Piezoelectric/electrostrictive device

Abstract

A piezoelectric/electrostrictive device including a driving portion, a movable portion, and a fixing portion for holding the driving portion and the movable portion, the fixing portion and the movable portion being coupled via the driving portion along a length direction of the device. It is preferred that the driving portion, the movable portion and the fixing portion are made of electrically insulating materials. The driving portion is composed of a mutually opposed pair of thin plate portions and at least first and second piezoelectric/electrostrictive elements. Each of the piezoelectric/electrostrictive elements includes an operating portion having a width that is substantially the same as the width of each respective thin plate portion.

1 . A piezoelectric/electrostrictive device comprising a driving portion to be driven by displacement of a piezoelectric/electrostrictive element, a movable portion to be operated by driving said driving portion, and a fixing portion for holding said driving portion and said movable portion, said fixing portion and said movable portion being coupled via said driving portion along a length direction of said device, and a hole formed by inner walls of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion, 
 said piezoelectric/electrostrictive device being characterized in that said driving portion is composed of a mutually opposed pair of thin plate portions and at least first and second piezoelectric/electrostrictive elements each comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film;    wherein one end of said first piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said end are positioned on the fixing portion and extend in said length direction to a least a part of a first one of the thin plate portions such that an opposite end of said piezoelectric/electrostrictive operating portion of said first piezoelectric/electrostrictive element is positioned on said first thin plate portion;    wherein one end of said second piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said end are positioned on the movable portion and extend in said length direction to at least a part of the second one of said thin plate portions such that an opposite end of said piezoelectric/electrostrictive operating portion of said second piezoelectric/electrostrictive element is positioned on said second thin plate portion; and    wherein the width of each piezoelectric/electrostrictive operating portion is substantially the same as the width of each respective thin plate portion.    
     
     
         2 . A piezoelectric/electrostrictive device according to  claim 1 , further comprising, on an outer surface of at least one of the thin plate portions, a third piezoelectric/electrostrictive element comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film, at least one end of the third piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said at least one end are arranged on the movable portion or the fixing portion and extend to at least a part of the first or second thin plate portions, respectively, and an opposite end of said piezoelectric/electrostrictive operating portion of said third piezoelectric/electrostrictive element is arranged on the first or second thin plate portions, respectively, such that said third piezoelectric/electrostrictive element is mutually opposed to one of the first and second piezoelectric/electrostrictive elements in a diagonal direction across said hole.  
     
     
         3 . A piezoelectric/electrostrictive device according to  claim 2 , wherein said third piezoelectric/electrostrictive element is formed on said first thin plate portion.  
     
     
         4 . A piezoelectric/electrostrictive device according to  claim 2 , wherein said opposite ends of the piezoelectric/electrostrictive operating portions of any two piezoelectric/electrostrictive elements provided mutually opposed on the outer surface of the same thin plate portion are arranged at positions not to exceed one half of the length of the respective thin plate portion.  
     
     
         5 . A piezoelectric/electrostrictive device according to  claim 3 , wherein said opposite ends of the piezoelectric/electrostrictive operating portions of any two piezoelectric/electrostrictive elements provided mutually opposed on the outer surface of the same thin plate portion are arranged at positions not to exceed one half of the length of the respective thin plate portion.  
     
     
         6 . A piezoelectric/electrostrictive device according to  claim 2 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion share a piezoelectric/electrostrictive film.  
     
     
         7 . A piezoelectric/electrostrictive device according to  claim 3 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion share a piezoelectric/electrostrictive film.  
     
     
         8 . A piezoelectric/electrostrictive device according to  claim 2 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have the same function.  
     
     
         9 . A piezoelectric/electrostrictive device according to  claim 3 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have the same function.  
     
     
         10 . A piezoelectric/electrostrictive device according to  claim 2 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have different functions.  
     
     
         11 . A piezoelectric/electrostrictive device according to  claim 1 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have the same function.  
     
     
         12 . A piezoelectric/electrostrictive device according to  claim 2 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have the same function.  
     
     
         13 . A piezoelectric/electrostrictive device according to  claim 3 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have the same function.  
     
     
         14 . A piezoelectric/electrostrictive device according to  claim 1 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have mutually different functions.  
     
