Electrochemical device

Abstract

The invention relates to an essentially metallic target of a cathodic sputtering device, in particular a magnetic-field-assisted device, the said target mainly comprising nickel alloyed with at least one other minor element in order to reduce or eliminate its ferromagnetism. The invention also relates to the use of the target to manufacture an electrochromic material with anodic colourization as a thin layer based on alloyed nickel oxide.

1 . Essentially metallic target of a cathodic sputtering device, in particular a magnetic-field-assisted device, the said target mainly comprising nickel, characterized in that the nickel is alloyed with at least one other minor element in order to reduce or eliminate its ferromagnetic nature.  
     
     
         2 . Target according to  claim 1 , characterized in that the proportion of the said element(s) in the alloy is not more than 20 atom %, in particular not more than 18%, preferably between 3% and 15%.  
     
     
         3 . Target according to either of the preceding claims, characterized in that the minor element is a metal whose oxide is an electrochromic material with anodic colourization.  
     
     
         4 . Target according to  claim 3 , characterized in that the minor element is chosen from Ir, Ru and Rh.  
     
     
         5 . Target according to one of the preceding claims, characterized in that the minor element is a metal whose oxide is an electrochromic material with cathodic colourization.  
     
     
         6 . Target according to  claim 5 , characterized in that the metal is chosen from Mo, W, Re, Sn, In and Bi.  
     
     
         7 . Target according to one of the preceding claims, characterized in that the minor element is a metal or an alkaline-earth metal or a semiconductor whose hydrated or hydroxylated oxide is a proton conductor.  
     
     
         8 . Target according to  claim 7 , characterized in that the minor element is chosen from Ta, Zn, Zr, Al, Si, Sb, U, Be, Mg, Ca and Y.  
     
     
         9 . Target according to one of the preceding claims, characterized in that the minor element is an element whose oxide is hygroscopic, of the alkali metal type.  
     
     
         10 . Target according to  claim 9 , characterized in that the element whose oxide is hygroscopic is chosen from Li, Na, K, Rb and Cs.  
     
     
         11 . Target according to one of the preceding claims, characterized in that it is made of an Ni/Si, Ni/Al, Ni/Sn, Ni/W, Ni/Zn, Ni/Ta or Ni/Y alloy.  
     
     
         12 . Process for manufacturing a thin layer based on alloyed nickel oxide, which is optionally hydrated/hydroxylated or protonated and/or nitride-treated, by magnetic-field-assisted cathodic sputtering in an oxidizing reactive atmosphere, characterized in that it uses the target according to one of the preceding claims.  
     
     
         13 . Use of the process according to  claim 12  to manufacture an electrochromic material with anodic colourization as a thin layer based on alloyed nickel oxide, which is optionally hydrated/hydroxylated and/or protonated and/or nitride-treated.  
     
     
         14 . Electrochemical device comprising at least one carrier substrate fitted with a stack of functional layers including at least one electrochemically active layer, which are capable of reversibly and simultaneously inserting ions such as H + , Li +  and OH −  and electrons, characterized in that the said electrochemically active layer is based on alloyed nickel oxide obtained by the process according to  claim 12  and/or from the target according to one of  claims 1  to  11 .  
     
     
         15 . Electrochemical device according to  claim 14 , characterized in that the alloyed nickel oxide is in mainly amorphous form, with crystal grains preferably having a diameter of not more than 50 nm.  
     
     
         16 . Electrochemical device comprising at least one carrier substrate fitted with a stack of functional layers including at least one active electrochemical layer, which is capable of reversibly and simultaneously inserting ions such as H + , OH −  and Li +  and electrons, characterized in that the said layer is based on nickel oxide, which is optionally hydrated and/or hydroxylated and/or protonated and/or nitride-treated, alloyed with at least one minor element in the form of a metal whose oxide is an anodic electrochromic material, chosen in particular from at least one of the following metals: Ir, Ru, Rh.  
     
     
         17 . Electrochemical device comprising at least one carrier substrate fitted with a stack of functional layers including at least one electrochemically active layer, which is capable of reversibly and simultaneously inserting ions such as H + , OH −  and Li +  and electrons, characterized in that the said layer is based on nickel oxide, which is optionally hydrated and/or hydroxylated and/or protonated and/or nitride-treated, alloyed with at least one minor element in the form of a metal whose oxide is a cathodic electrochromic material, chosen in particular from at least one of the following metals: Mo, W, Re, Sn, In, Bi.  
     
     
         18 . Electrochemical device comprising at least one carrier substrate fitted with a stack of functional layers including at least one electrochemically active layer, which is capable of reversibly and simultaneously inserting ions such as H + , OH −  and Li +  and electrons, characterized in that the said electrochemically active layer is based on nickel oxide, which is optionally hydrated and/or hydroxylated and/or protonated and/or nitride-treated, alloyed with at least one minor element in the form of a metal or an alkaline-earth metal or a semiconductor whose hydrated and/or hydroxylated oxide is a proton conductor, chosen in particular from at least one of the following elements: Ta, Zn, Zr, Al, Si, Sb, U, Be, Mg, Ca, Y.  
     
     
         19 . Electrochemical device comprising at least one carrier substrate fitted with a stack of functional layers including at least one electrochemically active layer, which is capable of reversibly and simultaneously inserting ions such as H + , OH −  and Li +  and electrons, characterized in that the said electrochemically active layer is based on nickel oxide, which is optionally hydrated and/or hydroxylated and/or nitride-treated, alloyed with at least one element whose oxide is hygroscopic, of the alkali metal type, chosen in particular from at least one of the following metals: Li, Na, K, Rb, Cs.  
     
     
         20 . Electrochemical device according to either of claims  17  and  18 , characterized in that the layer based on nickel oxide is in the form NiSi x O y , NiAl x O y , NiSn x O y , NiW x O y , NiZn x O y , NiTa x O y  or NiY x O y .  
     
     
         21 . Use of the electrochemical device according to one of  claims 14  to  20  to form a part of electrochromic glazing, in particular for buildings or means of locomotion such as trains, aeroplanes or cars, to form a part of display screens or to form a part of electrochromic mirrors such as rear-view mirrors of vehicles.