US2003091846A1PendingUtilityA1

Granular thin magnetic film and method of manufacturing the film, laminated magnetic film, magnetic part, and electronic device

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Priority: Jan 18, 2001Filed: Jan 17, 2002Published: May 15, 2003
Est. expiryJan 18, 2021(expired)· nominal 20-yr term from priority
Inventors:Kazuyoshi KobayashiKenji IkedaMasayuki Fujimoto
Y10T428/3183H01F 10/132H05K 9/0084H01F 10/3227H01F 10/007H01F 41/183Y10T428/12611Y10T428/12618Y10T428/32H01F 10/138B82Y 25/00Y10T428/12493Y10T428/12535H01F 41/301B82Y 40/00
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Claims

Abstract

There are provided a magnetic thin film utilizing a granular film and having excellent high frequency characteristics and a method of manufacturing the same, and a multilayered magnetic film and magnetic components and electronic equipment utilizing the same. A nonreactive sputtering is performed so that there is no oxidation of a magnetic metal, and a saturation magnetization is increased to increase a resonant frequency of permeability. Also, a multi-target simultaneous sputtering is combined with the nonreactive sputtering so that in a granular structure including magnetic grains and an insulating layer a size of the magnetic grains and a thickness of the insulating layer are optimized thereby ensuring a proper magnitude for a crystalline magnetic anisotropy within the grains and excellent soft magnetic properties. Further, the optimization of the thickness of the insulating layer has the effect of improving a resistivity, decreasing an eddy current and improving an exchange interaction between the magnetic grains.

Claims

exact text as granted — not AI-modified
1 . A granular magnetic thin film characterized in that an insulating material is present around grain boundaries so as to enclose magnetic grains, and that a resonant frequency of permeability is 2 GHz or over.  
     
     
         2 . A granular magnetic thin film characterized in that an insulating material is present around grain boundaries so as to enclose magnetic grains, and that said insulating material has a thickness ranging from 0.5 nm to 1.5 nm.  
     
     
         3 . A granular magnetic thin film characterized in that an insulating material is present around grain boundaries so as to enclose magnetic grains, and that said magnetic grains are grains of a nonoxidizable magnetic metal.  
     
     
         4 . A granular magnetic thin film characterized in that an insulating material is present around grain boundaries so as to enclose magnetic grains of a magnetic metal of a nature such that a spectral peak of an oxide of said magnetic metal is not observable by a measurement made by an X-ray photoelectron spectroscopy.  
     
     
         5 . A granular magnetic thin film as set forth in  claim 4 , characterized in that said magnetic grains contain at least one of Co and Fe.  
     
     
         6 . A granular magnetic thin film as set forth in  claim 4 , characterized in that said insulating material is composed of an oxide ceramic.  
     
     
         7 . A granular magnetic thin film as set forth in  claim 4 , characterized in that said insulating material is composed of an amorphous material.  
     
     
         8 . A granular magnetic thin film as set forth in  claim 4 , characterized in that a thickness of said insulating material or a spacing between said magnetic grains is in a range from 0.5 nm to 1.5 nm.  
     
     
         9 . A method of manufacturing a granular magnetic thin film characterized by the steps of preparing a magnetic metal target and an insulating material target, respectively, sputtering said targets simultaneously in a nonoxidizing atmosphere, and forming on a substrate a thin film in which an insulating material is present around grain boundaries so as to enclose magnetic grains.  
     
     
         10 . A granular magnetic thin film manufacturing method as set forth in  claim 9 , characterized in that said magnetic metal target contains at least one of Co and Fe.  
     
     
         11 . A granular magnetic thin film manufacturing method as set forth in  claim 9 , characterized in that said insulating material target is composed of an oxide ceramic.  
     
     
         12 . A multilayered magnetic film characterized in that a multilayered structure is formed by alternately laminating a plurality of magnetic layers each composed of a granular film including magnetic grains enclosed by an insulating material and a plurality of insulating layers, and that thicknesses of said magnetic layers and said insulating layers are respectively predetermined so as to prevent growth of said magnetic grains by said insulating layers.  
     
     
         13 . A multilayered magnetic film as set forth in  claim 12 , characterized in that each of said magnetic layers is composed of CoFeAlO film, and each of said insulating layers is composed of Al 2 O 3  film.  
     
     
         14 . A multilayered magnetic film as set forth in  claim 13 , characterized in that the following relations are satisfied: 
 5 Å<WM≦130 Å, WI≦10 Å   where WM represents the thickness of said magnetic layers, and WI represents the thickness of said insulating layers.    
     
     
         15 . A multilayered magnetic film as set forth in  claim 13 , characterized in that the following relations are satisfied: 
 10 Å≦WM≦100 Å, WI≦10 Å   where WM represents the thickness of said magnetic layers, and WI represents the thickness of said insulating layers.    
     
