Datum plate for use in installations of substrate handling systems

Abstract

A datum plate is provided for use in installations of substrate handling systems. The datum plate has a set of predetermined attachment locations adapted to couple the datum plate to a chamber; a set of predetermined attachment locations adapted to couple one or more automatic door opener platforms to the datum plate; and a set of predetermined attachment locations adapted to couple one or more substrate handlers contained within the chamber, to the datum plate. The attachment locations are positioned such that when the datum plate is coupled to the chamber, and the automatic door opener platform and the substrate handler are coupled to the datum plate, the substrate handler and automatic door opener platform are aligned for substrate transfer therebetween. Other apparatuses such as substrate storage locations, automation modules, substrate carrier handlers and/or shelves for storing substrate carriers may also be coupled to the datum plate, via sets of predetermined attachment locations. A substrate handling system that employs the datum plate, and a method for installing the substrate handling system are also provided. In one aspect the inventive datum plate may be coupled to a supporting frame rather than to a chamber. Numerous other aspects are provided.

The invention claimed is:  
     
         1 . A datum plate comprising: 
 a set of predetermined attachment locations adapted to couple the datum plate to a chamber;    a set of predetermined attachment locations adapted to couple one or more automatic door opener platforms to the datum plate; and    a set of predetermined attachment locations adapted to couple one or more substrate handlers contained within the chamber, to the datum plate;    wherein the attachment locations are positioned such that when the datum plate is coupled to the chamber, and the automatic door opener platform, and the substrate handler are coupled to the datum plate, the substrate handler and automatic door opener platform are aligned for substrate transfer therebetween.    
     
     
         2 . The datum plate of  claim 1  wherein the attachment locations comprise predrilled holes.  
     
     
         3 . The datum plate of  claim 1  further comprising: 
 a set of predetermined attachment locations adapted to couple an automation module to the datum plate.  
 
     
     
         4 . The apparatus of  claim 3  wherein the automation module comprises a substrate orienter.  
     
     
         5 . The apparatus of  claim 3  wherein the automation module comprises a substrate centerfinder.  
     
     
         6 . The apparatus of  claim 3  wherein the automation module comprises an ID reader.  
     
     
         7 . The apparatus of  claim 3  wherein the automation module comprises a metrology/inspection station.  
     
     
         8 . The apparatus of  claim 3  further comprising a set of predetermined attachment locations adapted to couple a substrate storage location to the datum plate.  
     
     
         9 . The apparatus of  claim 8  wherein the substrate storage location is for storage within the chamber.  
     
     
         10 . The apparatus of  claim 1  further comprising a set of predetermined attachment locations adapted to couple a substrate storage location to the datum plate.  
     
     
         11 . The apparatus of  claim 10  wherein the attachment locations are positioned such that when the datum plate is coupled to the chamber, and the substrate handler and storage location are coupled to the datum plate, the substrate handler and storage location are aligned for substrate transfer therebetween.  
     
     
         12 . The apparatus of  claim 1  further comprising a set of predetermined attachment locations adapted to couple a support frame, having one or more substrate carrier storage shelves, adjacent the platform.  
     
     
         13 . The apparatus of  claim 1  further comprising a set of predetermined attachment locations adapted to couple a support frame, having one or more substrate carrier storage shelves and a substrate carrier handler coupled thereto, adjacent the platform; 
 wherein the attachment locations are positioned such that when the datum plate is coupled to the chamber, and the platform and support frame are coupled to the datum plate, the substrate carrier handler, the platform, and the storage shelves are aligned for substrate carrier transfer therebetween.  
 
     
     
         14 . A substrate handling system, comprising: 
 a support frame;    a datum plate having a set of attachment mechanisms for fixing the relative X, Y and Z positions of the datum plate and an apparatus coupled to the datum plate, the datum plate being coupled to the support frame via the set of attachment mechanisms;    a substrate handler coupled to the datum plate via the set of attachment mechanisms; and    at least one automatic door opener platform coupled to the datum plate via the set of attachment mechanisms.    
     
     
         15 . The system of  claim 14  wherein the support frame is a chamber.  
     
     
         16 . The system of  claim 14  further comprising an additional support frame coupled to the datum plate via the set of attachment mechanisms; and wherein the additional support frame comprises a substrate carrier handler adapted to transport substrate carriers between a plurality of the automatic door opener platforms coupled to the datum plate.  
     
     
         17 . The system of  claim 16  further comprising at least one substrate carrier storage shelf coupled to the additional support frame.  
     
     
         18 . The system of  claim 14  wherein the support frame further comprises adjustable leveling feet.  
     
     
         19 . The system of  claim 18  wherein the datum plate further comprises a level finder attached thereto.  
     
     
         20 . The system of  claim 14  further comprising at least one substrate storage location coupled to the datum plate via the set of attachment mechanisms.  
     
     
         21 . The system of  claim 14  further comprising an automation module coupled to the datum plate via the set of attachment mechanisms.  
     
     
         22 . A method of installing substrate handling equipment comprising: 
 providing a support frame;    coupling a datum plate to the support frame;    coupling a substrate handler to predetermined mounting locations on the datum plate; and    coupling at least one automatic door opener platform to predetermined mounting locations on the datum plate.    
     
     
         23 . The method of  claim 22  further comprising adjusting the level of the datum plate by adjusting leveling feet coupled to the support frame.  
     
     
         24 . The method of  claim 22  further comprising coupling an additional support frame to predetermined mounting locations on the datum plate, the additional support frame having a substrate carrier handler coupled thereto and adapted to transport substrate carriers between a plurality of the automatic door opener platforms.  
     
     
         25 . The method of  claim 24  further comprising coupling at least one substrate carrier support shelf to the additional frame.  
     
     
         26 . The method of  claim 22  further comprising coupling at least one substrate storage location to predetermined mounting locations on the datum plate.  
     
     
         27 . The method of  claim 22  further comprising coupling an automation module to predetermined mounting locations on the datum plate.  
     
     
         28 . The system of  claim 16  wherein the additional support frame further comprises adjustable leveling feet.