Semiconductor device having an improved multi-layer interconnection structure and manufacturing method thereof

Abstract

A semiconductor device, having a multi-layer interconnection structure, is provided which comprises a semiconductor substrate and a plurality of interlayer insulating films formed on the semiconductor substrate. A plurality of conductive leads are formed in the interlayer insulating films. In one of the interlayer insulating films having conductive lead or leads, at least one conductive plug is formed vertically to connect the conductive leads in different interlayer insulating films. Further, adjacent conductive leads may be formed in an adjacent interlayer insulating films are connected together to form a unified conductive lead.

1 . A semiconductor device having a multi-layer interconnection structure, said semiconductor device comprising: 
 a semiconductor substrate;    a plurality of interlayer insulating films formed on the semiconductor substrate;    a plurality of conductive leads formed in the interlayer insulating films; and    at least one conductive plug formed in at least one of the interlayer insulating films having at least one conductive lead, said conductive plug connecting at least a pair of conductive leads in the different interlayer insulating films.    
     
     
         2 . The semiconductor device having a multi-layer interconnection structure according to  claim 1 , further comprising: 
 a dielectric film formed between the adjacent interlayer insulating films, the dielectric film having an etching selectivity against the interlayer insulating films.    
     
     
         3 . A semiconductor device having a multi-layer interconnection structure, said semiconductor device comprising: 
 a semiconductor substrate;    a plurality of interlayer insulating films formed on the semiconductor substrate; and    a plurality of conductive leads formed in the interlayer insulating films;    wherein at least a pair of adjacent conductive leads formed in an adjacent interlayer insulating films are connected together to form a unified thick conductive lead.    
     
     
         4 . The semiconductor device having a multi-layer interconnection structure according to  claim 3 , further comprising: 
 a dielectric film formed between the adjacent interlayer insulating films, the dielectric film having an etching selectivity against the interlayer insulating films.    
     
     
         5 . A semiconductor device having a multi-layer interconnection structure, said semiconductor device comprising: 
 a semiconductor substrate;    a plurality of interlayer insulating films formed on the semiconductor substrate;    at least a dielectric film formed between the adjacent interlayer insulating films;    a plurality of conductive leads formed in the interlayer insulating films; and    at least a pair of conductive leads formed in the interlayer insulating films adjacent to the dielectric film; said pair of conductive leads being formed at opposite positions to form a capacity element.