     
         16 . A multilayered magnetic film as set forth in  claim 13 , characterized in that the following relations are satisfied: 
 5 Å<WM≦130 Å, 5 Å≦WI≦8 Å   where WM represents the thickness of said magnetic layers, and WI represents the thickness of said insulating layers.    
     
     
         17 . A multilayered magnetic film as set forth in  claim 13 , characterized in that the following relations are satisfied: 
 10 Å<WM≦100 Å, 5 Å≦WI≦8 Å   where WM represents the thickness of said magnetic layers, and WI represents the thickness of said insulating layers.    
     
     
         18 . A multilayered magnetic film as set forth in  claim 12 , characterized in that each of said magnetic layers is composed of CoFeSiO film, and each of said insulating layers is composed of SiO  2  film.  
     
     
         19 . A multilayered magnetic film as set forth in  claim 18 , characterized in that the following relations are satisfied: 
 40 Å≦WM≦90 Å, 5 Å≦WI≦25 Å   where WM represents the thickness of said magnetic layers, and WI represents the thickness of said insulating layers.    
     
     
         20 . A multilayered magnetic film as set forth in  claim 18 , characterized in that the following relations are satisfied: 
 40 Å≦WM≦90 Å, 7 Å≦WI≦25 Å   where WM represents the thickness of said magnetic layers, and WI represents the thickness of said insulating layers.    
     
     
         21 . A multilayerd magnetic film as set forth in  claim 18 , characterized in that the following relations are satisfied: 
 40 Å≦WM≦90 Å, 7 Å≦WI≦20 Å   where WM represents the thickness of said magnetic layers, and WI represents the thickness of said insulating layers.    
     
     
         22 . A multilayered magnetic film as set forth in  claim 18 , characterized in that the following relations are satisfied: 
 50 Å≦WM≦75 Å, 5 Å≦WI≦25 Å   where WM represents the thickness of the magnetic layers, and WI represents the thickness of the insulating layers.    
     
     
         23 . A multilayered magnetic film as set forth in  claim 18 , characterized in that the following relations are satisfied: 
 50 Å≦WM≦75 Å, 7 Å≦WI≦25 Å   where WM represents the thickness of the magnetic layers, and WI represents the thickness of the insulating layers.    
     
     
         24 . A multilayered magnetic film as set forth in  claim 18 , characterized in that the following relations are satisfied: 
 50 Å≦WM≦75 Å, 7 Å≦WI≦20 Å   where WM represents the thickness of the magnetic layers, and WI represents the thickness of the insulating layers.    
     
     
         25 . A magnetic component characterized in that at least one multilayered magnetic film stated in any one of  claims 12  to  24  is utilized.  
     
     
         26 . A magnetic component characterized in that said magnetic component includes a magnetic material composed of at least one granular magnetic thin film in which an insulating material is present around grain boundaries so as to enclose magnetic grains, and a resonant frequency of permeability is 2 GHz or over.  
     
     
         27 . A magnetic component characterized in that said magnetic component includes a magnetic material composed of at least one granular magnetic thin film in which an insulating material is present around grain boundaries so as to enclose magnetic grains, and that a thickness of said insulating material or a spacing between said magnetic grains is between 0.5 nm and 1.5 nm.  
     
     
         28 . A magnetic component characterized in that said magnetic component includes a magnetic material composed of at least one granular magnetic thin film in which an insulating material is present around grain boundaries so as to enclose magnetic grains, and said magnetic grains are grains of a nonoxidizable magnetic metal.  
     
     
         29 . A magnetic component characterized in that said magnetic component includes a magnetic material composed of at least one granular magnetic thin film in which an insulating material is present around grain boundaries so as to enclose magnetic grains, said magnetic grains being grains of a such magnetic metal that a spectral peak of an oxide thereof is not observable by a measurement of an X-ray photoelectron spectroscopy.  
     
     
         30 . A magnetic component as set forth in  claim 29 , characterized in that said magnetic grains contain at least one of Co and Fe.  
     
     
         31 . A magnetic component as set forth in  claim 29 , characterized in that said insulating material is composed of an oxide ceramic.  
     
     
         32 . A magnetic component as set forth in  claim 29 , characterized in that said insulating material is an amorphous.  
     
     
         33 . A magnetic component as set forth in  claim 29 , characterized in that a thickness of said insulating material or a spacing between said magnetic grains is between 0.5 nm and 1.5 nm.  
     
     
         34 . A magnetic component as set forth in any one of  claims 25  to  33 , characterized in that at least one oxidation preventive film is formed to prevent oxidation of the magnetic metal in said granular magnetic thin film or multilayered magnetic film.  
     
     
         35 . An electronic equipment characterized by the use of at least one magnetic component stated in any one of  claims 25  to  34 .

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