Simplified method to produce nanoporous silicon-based films

Abstract

An improved nanoporous dielectric film useful for the production of semiconductor devices, integrated circuits and the like, is provided, together with novel processes for producing these improved films. The improved films are produced by a process that includes (a) preparing a silicon-based, precursor composition including a porogen, (b) coating a substrate with the silicon-based precursor to form a film, (c) aging or condensing the film in the presence of water, (d) heating the gelled film at a temperature and for a duration effective to remove substantially all of said porogen, and wherein the applied precursor composition is substantially aged or condensed in the presence of water in liquid or vapor form, without the application of external heat or exposure to external catalyst.

What is claimed is:  
     
         1 . A method of producing a nanoporous silica dielectric film by a process comprising 
 (a) preparing a silicon-based, precursor composition comprising a porogen,    (b) coating a substrate with the silicon-based precursor to form a film,    (c) aging or condensing the film in the presence of water,    (d) heating the gelled film at a temperature and for a duration effective to remove substantially all of said porogen, and    wherein said precursor composition is substantially aged or condensed in the presence of water in liquid or vapor form, without the application of heat or exposure to external catalyst.    
     
     
         2 . The method of  claim 1  wherein the silicon-based precursor composition comprises water in a molar ratio of water to Si ranging from about 2:1 to about 0:1.  
     
     
         3 . The method of  claim 1  wherein the silicon-based precursor composition comprises a monomer or prepolymer of Formula I:  
       Rx—Si—Ly  (Formula I)  wherein x is an integer ranging from 0 to about 2, and y is an integer ranging from about 2 to about 4;    R is independently selected from the group consisting of alkyl, aryl, hydrogen and combinations thereof;    L is an electronegative moiety, independently selected from the group consisting of alkoxy, carboxy, amino, amido, halide, isocyanato and combinations thereof.    
     
     
         4 . The method of  claim 3  wherein the silicon-based precursor composition further comprises a polymer formed by condensing a monomer or prepolymer according to Formula I, wherein the number average molecular weight of said polymer ranges from about 150 to about 10,000 amu.  
     
     
         5 . The method of  claim 3  wherein the silicon-based precursor composition comprises a monomer or precursor that is selected from the group consisting of an acetoxysilane, an ethoxysilane, a methoxysilane, and combinations thereof.  
     
     
         6 . The method of  claim 5  wherein the silicon-based precursor composition comprises a monomer or precursor that is selected from the group consisting of tetraacetoxysilane, a C 1  to about C 6  alkyl or aryl-triacetoxysilane, and combinations thereof.  
     
     
         7 . The method of  claim 6  wherein said triacetoxysilane is methyltriacetoxysilane.  
     
     
         8 . The method of  claim 3  wherein the silicon-based precursor composition comprises a monomer or precursor that is selected from the group consisting of tetrakis(2,2,2-trifluoroethoxy)silane, tetrakis(trifluoroacetoxy)silane, tetraisocyanatosilane, tris(2,2,2-trifluoroethoxy)methylsilane, tris(trifluoroacetoxy)methylsilane, methyltriisocyanatosilane and combinations thereof.  
     
     
         9 . The method of  claim 1  wherein at least a portion of the water of step (c) is absorbed from atmospheric water vapor.  
     
     
         10 . The method of  claim 1  wherein all of the water of step (c) is absorbed from atmospheric water vapor.  
     
     
         11 . The method of  claim 9  wherein the atmospheric partial pressure of water vapor ranges from about 5 mm Hg to about 20 mm Hg,  
     
     
         12 . The method of  claim 9  wherein the film is exposed to atmospheric water vapor for a time period effective for aging the applied film.  
     
     
         13 . The method of  claim 12  wherein the film is exposed to atmospheric water vapor for a time period ranging from about 20 seconds to about 5 minutes.  
     
