Polishing pads and manufacturing methods

Abstract

Disclosed is a method of manufacturing polymer materials having properties that are determined by selected process conditions. The properties can be modified for a variety of applications. Exemplary applications are pads for chemical mechanical planarization of substrates and pads for polishing substrates. One embodiment of the method includes the steps of providing a polymer sheet having a substrate contacting area, heating the area a sufficient amount, and applying a sufficient amount of mechanical pressure to the area during at least a portion of the heating step to achieve the desired properties for the material.

What is claimed is:  
     
         1 . A method of manufacturing a pad for polishing a substrate, the method comprising the steps of: 
 a) providing a polymer sheet having a substrate contacting area;    b) heating the area a sufficient amount; and    c) applying mechanical pressure greater than 1500 psi (10.3 megapascals) to the area during at least a portion of the heating step.    
     
     
         2 . The method of  claim 1  further comprising the steps of: 
 d) cooling the polymer sheet; and  
 e) providing a sufficient amount of mechanical pressure to the sheet during at least part of the cooling step.  
 
     
     
         3 . The method of  claim 1  wherein the polymer sheet comprises a thermoplastic polymer.  
     
     
         4 . The method of  claim 1  wherein the polymer sheet comprises a non-woven felt impregnated with a thermoplastic polymer.  
     
     
         5 . The method of  claim 3  wherein the step of heating the polymer sheet a sufficient amount comprises heating to temperatures greater than about 300 degrees F. (149 degrees C.).  
     
     
         6 . The method of  claim 4  wherein the step of heating the polymer sheet a sufficient amount comprises heating to temperatures greater than about 300 degrees F. (149 degrees C.).  
     
     
         7 . The method of  claim 3  wherein the step of heating the polymer sheet a sufficient amount comprises heating to temperatures in the range of about 300 degrees F. (149 degrees C.) to about 450 degrees F. (232 degrees C.).  
     
     
         8 . The method of  claim 4  wherein the step of heating the polymer sheet a sufficient amount comprises heating to temperatures in the range of about 300 degrees F. (149 degrees C.) to about 450 degrees F. (232 degrees C.).  
     
     
         9 . The method of  claim 4  wherein the thermoplastic polymer comprises polyurethane and the step of heating the polymer sheet a sufficient amount comprises heating to a temperature of about 400 degrees F. (204 degrees C.).  
     
     
         10 . The method of  claim 1  wherein step c comprises compressing the polymer sheet to a predetermined thickness.  
     
     
         11 . A method of manufacturing a pad for polishing a substrate, the method comprising the steps of: 
 providing a polymer sheet comprising a non-woven felt impregnated with a thermoplastic polymer, the sheet having a density less than about 0.7 grams per cubic centimeter, the sheet having a substrate contacting area;    heating the area a sufficient amount and contemporaneously applying a sufficient amount of mechanical pressure to the area so that the density of the sheet increases to greater than about 0.7 grams per cubic centimeter.    
     
     
         12 . The method of  claim 11  wherein the mechanical pressure compresses the polymer sheet to a predetermined thickness.  
     
     
         13 . The method of  claim 11  wherein the mechanical pressure compresses the polymer sheet to a density greater than about 0.9 grams per cubic centimeter.  
     
     
         14 . The method of  claim 11  wherein the mechanical pressure compresses the polymer sheet to a density of about 1 gram per cubic centimeter.  
     
     
         15 . A polymer composite comprising a non-woven felt of polymer fibers impregnated with a resin, the composite having a density greater than about 0.70 grams per cubic centimeter, the composite having a Shore D hardness of at least 50.  
     
     
         16 . The composite of  claim 15  wherein the resin comprises a polyurethane and the felt comprises polyester.  
     
     
         17 . The composite of  claim 15  wherein the density is about 1 gram per cubic centimeter.  
     
     
         18 . The composite of  claim 16  wherein the Shore D hardness is greater than about 60.  
     
     
         19 . A method of making a composite polymeric material, the method comprising the steps of: 
 providing a non-woven felt impregnated with a polymer resin;    applying heat to the felt and the resin at a temperature in the range of about 358 degrees Fahrenheit (181 degrees C.) to about 450 degrees Fahrenheit (232 degrees C.) and contemporaneously applying a mechanical pressure greater than about 2500 psi (17.2 megapascals);    cooling the felt and the resin; and    providing a sufficient amount of mechanical pressure to the felt and the resin during at least part of the cooling step so as to maintain a planar surface for the felt and the resin.    
     
     
         20 . The method of  claim 19  wherein the pressure is about 2900 psi (20 megapascals).