a predetermined direction;    a unit for applying a force to the stage in the predetermined direction;    moving means for moving one of the unit and a structure including the unit;    first measuring means for measuring at least one of the position and movement amount of the stage;    second measuring means for measuring at least one of the position and movement amount of one of the unit and the structure; and    signal producing means for producing a signal on the basis of a target position of the stage;    wherein the unit is controlled on the basis of a signal from said signal producing means and of a signal from said first measuring means, and wherein said moving means is controlled on the basis of a signal from said signal producing means and of a signal from said second measuring means.    
     
     
         54 . A stage system according to  claim 53 , wherein the unit is controlled on the basis of a difference between the signal from said signal producing means and a signal from said first measuring means.  
     
     
         55 . A stage system according to  claim 53 , wherein said moving means is controlled on the basis of a difference between a signal from said signal producing means and a signal from said second measuring means.  
     
     
         56 . A stage system according to  claim 53 , wherein the signal from said signal producing means relates to the position of the stage.  
     
     
         57 . A stage system according to  claim 53 , wherein the unit includes a linear motor.  
     
     
         58 . A stage system according to  claim 53 , further comprising a second unit separate from the unit, for applying a force to the stage.  
     
     
         59 . A stage system according to  claim 58 , wherein the second unit is feed-forward controlled on the basis of a signal from said signal producing means.  
     
     
         60 . A stage system according to  claim 58 , wherein the second unit can be moved by one of said moving means and second moving means separate from said moving means.  
     
     
         61 . A stage system according to  claim 58 , wherein the second unit includes an electromagnet.  
     
     
         62 . A stage system, comprising: 
 a stage being movable in a predetermined direction; and    a unit having a magnetic element and at least one set of electromagnets disposed on the opposite sides of the magnetic element;    wherein one of the magnetic element and the electromagnets of the unit is held by the stage, and wherein the magnetic element and the electromagnets are kept opposed to each other regardless of rotational motion of the stage.    
     
     
         63 . A stage system according to  claim 62 , wherein the magnetic element and the electromagnets have opposed faces having one of a cylindrical shape and a spherical shape.  
     
     
         64 . A stage system according to  claim 62 , wherein the magnetic element has one of an arcuate shape and a cup-like shape.  
     
     
         65 . A stage system according to  claim 62 , wherein the electromagnets have an E-shape.  
     
     
         66 . A stage system according to  claim 65 , wherein an end face of the E-shape electromagnets has one of an arcuate shape and a cup-like shape.  
     
     
         67 . A stage system according to  claim 62 , wherein the stage is movable in X and Y directions, and wherein the unit includes at least two sets of electromagnets disposed to sandwich the magnetic element with respect to X and Y directions.  
     
     
         68 . A stage system according to  claim 62 , further comprising moving means for moving the other of the magnetic element and the electromagnets, not held by the stage, such that the magnetic element and the electromagnets can be held opposed to each other regardless of motion of the stage.  
     
     
         69 . A stage system according to  claim 62 , wherein the magnetic element is disposed on the stage side.  
     
     
         70 . A stage system according to  claim 62 , further comprising adjusting means for adjusting a combined force of the electromagnets to a predetermined level.  
     
     
         71 . A stage system according to  claim 62 , wherein the unit has a function for applying a force to a gravity center of the stage.  
     
     
         72 . An exposure apparatus, including a stage system as recited in  claim 1 .  
     
     
         73 . An exposure apparatus, including a stage system as recited in  claim 25 .  
     
     
         74 . An exposure apparatus, including a stage system as recited in  claim 53 .  
     
     
         75 . An exposure apparatus, including a stage system as recited in  claim 62 .  
     
     
         76 . A device manufacturing method, comprising the steps of: 
 preparing an exposure apparatus as recited in  claim 72 , and    transferring a reticle pattern to a wafer by use of the exposure apparatus.    
     
     
         77 . A device manufacturing method, comprising the steps of: 
 preparing an exposure apparatus as recited in  claim 73 , and    transferring a reticle pattern to a wafer by use of the exposure apparatus.    
     
     
         78 . A device manufacturing method, comprising the steps of: 
 preparing an exposure apparatus as recited in  claim 74 , and    transferring a reticle pattern to a wafer by use of the exposure apparatus.    
     
     
         79 . A device manufacturing method, comprising the steps of: 
 preparing an exposure apparatus as recited in  claim 75 , and    transferring a reticle pattern to a wafer by use of the exposure apparatus.    
     
     
         80 . A stage driving method, comprising: 
 a first measuring step for measuring at least one of a position and movement amount of a stage being movable in a predetermined direction;    a second measuring step for measuring at least one of a position and movement amount of one of a unit having an actuator and a structure including the unit;    an applying step for applying a force to the stage through the unit;    a moving step for moving the unit in a predetermined direction through moving means;    a first control step for controlling the stage on the basis of a first measured value produced in said first measuring step; and    a second control step for controlling at least one of the position and movement amount of one of the unit and the structure, on the basis of a second measured value produced in said second measuring step.    
     
     
         81 . A stage system according to  claim 80 , wherein said second control step includes a step for controlling the unit.  
     
     
         82 . A method according to  claim 81 , wherein, in the unit controlling step, the unit is controlled on the basis of the first measured value and a target value.  
     
     
         83 . A method according to  claim 80 , further comprising a second applying step for applying a force to the stage through a second unit separate from the unit.  
     
     
         84 . A method according to  claim 83 , wherein the second unit is feed-forward controlled on the basis of a target value.  
     
     
         85 . A stage driving method, comprising: 
 a first measuring step for measuring at least one of a position and movement amount of a stage being movable in a predetermined direction:    a second measuring step for measuring at least one of a position and movement amount of one of a unit having an actuator and a structure including the unit;    an applying step for applying a force to the stage through the unit;    a moving step for moving the unit in a predetermined direction through moving means;    a signal producing step for producing a signal on the basis of a target position of the stage;    a first control step for controlling the stage on the basis of a first measured value produced in said first measuring step and of a signal produced in said signal producing step; and    a second control step for controlling at least one of the position and movement amount of one of the unit and the structure, on the basis of a second measured value produced in said second measuring step and a signal produced in said signal producing step.    
     
     
         86 . A method according to  claim 85 , further comprising detecting a difference between a signal produced in said signal producing step and the first measured value.  
     
     
         87 . A method according to  claim 85 , further comprising detecting a difference between a signal produced in said signal producing step and the second measured value.