     
         15 . A piezoelectric/electrostrictive device according to  claim 2 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have mutually different functions.  
     
     
         16 . A piezoelectric/electrostrictive device according to  claim 3 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have mutually different functions.  
     
     
         17 . A piezoelectric/electrostrictive device according to  claim 1 , wherein at least one of said piezoelectric/electrostrictive elements has a multi-layered piezoelectric/electrostrictive operating portion.  
     
     
         18 . A piezoelectric/electrostrictive device according to  claim 2 , wherein at least one of said piezoelectric/electrostrictive elements has a multi-layered piezoelectric/electrostrictive operating portion.  
     
     
         19 . A piezoelectric/electrostrictive device according to  claim 3 , wherein at least one of said piezoelectric/electrostrictive elements has a multi-layered piezoelectric/electrostrictive operating portion.  
     
     
         20 . A piezoelectric/electrostrictive device according to  claim 2 , wherein said third piezoelectric/electrostrictive element is formed on said second thin plate portion.  
     
     
         21 . A piezoelectric/electrostrictive device according to  claim 3 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have different functions.  
     
     
         22 . A piezoelectric/electrostrictive device according to  claim 3 , further comprising, on an outer surface of said second thin plate portion, a fourth piezoelectric/electrostrictive element comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film, one end of said fourth piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said one end are arranged on the fixing portion and extend to at least a part of said second thin plate portion, and an opposite end of said piezoelectric/electrostrictive operating portion of said fourth piezoelectric/electrostrictive element is arranged on said second thin plate portion, such that said fourth piezoelectric/electrostrictive element is mutually opposed to said third piezoelectric/electrostrictive element in a diagonal direction across said hole.  
     
     
         23 . A piezoelectric/electrostrictive device according to  claim 20 , further comprising, on an outer surface of said first thin plate portion, a fourth piezoelectric/electrostrictive element comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film, one end of said fourth piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said one end are arranged on the movable portion and extend to at least a part of said first thin plate portion, and an opposite end of said piezoelectric/electrostrictive operating portion of said fourth piezoelectric/electrostrictive element is arranged on said first thin plate portion, such that said fourth piezoelectric/electrostrictive element is mutually opposed to said third piezoelectric/electrostrictive element in a diagonal direction across said hole.  
     
     
         24 . A piezoelectric/electrostrictive device comprising a driving portion to be driven by displacement of a piezoelectric/electrostrictive element, a movable portion to be operated by driving said driving portion, and a fixing portion for holding said driving portion and said movable portion, said fixing portion and said movable portion being coupled via said driving portion along a length direction of said device, and a hole formed by inner walls of the driving portion, an inner wall of the movable portion, and an inner wall of the fixing portion, 
 said piezoelectric/electrostrictive device being characterized in that said driving portion is composed of a mutually opposed pair of thin plate portions and at least first and second piezoelectric/electrostrictive elements each comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film;    wherein one end of said first piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said end are positioned on the fixing portion and extend in said length direction to a least a part of a first one of the thin plate portions such that an opposite end of said piezoelectric/electrostrictive operating portion of said first piezoelectric/electrostrictive element is positioned on said first thin plate portion;    wherein one end of said second piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said end are positioned on the movable portion and extend in said length direction to at least a part of the second one of said thin plate portions such that an opposite end of said piezoelectric/electrostrictive operating portion of said second piezoelectric/electrostrictive element is positioned on said second thin plate portion; and    wherein said driving portion, said movable portion and said fixing portion comprise electrically insulating materials.    
     
     
         25 . A piezoelectric/electrostrictive device according to  claim 24 , further comprising, on an outer surface of at least one of the thin plate portions, a third piezoelectric/electrostrictive element comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film, at least one end of the third piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said at least one end are arranged on the movable portion or the fixing portion and extend to at least a part of the first or second thin plate portions, respectively, and an opposite end of said piezoelectric/electrostrictive operating portion of said third piezoelectric/electrostrictive element is arranged on the first or second thin plate portions, respectively, such that said third piezoelectric/electrostrictive element is mutually opposed to one of the first and second piezoelectric/electrostrictive elements in a diagonal direction across said hole.  
     
     
         26 . A piezoelectric/electrostrictive device according to  claim 25 , wherein said third piezoelectric/electrostrictive element is formed on said first thin plate portion.  
     
