Liquid-jet head, fabricating method of the same, and liquid-jet apparatus

Abstract

A liquid-jet head effective in prevention of imperfect eject such as occlusion of a nozzle, a method of fabricating the liquid-jet head, and a liquid-jet apparatus are provided. In a liquid-jet head having a passage-forming substrate on which a pressure-generating chamber communicating with a nozzle orifice is formed, a plurality of piezoelectric elements provided on one side of the passage-forming substrate via a vibration plate, each of the piezoelectric elements comprising a lower electrode, a piezoelectric layer and an upper electrode, the passage-forming substrate is provided with a communicating path communicating with one end in a longitudinal direction of the pressure-generating chamber so as to penetrate the passage-forming substrate. In addition, a penetrated portion for supplying a liquid to the communicating path is formed in a region of the vibration plate opposite to the communicating path by laser processing.

What is claimed is:  
     
         1 . A liquid-jet head including a passage-forming substrate on which a pressure-generating chamber communicating with a nozzle orifice is formed, and a plurality of piezoelectric elements provided on one side of the passage-forming substrate via a vibration plate, each of the piezoelectric elements comprising a lower electrode, a piezoelectric layer and an upper electrode, the liquid-jet head comprising: 
 a communicating path communicating with one end in a longitudinal direction of the pressure-generating chamber, the communicating path being provided in the passage-forming substrate so as to penetrate the passage-forming substrate; and    a penetrated portion for supplying a liquid to the communicating path, the penetrated portion being formed in a region of the vibration plate opposite to the communicating path by laser processing.    
     
     
         2 . The liquid-jet head according to  claim 1 , wherein dross in an amount within one-fourth of a diameter of the nozzle orifice is adhered to a peripheral portion of the penetrated portion.  
     
     
         3 . The liquid-jet head according to  claim 1 , wherein the penetrated portion is at least formed into any of a size as large as an open region of the communicating path on the vibration plate side and a size smaller than the open region.  
     
     
         4 . The liquid-jet head according to  claim 3 , wherein the penetrated portion is formed into a shape along an open edge of the communicating path.  
     
     
         5 . The liquid-jet head according to  claim 3 , wherein the penetrated portion is composed of a plurality of penetrated holes provided within the open region of the communicating path.  
     
     
         6 . The liquid-jet head according to  claim 1 , wherein a reservoir-forming plate including a reservoir portion communicating with the communicating path via the penetrated portion is bonded to the passage-forming substrate on a side where the piezoelectric element is provided.  
     
     
         7 . A liquid-jet apparatus comprising: 
 the liquid-jet head according to any one of  claims 1  to  6 .    
     
     
         8 . A method of fabricating a liquid-jet head including a passage-forming substrate on which a pressure-generating chamber communicating with a nozzle orifice is formed, a plurality of piezoelectric elements provided on one side of the passage-forming substrate via a vibration plate, each of the piezoelectric elements comprising a lower electrode, a piezoelectric layer and an upper electrode, the method comprising the steps of: 
 forming the vibration plate and the piezoelectric element on one side of the passage-forming substrate;    forming the pressure-generating chamber by patterning from another side of the passage-forming substrate and forming a communicating path to communicate with one end in a longitudinal direction of the pressure-generating chamber; and    forming a penetrated portion for supplying a liquid to the communicating path in a region of the vibration plate opposite to the communicating path by laser processing.    
     
     
         9 . The method of fabricating a liquid-jet head according to  claim 8 , wherein a laser beam is irradiated on the vibration plate in the step of forming a penetrated portion to effectuate processing such that dross in an amount within one-fourth of a diameter of the nozzle orifice is adhered.  
     
     
         10 . The method of fabricating a liquid-jet head according to any one of claims  8  and  9 , wherein a laser beam with a fundamental wavelength oscillated by a Q-switched YAG laser oscillator is irradiated on the vibration plate in the step of forming a penetrated portion.  
     
     
         11 . The method of fabricating a liquid-jet head according to any one of claims  8  and  9 , wherein a laser beam with a higher harmonic wavelength oscillated by a Q-switched YAG laser oscillator is irradiated on the vibration plate in the step of forming a penetrated portion.  
     
     
         12 . The method of fabricating a liquid-jet head according to any one of claims  8  and  9 , wherein a laser beam with a second harmonic wavelength oscillated by a Q-switched YAG laser oscillator is irradiated on the vibration plate in the step of forming a penetrated portion.  
     
     
         13 . The method of fabricating a liquid-jet head according to  claim 8 , wherein the laser processing is performed underwater.  
     
     
         14 . The method of fabricating a liquid-jet head according to  claim 8 , wherein the laser beam is irradiated on the vibration plate in a region corresponding to an open edge of the communicating path and the laser beam is scanned along the open edge of the communicating path in the step of forming a penetrated portion.  
     
     
         15 . The method of a liquid-jet head according to  claim 8 , wherein a plurality of penetrated holes are formed on at least the vibration plate in a region opposite to the communicating path in the step of forming a penetrated portion.  
     
     
         16 . The method of fabricating a liquid-jet head according to  claim 8 , before the step of forming the penetrated portion on the vibration plate, the method further comprising the step of: 
 bonding a reservoir-forming plate having a reservoir portion communicating with the communicating path via the pierced hole, to the passage-forming substrate on a side where the piezoelectric element is formed.