Ceramic element, method for producing ceramic element, display device, relay device, and capacitor

Abstract

A ceramic element including a main actuator element 26 having an anti-ferroelectric film 22 and a pair of electrodes 24 a, 24 b formed on a first principal surface (front surface) of the anti-ferroelectric film 22, a vibrating section 18 for supporting the main actuator element 26, and a fixed section 20 for supporting the vibrating section 18 in a vibrating manner. The anti-ferroelectric film 22 after polarization has a region Zt in which its average dielectric constant is increased in an analog manner in accordance with a voltage V applied to the pair of electrodes 24 a, 24 b . Specifically, an expression of p/t≦ 2.5 is satisfied provided that an average film thickness of the anti-ferroelectric film 22 is t, and a pitch between the pair of electrodes 24 a, 24 b is p.

We claim:  
     
         1 . A display device comprising an optical waveguide plate for introducing light thereinto, and a driving unit provided opposingly to one plate surface of said optical waveguide plate and including a number of actuator elements arranged corresponding to a large number of picture elements, for displaying, on said optical waveguide plate, a picture image corresponding to an image signal by controlling leakage light at a predetermined portion of said optical waveguide plate by controlling displacement action of each of said actuator elements in a direction to make contact or separation with respect to said optical waveguide plate in accordance with an attribute of said image signal to be inputted, wherein said actuator element comprises: 
 a main actuator element having an anti-ferroelectric film and at least a pair of electrodes formed on said anti-ferroelectric film;    a vibrating section for supporting said main actuator element; and    a fixed section for vibratingly supporting said vibrating section;    said display device further comprising a displacement-transmitting section for transmitting, to said optical waveguide plate, said displacement action of said actuator element generated by applying a voltage to said pair of electrodes.