Method of producing anti-corrosion member and anti-corrosion member

Abstract

A base member made of a metal in which aluminum is included, ceramics in which an aluminum element is included, or a composition member constructed by a metal in which aluminum and ceramics are included, is provided in a container in which a solid fluorine compound such as NaHF 2 is filled. Then, the container is heated at a temperature higher than a decomposing temperature of the solid fluorine compound. After that, the base member is subjected to a heat treatment with the decomposed gas of the solid fluorine compound to form a fluoride layer on a surface of the base member. In this manner, it is possible to obtain an anti-corrosion member which shows a high corrosion property with respect to the corrosion gas of halogen series and its plasma, particularly with respect to chlorine gas and its plasma.

What is claimed is:  
     
         1 . A method of producing an anti-corrosion member having a base member made of a metal in which aluminum is included, ceramics in which aluminum element is included, or a composite member constructed by a metal in which aluminum is included and ceramics, and an anti-corrosion film formed on the base member, comprising the steps of: 
 setting the base member in a container in which a solid fluorine compound is filled;    heating the container at a temperature higher than a decomposition temperature of the fluorine compound to generate a decomposed gas of the fluorine compound and to subject the base member to a heat treatment with the decomposed gas of the fluorine compound; and    forming an anti-corrosion film made of a fluoride on a surface of the base member.    
     
     
         2 . The method according to  claim 1 , wherein the container is a sealed container.  
     
     
         3 . The method according to  claim 1 , wherein the heat treatment is performed at a temperature 0-200° C. higher than the decomposition temperature of the fluorine compound.  
     
     
         4 . The method according to  claim 1 , wherein the decomposition temperature of the fluorine compound is 100-300° C.  
     
     
         5 . The method according to  claim 4 , wherein the fluorine compound is selected from NaHF 2 , KHF 2  and NH 4 HF 2 .  
     
     
         6 . The method according to  claim 1 , wherein the fluorine compound does not include a metal element.  
     
     
         7 . The method according to  claim 1 , wherein the fluoride at least includes a crystal phase of aluminum fluoride.  
     
     
         8 . A method of producing an anti-corrosion member having a base member made of a metal in which aluminum is included and an anti-corrosion film formed on the base member, comprising the steps of: 
 setting the base member in a container in which a solid fluorine compound is filled;    heating the container at a temperature higher than a decomposition temperature of the fluorine compound to generate a decomposed gas of the fluorine compound and to subject the base member to a heat treatment with the decomposed gas of the fluorine compound, so that an intermediate film is formed on a surface of the base member;    subjecting the base member and the intermediate film to a heat treatment to react the base member and intermediate film with each other; and    forming an anti-corrosion film made of a fluoride.    
     
     
         9 . The method according to  claim 8 , wherein the heat treatment of the base member and the intermediate film is performed under an atmosphere in which oxygen and inert gas are included.  
     
     
         10 . The method according to  claim 8 , wherein the container is a sealed container.  
     
     
         11 . The method according to  claim 8 , wherein the fluorine compound is a solid fluorine compound which does not include a metal element at room temperature.  
     
     
         12 . The method according to  claim 11 , wherein the fluorine compound is NH 4  HF 2 .  
     
     
         13 . The method according to  claim 8 , wherein the intermediate film includes aluminum fluoride ammonium.  
     
     
         14 . The method according to  claim 13 , wherein part of the aluminum in the aluminum fluoride ammonium is substituted by another metal.  
     
     
         15 . A method of producing an anti-corrosion member having a base member made of a metal in which aluminum is included and an anti-corrosion film formed on the base member, comprising the steps of: 
 subjecting the base member and aluminum fluoride ammonium to a heat treatment under a condition such that the base member is contacted to the aluminum fluoride ammonium to react the base member and the aluminum fluoride ammonium with each other; and    forming an anti-corrosion film made of a fluoride.    
     
     
         16 . The method according to  claim 15 , wherein part of the aluminum in the aluminum fluoride ammonium is substituted by another metal.  
     
     
         17 . The method according to  claim 15 , wherein the heat treatment is performed under a condition such that powders of the aluminum fluoride ammonium are contacted to a surface of the base member.  
     
     
         18 . The method according to  claim 17 , wherein the heat treatment is performed under a condition such that the base member is embedded in the powders of the aluminum fluoride ammonium.  
     
     
         19 . The method according to  claim 17 , wherein a formed film, in which powders of the aluminum fluoride ammonium are included, is arranged on the base member, and then the formed film and the base member are subjected to a heat treatment.  
     
     
         20 . The method according to  claim 15 , wherein the heat treatment for the base member and the aluminum fluoride ammonium is performed under an atmosphere in which oxygen and inert gas are included.