Charge amount measurement method, shift value measurement method of charged beam, charge amount measuring device and shift value measuring device of charged beam

Abstract

A charge amount measurement method comprises: interposing a measurement subject between a first substance and a second substance having a through hole; measuring a first collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is no potential difference between the first substance and the second substance, measuring a second collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is a potential difference between the first substance and the second substance, and measuring a charge amount of the measurement subject based on a difference between the measured first collision position and the measured second collision position.

What is claimed is:  
     
         1 . A charge amount measurement method comprising: 
 interposing a measurement subject between a first substance and a second substance having a through hole;    measuring a first collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is no potential difference between the first substance and the second substance;    measuring a second collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is a potential difference between the first substance and the second substance; and    measuring a charge amount of the measurement subject based on a difference between the measured first collision position and the measured second collision position.    
     
     
         2 . The charge amount measurement method according to  claim 1 , wherein in the measurement of the second collision position, a potential of the first substance is made higher than a potential of the second substance, and the charged beam passes though the through hole substantially in parallel with a direction of an electric field generated between the first substance and the second substance.  
     
     
         3 . A charge amount measurement method comprising: 
 interposing a measurement subject between a first substance and a second substance having a through hole;    measuring a collision position where a charged beam passed through the through hole and vicinity of the measurement subject collides against the first substance, in a state that there is a potential difference between the first substance and the second substance; and    measuring a charge amount of the measurement subject based on the measured collision position.    
     
     
         4 . A charge amount measurement method comprising: measuring a charge amount of a charged substance based on a shift value of the charged beam when a charged beam is passed through a vicinity of the charged substance.  
     
     
         5 . A shift value measurement method of charged beam comprising: 
 disposing a sample between two electrodes having a potential difference;    emitting a charged beam to travel through vicinity of a sample after passing through one of the electrodes, and to collide against the other electrode; and    measuring a collision position of the charged beam on the other electrode.    
     
     
         6 . A charge amount measuring device comprising: 
 a container capable of exhausting internal gas thereof;    a beam emission part which emits a charged beam into the container;    a first electrode disposed in a position where the charged beam emitted from the beam emission part collides;    a second electrode disposed between the beam emission part and the first electrode, the second electrode being capable of being set lower in potential than the first electrode;    a first measurement part which measures a position where the charge beam collides against the first electrode; and    a second measurement part which measures a charge amount of a measurement subject disposed between the first electrode and the second electrode, based on the measured position.    
     
     
         7 . A charge amount measuring device comprising: 
 a container capable of exhausting internal gas thereof;    a first electrode and a second electrode disposed in the container, the second electrode being capable of being set lower in potential than the first electrode;    a beam emission part which emits a charged beam passing through between the first electrode and the second electrode;    an glass plate with fluorescent material against which the charged beam collides;    a first measurement part which measures a collision position where the charge beam collides against the glass plate with fluorescent material; and    a second measurement part which measures a charge amount of a charged substance disposed between the first electrode and the second electrode, based on the collision position.    
     
     
         8 . The charge amount measuring device according to  claim 7 , further comprising a magnetic field generation part which generates a magnetic field in at least a part of a region through which the charged beam passes.  
     
     
         9 . A shift value measuring device of charged beam for measuring a shift value of a charged beam, the charged beam passing through vicinity of a sample disposed between two electrodes, at least one of the two electrodes having a through hole, the shift value measuring device of charged beam comprising: 
 a container to house the sample, the container being capable of exhausting internal gas thereof;    a beam emission part which emits the charged beam so as to make the charged beam pass through the through hole formed through one of the two electrodes and collide against the other of the two electrodes; and    a measurement part which measures a position on the other electrode where the charge beam collides against the other electrode.    
     
     
         10 . The shift value measuring device of charged beam according to  claim 9 , further comprising: 
 a second beam emission part to emit a charged beam passing through a vicinity of the sample and between the two electrodes;    an glass plate with fluorescent material against which the charged beam collides; and    a second measurement part to measure a position where the charged beam collides against the glass plate with fluorescent material.    
     
     
         11 . The shift value measuring device of charged beam according to  claim 6 , wherein the first measurement part comprises a CCD camera.  
     
     
         12 . The shift value measuring device of charged beam according to  claim 6 , wherein the second electrode is a metal plate to which a slit is formed.  
     
     
         13 . The shift value measuring device of charged beam according to  claim 6 , wherein the second electrode is a metal plate to which perpendicular linear slits to each other are formed.  
     
     
         14 . The shift value measuring device of charged beam according to  claim 6 , wherein the first electrode comprises a transparent electrode film.  
     
     
         15 . The shift value measuring device of charged beam according to  claim 6 , wherein the measurement subject is a glass.  
     
     
         16 . The shift value measuring device of charged beam according to  claim 6 , further comprising a turbo molecular pump which exhausts the gas in the container.