US2003059543A1PendingUtilityA1

Insulating paste composition for rib formation and method of rib pattern formation

Assignee: TOKYO OHKA KOGYO CO LTD A JAPAPriority: Mar 17, 1999Filed: Mar 8, 2002Published: Mar 27, 2003
Est. expiryMar 17, 2019(expired)· nominal 20-yr term from priority
G02F 1/13394H01J 2217/492H01J 9/242G03F 7/0047G03F 7/0007
37
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Claims

Abstract

An insulating paste composition for rib formation which comprises an insulating material, an organic binder, a light-absorbing substance, and an organic solvent. A rib pattern is formed by sandblasting an insulating layer formed of the composition using a lithographically formed resin pattern mask. The composition forms an antireflective insulating layer which can provide a rib pattern excellent in cross-sectional contour and dimensional precision.

Claims

exact text as granted — not AI-modified
What is claimed is:  
     
         1 . An insulating paste composition for rib formation which comprises an insulating material, an organic binder, a light-absorbing substance, and an organic solvent.  
     
     
         2 . The insulating paste composition for rib formation according to  claim 1 , which comprises 50 to 95% by weight of the insulating material, 0.5 to 15% by weight of the organic binder, 0.1 to 15% by weight of the light-absorbing substance, and 1 to 50% by weight of the organic solvent.  
     
     
         3 . The insulating paste composition for rib formation according to  claim 1 , wherein the light-absorbing substance is at least one selected from the group consisting of benzophenone dyes, azo dyes, polyene dyes, quinoline dyes, aminoketone dyes, anthraquinone dyes, benzotriazole dyes, and cyanoacrylate dyes.  
     
     
         4 . The insulating paste composition for rib formation according to  claim 1 , wherein the insulating material is at least one selected from the group consisting of Al 2 O 3 , PbO, B 2 O 3 , SiO 2 , ZnO, MgO, and SnO 2 .  
     
     
         5 . The insulating paste composition for rib formation according to  claim 4 , wherein the insulating material further comprises a low-melting glass powder having a softening point of approximately from 350 to 600° C.  
     
     
         6 . A method of forming a rib pattern comprising coating a substrate with an insulating paste composition which comprises an insulating material, an organic binder, a light-absorbing substance, and an organic solvent, drying the paste composition to form a rib-forming insulating layer, forming a resin pattern on the rib-forming insulating layer by use of a photosensitive resin composition, and etching the insulating layer by sandblasting using the resin pattern as a mask.  
     
     
         7 . The method of forming a rib pattern according to  claim 6 , wherein the insulating paste composition comprises 50 to 95% by weight of the insulating material, 0.5 to 15% by weight of the organic binder, 0.1 to 15% by weight of the light-absorbing substance, and 1 to 50% by weight of the organic solvent.  
     
     
         8 . The method of forming a rib pattern according to  claim 6 , wherein the light-absorbing substance is at least one selected from the group consisting of benzophenone dyes, azo dyes, polyene dyes, quinoline dyes, aminoketone dyes, anthraquinone dyes, benzotriazole dyes, and cyanoacrylate dyes.  
     
     
         9 . The method of forming a rib pattern according to  claim 6 , wherein the insulating material is at least one selected from the group consisting of Al 2 O 3 , PbO, B 2 O 3 , SiO 2 , ZnO, MgO, and SnO 2 .  
     
     
         10 . The method of forming a rib pattern according to  claim 9 , wherein the insulating material further comprises a low-melting glass powder having a softening point of approximately from 350 to 600° C.

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