     
         14 . The process of  claim 1  further comprising a curing step conducted at a temperature and for a duration sufficient to render the thickness and density of the produced film stable for use in a semiconductor device.  
     
     
         15 . The process of  claim 1  wherein the porogen has a boiling point, sublimation point or decomposition temperature ranging from about 175° C. to about 450° C.  
     
     
         16 . The process of  claim 1  wherein heating step (d) comprises heating the film at a temperature ranging from about 175° C. to about 300° C., for a time period ranging from about 30 seconds to about 5 minutes, to remove substantially all porogen.  
     
     
         17 . The process of  claim 1  wherein the porogen is selected to covalently bond to a silicon component of the precursor composition, and remains covalently bonded thereto, until the heating of step (d).  
     
     
         18 . The process of  claim 1  wherein the porogen has a molecular weight ranging from about 100 to about 10,000 amu,  
     
     
         19 . The process of  claim 18  wherein the porogen has a molecular weight ranging from about 100 to about 3,000 amu,  
     
     
         20 . The process of  claim 1  wherein the porogen comprises a reagent comprising at least one reactive hydroxyl or amino functional group, and said reagent is selected from the group consisting of an organic compound, an organic polymer, an inorganic polymer and combinations thereof.  
     
     
         21 . The process of  claim 1  wherein the porogen is a compound selected from the group consisting of 1-adamantanol, 2-adamantanol, 1-adamantanamine, 4-(1-adamantyl)phenol, 4,4-(1,3-adamantanediyl)diphenol, a-D-cellobiose octaacetate, and cholesterol.  
     
     
         22 . The process of  claim 1  wherein the porogen is selected from the group consisting of a polyalkylene oxide, a monoether of a polyalkylene oxide, an aliphatic polyester, an acrylic polymer, an acetal polymer, a poly(caprolatactone), a poly(valeractone), a poly(methyl methacrylate), a poly (vinylbutyral) and combinations thereof.  
     
     
         23 . The process of  claim 22  wherein the polyalkylene oxide monoether comprises a C 1  to about C 6  alkyl chain between oxygen atoms and a C1 to about C6 alkyl ether moiety, and wherein the alkyl chain is substituted or unsubstituted.  
     
     
         24 . The process of  claim 23  wherein the polyalkylene oxide monoether is a polyethylene glycol monomethyl ether or polypropylene glycol monobutyl ether.  
     
     
         25 . The process of  claim 1  wherein the porogen is present in the composition in a ratio ranging from about 2 to about 20 weight percent.  
     
     
         26 . The process of  claim 1  wherein the silicon-based, precursor composition further comprises a solvent.  
     
     
         27 . The process of  claim 26  wherein the silicon-based, precursor composition comprises solvent in an amount ranging from about 10% to about 90% by weight.  
     
     
         28 . The process of  claim 26  wherein the solvent has a boiling point ranging from about 50 to about 175° C.  
     
     
         29 . The process of  claim 26  wherein the solvent is selected from the group consisting of hydrocarbons, esters, ethers, ketones, alcohols, amides and combinations thereof.  
     
     
         30 . The process of  claim 26  wherein the solvent is not an alcohol when the silicon based monomer or precursor comprises an acetoxy-functional group.  
     
     
         31 . The process of  claim 26  wherein the solvent does not comprise hydroxyl or amino groups.  
     
     
         32 . The process of  claim 26  wherein the solvent is selected from the group consisting of di-n-butyl ether, anisole, acetone, 3-pentanone, 2-heptanone, ethyl acetate, n-propyl acetate, n-butyl acetate, 2-propanol, dimethyl acetamide, propylene glycol methyl ether acetate, and/or combinations thereof.  
     
     
         33 . A nanoporous dielectric film produced on a substrate by the process of  claim 1 .  
     
     
         34 . A semiconductor device comprising a nanoporous dielectric film of  claim 33 .  
     
     
         35 . The semiconductor device of  claim 34  that is an integrated circuit.