Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring

Abstract

A number of micromachined optomechanical switching cells and matrix switches including such switching cells are disclosed herein. One optomechanical switching cell of the present invention includes a parallel plate actuator positioned on a substrate. A mirror coupled to the actuator is disposed to selectively redirect an incident optical beam. The present invention also contemplates an optomechanical matrix switch including a substrate and a plurality of optomechanical switching cells coupled thereto. The matrix switch further includes an arrangement for monitoring the optical power incident upon, and output by, the matrix switch.

What is claimed is:  
     
         1 . An optomechanical switching cell, comprising: 
 a parallel plate actuator positioned on a substrate; and    a mirror coupled to said actuator.    
     
     
         2 . An optomechanical matrix switch including both a first optomechanical switching cell and a second optomechanical switching cell according to  claim 1 .  
     
     
         3 . An optomechanical matrix switch, comprising: 
 a substrate;    a plurality of optomechanical switching cells coupled to said substrate, each of said plurality of optomechanical switching cells including a mirror and an actuator; and    means, disposed upon the substrate, for monitoring the optical power incident upon the matrix switch.    
     
     
         4 . The optomechanical matrix switch of  claim 3 , wherein said means includes a first beam splitter and a first photodetector.  
     
     
         5 . The optomechanical matrix switch of  claim 4 , wherein said first beam splitter splits a beam in a plane that is substantially parallel to said substrate.  
     
     
         6 . The optomechanical matrix switch of  claim 5 , wherein said first beam splitter splits a beam in a plane that is substantially perpendicular to said substrate.  
     
     
         7 . The optomechanical matrix switch of  claim 4 , wherein said means includes a second beam splitter and a second photodetector.  
     
     
         8 . The optomechanical matrix switch of  claim 3  further including means, disposed upon the substrate, for monitoring the optical power output by the matrix switch.