Vacuum pump

Abstract

To provide a vacuum pump in which destruction of a rotational body due to corrosion can be prevented, and in which deposition of product is reduced, preventing damage due to contact between the rotational body and a fixed side. The pump case having the gas inlet port opened on its upper surface, the rotor shaft supported within the pump case such that it is capable of rotating, the plurality of the rotor blades formed in the outer circumferential surface of the rotor that is fixed to the rotor shaft, the plurality of the stator blades fixed within the pump case, positioned alternately with the plurality of the rotor blades, and the driving motor for rotating the rotor shaft are provided. The corrosion preventing film layer is formed on the inner circumferential surface and the outer circumferential surface of the rotor, and the balancing holes are formed by removing a portion of the inner circumferential surface or the outer circumferential surface of the rotor, and the thermosetting resin film layer is formed on the surface of the balancing holes as an anti-corrosion process.

What is claimed is:  
     
         1 . A vacuum pump comprising: 
 a pump case having a gas inlet port opened in its top surface;    a rotor shaft rotatably supported within the pump case;    a plurality of rotor blades formed on an outer circumferential surface of a rotor that is fixed to the rotor shaft and housed within the pump case;    a plurality of stator blades fixed within the pump case and positioned alternately with the plurality of rotor blades;    a driving motor for rotating the rotor shaft;    an anti-corrosive film layer formed on a surface of the rotor; and    a balancing hole formed by partially cutting off an inner circumferential surface or an outer circumferential surface of the rotor, and performed anti-corrosion process.    
     
     
         2 . A vacuum pump according to  claim 1 , wherein the anti-corrosion process comprises forming a thermosetting resin film layer on a surface of the balancing hole.  
     
     
         3 . A vacuum pump comprising: 
 a pump case having a gas inlet port opened in its top surface;    a rotor shaft rotatably supported within the pump case;    a plurality of rotor blades formed on an outer circumferential surface of a rotor that is fixed to the rotor shaft and housed within the pump case;    a plurality of stator blades fixed within the pump case and positioned alternately with the plurality of rotor blades;    a driving motor for rotating the rotor shaft;    a balancing hole formed by partially cutting off an inner circumferential surface or an outer circumferential surface of the rotor; and    an anti-corrosive film layer formed on a surface of the rotor.