     
         27 . A piezoelectric/electrostrictive device according to  claim 25 , wherein said opposite ends of the piezoelectric/electrostrictive operating portions of any two piezoelectric/electrostrictive elements provided mutually opposed on the outer surface of the same thin plate portion are arranged at positions not to exceed one half of the length of the respective thin plate portion.  
     
     
         28 . A piezoelectric/electrostrictive device according to  claim 26 , wherein said opposite ends of the piezoelectric/electrostrictive operating portions of any two piezoelectric/electrostrictive elements provided mutually opposed on the outer surface of the same thin plate portion are arranged at positions not to exceed one half of the length of the respective thin plate portion.  
     
     
         29 . A piezoelectric/electrostrictive device according to  claim 25 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion share a piezoelectric/electrostrictive film.  
     
     
         30 . A piezoelectric/electrostrictive device according to  claim 26 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion share a piezoelectric/electrostrictive film.  
     
     
         31 . A piezoelectric/electrostrictive device according to  claim 25 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have the same function.  
     
     
         32 . A piezoelectric/electrostrictive device according to  claim 26 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have the same function.  
     
     
         33 . A piezoelectric/electrostrictive device according to  claim 25 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have different functions.  
     
     
         34 . A piezoelectric/electrostrictive device according to  claim 24 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have the same function.  
     
     
         35 . A piezoelectric/electrostrictive device according to  claim 25 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have the same function.  
     
     
         36 . A piezoelectric/electrostrictive device according to  claim 26 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have the same function.  
     
     
         37 . A piezoelectric/electrostrictive device according to  claim 24 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have mutually different functions.  
     
     
         38 . A piezoelectric/electrostrictive device according to  claim 25 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have mutually different functions.  
     
     
         39 . A piezoelectric/electrostrictive device according to  claim 26 , wherein piezoelectric/electrostrictive elements existing in mutually diagonal directions across said hole have mutually different functions.  
     
     
         40 . A piezoelectric/electrostrictive device according to  claim 24 , wherein at least one of said piezoelectric/electrostrictive elements has a multi-layered piezoelectric/electrostrictive operating portion.  
     
     
         41 . A piezoelectric/electrostrictive device according to  claim 25 , wherein at least one of said piezoelectric/electrostrictive elements has a multi-layered piezoelectric/electrostrictive operating portion.  
     
     
         42 . A piezoelectric/electrostrictive device according to  claim 26 , wherein at least one of said piezoelectric/electrostrictive elements has a multi-layered piezoelectric/electrostrictive operating portion.  
     
     
         43 . A piezoelectric/electrostrictive device according to  claim 25 , wherein said third piezoelectric/electrostrictive element is formed on said second thin plate portion.  
     
     
         44 . A piezoelectric/electrostrictive device according to  claim 26 , wherein two of the piezoelectric/electrostrictive elements that are provided mutually opposed on the outer surface of the same thin plate portion have different functions.  
     
     
         45 . A piezoelectric/electrostrictive device according to  claim 26 , further comprising, on an outer surface of said second thin plate portion, a fourth piezoelectric/electrostrictive element comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film, one end of said fourth piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said one end are arranged on the fixing portion and extend to at least a part of said second thin plate portion, and an opposite end of said piezoelectric/electrostrictive operating portion of said fourth piezoelectric/electrostrictive element is arranged on said second thin plate portion, such that said fourth piezoelectric/electrostrictive element is mutually opposed to said third piezoelectric/electrostrictive element in a diagonal direction across said hole.  
     
     
         46 . A piezoelectric/electrostrictive device according to  claim 43 , further comprising, on an outer surface of said first thin plate portion, a fourth piezoelectric/electrostrictive element comprising one or more pairs of electrodes and a piezoelectric/electrostrictive film, one end of said fourth piezoelectric/electrostrictive element and a piezoelectric/electrostrictive operating portion thereof at said one end are arranged on the movable portion and extend to at least a part of said first thin plate portion, and an opposite end of said piezoelectric/electrostrictive operating portion of said fourth piezoelectric/electrostrictive element is arranged on said first thin plate portion, such that said fourth piezoelectric/electrostrictive element is mutually opposed to said third piezoelectric/electrostrictive element in a diagonal direction across said hole.